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    • 12. 发明授权
    • Memory device with surface-channel peripheral transistors
    • 具有表面通道外围晶体管的存储器件
    • US07638401B2
    • 2009-12-29
    • US11972048
    • 2008-01-10
    • Toshiyuki Nagata
    • Toshiyuki Nagata
    • H01L29/10
    • H01L27/10894H01L21/823807H01L21/823842H01L21/823892H01L27/1052H01L27/10817H01L27/10852H01L27/10897
    • A method of forming a memory device (e.g., a DRAM) including array and peripheral circuitry. A plurality of undoped polysilicon gates 58 are formed. These gates 58 are classed into three groups; namely, first conductivity type peripheral gates 58p, second conductivity type peripheral gates 58n, and array gates 58a. The array gates 58a and the first conductivity type peripheral gates 58n are masked such that the second conductivity type peripheral gates 58p remain unmasked. A plurality of second conductivity type peripheral transistors can then be formed by doping each of the second conductivity type peripheral gates 58p, while simultaneously doping a first and a second source/drain region 84 adjacent each of the second conductivity type peripheral gates 58p. The second conductivity type peripheral gates 58p are then masked such that the first conductivity type peripheral gates 58n remain unmasked. A plurality of first conductivity type peripheral transistors are formed by doping each of the first conductivity type peripheral gates 58n, while simultaneously doping a first and a second source/drain region 82 adjacent each of the first conductivity type peripheral gates 58n.
    • 一种形成包括阵列和外围电路的存储器件(例如,DRAM)的方法。 形成多个未掺杂的多晶硅栅极58。 这些门58分为三组; 即第一导电型外围栅极58p,第二导电型外围栅极58n和阵列栅极58a。 阵列栅极58a和第一导电型外围栅极58n被掩蔽,使得第二导电型外围栅极58p保持未屏蔽。 然后可以通过掺杂每个第二导电类型的外围栅极58p来形成多个第二导电类型的外围晶体管,同时掺杂与第二导电型周边栅极58p相邻的第一和第二源极/漏极区域84。 然后,第二导电型外围栅极58p被掩蔽,使得第一导电类型的外围栅极58n保持未屏蔽。 通过掺杂第一导电型周边栅极58n中的每一个,同时掺杂与第一导电型周边栅极58n中的每一个相邻的第一和第二源极/漏极区域82,形成多个第一导电型外围晶体管。
    • 14. 发明授权
    • Ferroelectric memory device having compact memory cell array
    • 具有紧凑型存储单元阵列的铁电存储器件
    • US6028784A
    • 2000-02-22
    • US300931
    • 1999-04-28
    • Kazuya MoriToshiyuki Nagata
    • Kazuya MoriToshiyuki Nagata
    • G11C7/18G11C11/22H01L27/115G11C7/00
    • H01L27/11502G11C11/22G11C7/18
    • A ferroelectric random access memory (FeRAM) is disclosed. The FeRAM (400) provides a folded bit line array having memory cells (402a-402f and 404a-404d) with an area equivalent to 6F.sup.2, where F is a minimum feature size. Reduced array size is achieved by utilizing access transistors of complementary conductivity type within the array. First type memory cells (402a-402f) having n-channel access transistors (N400a-N400f), are formed next to second type memory cells (404a-404d) having p-channel access transistors (P400a-P400d). Bit lines (410a-410e) are arranged into bit line pairs, with a first bit line of each pair being coupled to first type memory cells (402a-402f) and the second bit line of each bit line pair being coupled to second type memory cells (404a-404d). When a word line is driven to a first voltage, ferroelectric capacitor data is driven on the first bit line, while the second bit line provides a reference voltage. When a word line is driven to a second voltage, ferroelectric capacitor data is driven on the second bit line and the first bit line provides a reference voltage.
    • 公开了一种铁电随机存取存储器(FeRAM)。 FeRAM(400)提供具有存储单元(402a-402f和404a-404d)的折叠位线阵列,其面积等于6F2,其中F是最小特征尺寸。 通过利用阵列内的互补导电类型的存取晶体管来实现减小的阵列尺寸。 在具有p沟道存取晶体管(P400a-P400d)的第二类型存储单元(404a-404d)旁边形成具有n沟道存取晶体管(N400a-N400f)的第一类型存储单元(402a-402f)。 位线(410a-410e)被布置成位线对,每对的第一位线耦合到第一类型存储单元(402a-402f),并且每个位线对的第二位线被耦合到第二类型存储器 细胞(404a-404d)。 当字线被驱动到第一电压时,铁电电容器数据在第一位线上被驱动,而第二位线提供参考电压。 当字线被驱动到第二电压时,在第二位线上驱动铁电电容器数据,并且第一位线提供参考电压。
    • 18. 发明授权
    • Method for fabricating an open can-type stacked capacitor on an uneven surface
    • 在不平坦表面上制造开罐式叠层电容器的方法
    • US06580112B2
    • 2003-06-17
    • US09855401
    • 2001-05-15
    • Yoichi MiyaiMasayuki MoroiKatsushi BokuToshiyuki Nagata
    • Yoichi MiyaiMasayuki MoroiKatsushi BokuToshiyuki Nagata
    • H01L27108
    • H01L27/10855H01L28/92
    • An open can-type stacked capacitor is fabricated by forming a conductive layer (30, 130) outwardly of a substantially uneven surface (12, 112). A step (50, 150) is formed in an outer surface (32, 132) of the conductive layer (30, 130). A base (72, 172, 202) of a first electrode (70, 170, 200) is formed by removing a predetermined thickness (66, 166) of at least part of the conductive layer (30, 130). The base (72, 172, 202) is made of a portion of the conductive layer (30, 130) underlying the step (50, 150) by the predetermined thickness (66, 166). A sidewall (74, 174) of the first electrode (70, 170, 200) is formed. A dielectric layer (80) is formed outwardly of the first electrode (70, 170, 200). A second electrode (82) of the capacitor is formed outwardly of the dielectric layer (80).
    • 通过在基本上不平坦的表面(12,112)外部形成导电层(30,130)来制造开放式罐式叠层电容器。 在导电层(30,130)的外表面(32,132)中形成台阶(50,150)。 通过去除导电层(30,130)的至少一部分的预定厚度(66,166)来形成第一电极(70,170,200)的基底(72,172,202)。 基座(72,172,202)由位于台阶(50,150)下方的预定厚度(66,166)的导电层(30,130)的一部分制成。 形成第一电极(70,170,200)的侧壁(74,174)。 电介质层(80)形成在第一电极(70,170,200)的外侧。 电容器的第二电极(82)形成在电介质层(80)的外侧。
    • 19. 发明授权
    • Memory device with surface-channel peripheral transistors
    • 具有表面通道外围晶体管的存储器件
    • US07339220B2
    • 2008-03-04
    • US10287571
    • 2002-11-04
    • Toshiyuki Nagata
    • Toshiyuki Nagata
    • H01L27/108
    • H01L27/10894H01L21/823807H01L21/823842H01L21/823892H01L27/1052H01L27/10817H01L27/10852H01L27/10897
    • A method of forming a memory device (e.g., a DRAM) including array and peripheral circuitry. A plurality of undoped polysilicon gates 58 are formed. These gates 58 are classed into three groups; namely, first conductivity type peripheral gates 58p, second conductivity type peripheral gates 58n, and array gates 58a. The array gates 58a and the first conductivity type peripheral gates 58n are masked such that the second conductivity type peripheral gates 58p remain unmasked. A plurality of second conductivity type peripheral transistors can then be formed by doping each of the second conductivity type peripheral gates 58p, while simultaneously doping a first and a second source/drain region 84 adjacent each of the second conductivity type peripheral gates 58p. The second conductivity type peripheral gates 58p are then masked such that the first conductivity type peripheral gates 58n remain unmasked. A plurality of first conductivity type peripheral transistors are formed by doping each of the first conductivity type peripheral gates 58n, while simultaneously doping a first and a second source/drain region 82 adjacent each of the first conductivity type peripheral gates 58n.
    • 一种形成包括阵列和外围电路的存储器件(例如,DRAM)的方法。 形成多个未掺杂多晶硅栅极58。 这些门58分为三组; 即第一导电型外围栅极58p,第二导电型外围栅极58n和阵列栅极58a。 阵列栅极58a和第一导电型外围栅极58n被掩蔽,使得第二导电型外围栅极58p保持未屏蔽。 然后可以通过掺杂每个第二导电型外围栅极58 p来形成多个第二导电类型的外围晶体管,同时掺杂与第二导电型周边栅极58 p相邻的第一和第二源极/漏极区域84。 然后对第二导电类型的外围栅极58 p进行掩模,使得第一导电型外围栅极58n保持未屏蔽。 多个第一导电型外围晶体管通过掺杂每个第一导电类型的外围栅极58 n而形成,同时掺杂第一和第二源极/漏极区域82,其邻近于每个第一导电型周边栅极58 n。