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    • 12. 发明授权
    • Semiconductor laser including groove having variable dimensions
    • 半导体激光器包括具有可变尺寸的凹槽
    • US5541950A
    • 1996-07-30
    • US392268
    • 1995-02-22
    • Hirotaka KizukiShoichi Karakida
    • Hirotaka KizukiShoichi Karakida
    • H01S5/00H01S5/02H01S5/10H01S5/16H01S5/223H01S5/24H01S5/40H01S3/18
    • H01S5/164H01S5/2231H01S5/4031H01S5/0202H01S5/106H01S5/168H01S5/24
    • A semiconductor laser including a semiconductor substrate of a first conductivity type; a semiconductor multilayer structure disposed on the substrate and including a first cladding layer of the first conductivity type, an active layer, a second cladding layer of a second conductivity type, opposite the first conductivity type, and a current blocking layer of the first conductivity type; a laser light emitting facet; a stripe-shaped V groove extending in a resonator length direction transverse to the laser light emitting facet and penetrating in a depth direction into a part of the semiconductor multilayer structure, including into the second cladding layer, the stripe-shaped V groove having a width transverse to the resonator length direction and the depth direction wherein at least one of the depth and width of the stripe-shaped V groove has a first dimension adjacent the laser light emitting facet and a second dimension, different from the first dimension, within the semiconductor laser spaced from the laser light emitting facet; and a semiconductor layer of the second conductivity type disposed in and filling the stripe-shaped V groove.
    • 一种半导体激光器,包括第一导电类型的半导体衬底; 半导体多层结构,其设置在所述基板上,并且包括第一导电类型的第一包层,与所述第一导电类型相反的第二导电类型的有源层,第二包覆层和所述第一导电类型的电流阻挡层 ; 激光发射面; 所述条状V槽沿垂直于所述激光发射小面的谐振器长度方向延伸并且沿深度方向穿入所述半导体多层结构的一部分,所述半导体多层结构包括在所述第二覆层中,所述条形V沟槽具有宽度 横向于谐振器长度方向和深度方向,其中条形V沟槽的深度和宽度中的至少一个具有邻近激光发射小面的第一尺寸和不同于第一尺寸的半导体内部的第二尺寸 与激光发射面分开的激光; 以及设置在所述条形V槽中并填充所述条形V槽的所述第二导电类型的半导体层。
    • 13. 发明授权
    • Semiconductor lasers and methods for fabricating semiconductor lasers
    • 半导体激光器和制造半导体激光器的方法
    • US5539763A
    • 1996-07-23
    • US302488
    • 1994-09-12
    • Masayoshi TakemiHirotaka Kizuki
    • Masayoshi TakemiHirotaka Kizuki
    • H01S5/00B82Y20/00G02B6/12G02B6/124H01L27/15H01S5/026H01S5/06H01S3/18
    • G02B6/124H01L27/15H01L33/0062H01S5/0265G02B2006/12128
    • An integrated semiconductor laser and light modulator includes a semiconductor laser disposed at a first region on a semiconductor substrate, a light modulator of an electric field absorbing type disposed at a second region on the semiconductor substrate adjacent to the first region for outputting a modulated light by transmitting or absorbing the laser light generated in the semiconductor laser, a semiconductor laminated layer structure including a quantum well structure layer disposed in the first region and the second region on the semiconductor substrate, and a lattice mismatched layer having a lattice constant smaller than that of the semiconductor substrate, disposed on a part of the semiconductor laminated layer structure, in the second region. It is possible to enhance the transmission efficiency of the laser light to the light modulator and the quality of the active layer of the semiconductor laser and the light absorption layer of the light modulator. Thus, an integrated semiconductor laser and light modulator that has a high reliability and long lifetime is obtained.
    • 集成半导体激光器和光调制器包括设置在半导体衬底上的第一区域的半导体激光器,设置在与第一区域相邻的半导体衬底上的第二区域处的电场吸收型光调制器,用于通过 透射或吸收在半导体激光器中产生的激光,包括设置在半导体衬底的第一区域和第二区域中的量子阱结构层的半导体层叠层结构,以及晶格常数小于 设置在半导体叠层结构的一部分上的半导体衬底在第二区域中。 可以提高激光对光调制器的传输效率以及半导体激光器的有源层和光调制器的光吸收层的质量。 因此,获得了具有高可靠性和长寿命的集成半导体激光器和光调制器。
    • 17. 发明授权
    • Method of manufacturing a carbon-doped compound semiconductor layer
    • 碳掺杂化合物半导体层的制造方法
    • US6096617A
    • 2000-08-01
    • US685061
    • 1996-07-22
    • Hirotaka Kizuki
    • Hirotaka Kizuki
    • H01L21/205H01L33/14H01L33/30H01S5/00H01L21/331
    • H01L21/0262H01L21/02395H01L21/02463H01L21/02546H01L21/02576H01L21/02579Y10S438/925
    • A compound semiconductor device is manufactured by forming a carbon-doped compound semiconductor device at a predetermined growth temperature on a compound semiconductor substrate, stopping the growth and changing the growth temperature of the compound semiconductor layer, including the carbon-doped compound semiconductor layer, to a predetermined temperature under an atmosphere comprising an alkylarsine, thereby avoiding the formation of free atomic hydrogen and preventing hydrogen contamination of the C-doped compound semiconductor layer. As a result, the amount of coupling between hydrogen and carbon in the carbon-doped compound semiconductor layer is significantly reduced, thereby preventing lowering of the carbon carrier concentration. The present method enables formation of a C-doped GaAs base layer without deterioration of electrical characteristics, and formation of a laser having a second clad layer of C-doped compound semiconductor layer with improved reliability.
    • 通过在化合物半导体基板上以预定的生长温度形成碳掺杂化合物半导体器件,使包含碳掺杂化合物半导体层的化合物半导体层的生长停止并使其生长温度变化,来制造化合物半导体器件,形成为 在包含烷基胂的气氛下的预定温度,从而避免形成游离原子氢并防止C掺杂化合物半导体层的氢污染。 结果,碳掺杂化合物半导体层中的氢和碳之间的偶合量显着降低,从而防止碳载体浓度的降低。 本方法能够形成C掺杂的GaAs基底层,而不会劣化电气特性,并且形成具有提高的可靠性的具有C掺杂化合物半导体层的第二覆盖层的激光器。