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    • 17. 发明申请
    • SEMICONDUCTOR INTEGRATED CIRCUITS (ICs) EMPLOYING LOCALIZED LOW DIELECTRIC CONSTANT (LOW-K) MATERIAL IN INTER-LAYER DIELECTRIC (ILD) MATERIAL FOR IMPROVED SPEED PERFORMANCE
    • 半导体集成电路(IC)采用局部低介电常数(低K)材料在层间介质(ILD)材料中改进速度性能
    • WO2016204938A1
    • 2016-12-22
    • PCT/US2016/033709
    • 2016-05-23
    • QUALCOMM INCORPORATED
    • YANG, HainingCHEN, Xiangdong
    • H01L23/532
    • H01L29/0649H01L21/02282H01L21/762H01L21/768H01L23/5226H01L23/528H01L23/5329
    • Semiconductor integrated circuits (ICs) employing localized low dielectric constant (low-K) material in inter-layer dielectric (ILD) material for improved speed performance are disclosed. To speed up performance of selected circuits in an IC that would otherwise lower overall speed performance of the IC, low-K dielectric material is employed during IC fabrication. The low-K dielectric material is provided in selected, localized areas of ILD material in which selected circuits are disposed. In this manner, the IC will experience an overall increased speed performance during operation, because circuit components and/or circuit element interconnects of selected circuit(s) that are disposed in the low-K ILD material will experience reduced signal delay. Also, by use of low-K dielectric material in only selected, localized areas of ILD material of selected circuits, mechanical and/or thermal stability concern issues that would arise from use of low-K dielectric material in all of the ILD material in the IC are avoided.
    • 公开了在层间电介质(ILD)材料中采用局部低介电常数(低K)材料的半导体集成电路(IC),以提高速度性能。 为了加快IC中所选择的电路的性能,否则会降低IC的整体速度性能,在IC制造过程中采用低K电介质材料。 低K电介质材料设置在其中设置选择电路的ILD材料的选定的局部区域中。 以这种方式,由于设置在低K ILD材料中的所选择的电路的电路元件和/或电路元件互连将经历减小的信号延迟,所以IC将在操作期间经历总体增加的速度性能。 此外,通过仅在所选电路的ILD材料的选定的局部区域中使用低K电介质材料,机械和/或热稳定性涉及由于在所有ILD材料中使用低K电介质材料而引起的问题 IC被避免。