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    • 11. 发明申请
    • SEMICONDUCTOR DEVICE AND PROCESS FOR MANUFACTURING THE SAME
    • 半导体器件及其制造方法
    • WO1998012756A1
    • 1998-03-26
    • PCT/JP1997003324
    • 1997-09-19
    • NGK INSULATORS, LTD.TERASAWA, YoshioSEKIYA, Takayuki
    • NGK INSULATORS, LTD.
    • H01L29/744
    • H01L21/30604H01L21/3086H01L21/31111H01L21/31144H01L29/7392
    • There are repeated the step of isotropically etching an oxide film (12) formed over the surface of a semiconductor substrate (11) through an opening (12a) to form a recess (11a), the step of anisotropically etching an oxide film (14) formed on the inner face of the recess to form an opening (14a), and the step of isotropically etching through the opening to form a recess (11b) succeeding to the recess (11a) through the opening (14a). A deep gate structure can be achieved within a short time while eliminating the overlapping errors of a mask, by using the overhangs of the openings formed in the oxide films (12, 14, 15 and 16) as the mask in all the following etching steps to repeat the isotropic and anisotropic etching steps through the same mask. The sectional shapes of the recesses are formed of a plurality of curved surfaces having different curvatures. It is possible to achieve a semiconductor device having recesses of a large aspect ratio (i.e., length/width ratio), i.e., of a larger depth than an opening width.
    • 重复对通过开口(12a)在半导体衬底(11)的表面上形成的氧化膜(12)进行各向同性蚀刻以形成凹部(11a)的步骤,各向异性蚀刻氧化膜(14)的步骤, 形成在所述凹部的内表面上以形成开口(14a),并且通过所述开口各向同性蚀刻以形成通过所述开口(14a)在所述凹部(11a)之后的凹部(11b)的步骤。 可以在短时间内实现深栅极结构,同时通过在所有后续蚀刻步骤中通过使用在氧化物膜(12,14,15和16)中形成的开口的突出部作为掩模来消除掩模的重叠误差 通过相同的掩模重复各向同性和各向异性蚀刻步骤。 凹部的截面形状由具有不同曲率的多个曲面形成。 可以实现具有大的纵横比(即长宽比)的凹槽,即比开口宽度更大的深度的半导体器件。
    • 12. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • WO1998012755A1
    • 1998-03-26
    • PCT/JP1997003276
    • 1997-09-17
    • NGK INSULATORS, LTD.TERASAWA, Yoshio
    • NGK INSULATORS, LTD.
    • H01L29/74
    • H01L29/66356H01L29/66416H01L29/7392H01L29/7722
    • An electrostatic induction type semiconductor device especially for a high electric power, a recess (12) is formed in one surface of a silicon substrate (11) of one conduction type, in which a gate region (13) of the opposite conduction type is formed in the bottom face of the recess, in which a recess (14) is formed in the portion which is surrounded by the adjoining gate regions, and in which an island cathode short-circuiting region (15) of the opposite conduction type is so formed in the bottom face of the recess as to extend to the surface of the silicon substrate. A cathode region (17) extending to the surface of the silicon substrate is formed to continue to a channel region (16) which is surrounded by the gate region (13) and the cathode short-circuiting region (15). A cathode electrode substrate (21) is mounted in contact with the cathode short-circuiting region (15) and the cathode region (17). The carriers to reside in the channel region is directly swept, when turned OFF, through the cathode short-circuiting region (15) to the cathode electrode substrate (21) so that the electrostatic induction type semiconductor device capable of breaking a high current at a high speed without increasing the ON resistance can be provided.
    • 特别是用于高功率的静电感应型半导体器件,在一个导电类型的硅衬底(11)的一个表面上形成凹槽(12),其中形成相反导电类型的栅极区域(13) 在所述凹部的底面中,在由相邻的栅极区域包围的部分中形成有凹部(14),并且形成有相反导电型的岛状阴极短路区域(15) 在凹槽的底面中延伸到硅衬底的表面。 形成延伸到硅衬底表面的阴极区域(17),以连续到由栅极区域(13)和阴极短路区域(15)围绕的沟道区域(16)。 阴极电极基板(21)与阴极短路区域(15)和阴极区域(17)接触地安装。 驻留在通道区域中的载流子在关闭时通过阴极短路区域(15)直接扫描到阴极电极基板(21),使得能够在一个或多个阴极电极基板上断开高电流的静电感应型半导体器件 可以提供高速度而不增加导通电阻。
    • 13. 发明申请
    • SOLID INSULATOR AND METHOD OF MANUFACTURING THE SAME
    • 固体绝缘体及其制造方法
    • WO1994008345A1
    • 1994-04-14
    • PCT/JP1993001354
    • 1993-09-21
    • NGK INSULATORS, LTD.ITOH, HiromuYAMAGUCHI, MakioITOH, NaohitoNAKAI, TakaoMORI, Shigeo
    • NGK INSULATORS, LTD.
    • H01B17/14
    • H01B17/14H01B19/00H01B19/04
    • The present invention aims at providing a solid insulator of a high strength, and a method of manufacturing the same. The solid insulator is characterized in that it consists of porcelain in which the quantity of crystals of cristobalite is not more than 10 %, an internal strain in the direction of compression in a columnar insulator body being larger in the diametrically inner portion thereof than in the diametrically outer portion thereof, the difference Y between the internal strain in the outer circumferential portion of the insulator body and that in the diametrically central portion thereof Y >= (1.76 x 10-6)X, wherein X(mm) represents the diameter of the insulator body. A method of manufacturing such a solid insulator is characterized in that a sintered insulator is quenched so as to increase the difference between the internal strain in the inner portion of the insulator and that in the outer portion thereof.
    • 本发明旨在提供一种高强度的固体绝缘体及其制造方法。 固体绝缘体的特征在于,其中方石英晶体的量不超过10%的陶瓷,柱状绝缘体的压缩方向的内部应变在直径方向内部比在 绝缘体的外周部的内部应变与其直径方向的中心部Y> =(1.76×10 -6)X的内部应变之间的差异Y,其中X(mm)表示直径 绝缘子体。 制造这种固体绝缘体的方法的特征在于,烧结绝缘体被淬火以增加绝缘体的内部部分和其外部部分中的内部应变之间的差异。
    • 19. 发明申请
    • PROCESS FOR PRODUCING LOW-BOILING OIL FROM WASTE PLASTICS CONTAINING PHTHALIC POLYESTER AND/OR POLYVINYL CHLORIDE
    • 用于生产含有PHTHALIC聚酯和/或聚氯乙烯的废塑料的低沸点油的方法
    • WO1996040839A1
    • 1996-12-19
    • PCT/JP1996001542
    • 1996-06-06
    • NGK INSULATORS, LTD.HASHIMOTO, KenjiMASUDA, TakaoYOSHIDA, ShuichiIKEDA, Yuichi
    • NGK INSULATORS, LTD.
    • C10G01/10
    • C10G1/10C10G1/002
    • A low-boiling oil having a high octane number is produced from waste plastics containing phthalic polyester or polyvinyl chloride without generating any phthalic sublimate or carbon residue. The oil can be produced by thermally cracking waste plastics containing phthalic polyester and/or polyvinyl chloride in an atmosphere of steam or a mixture thereof with an inert gas. Alternatively, it can be produced by thermally cracking the waste plastics and catalytically cracking the oil and gas thus produced in an atmosphere of steam or a mixture thereof with an inert gas in the presence of a catalyst. Further, the waste plastics to be used may be dechlorinated prior to the thermal cracking, or the thermal cracking may be conducted in the presence of one or more members selected from among iron hydroxides, hydrated iron oxides and iron oxides.
    • 具有高辛烷值的低沸点油由含有邻苯二甲酸聚酯或聚氯乙烯的废塑料制成,而不产生任何邻苯二甲酸或碳残余物。 油可以通过在蒸汽或其混合物与惰性气体的气氛中热裂化含有邻苯二甲酸和/或聚氯乙烯的废塑料来制备。 或者,可以通过在废催化剂的热裂解和在惰性气体的催化剂存在下,在蒸气或其混合物的气氛中产生的油和气体进行催化裂化来制备。 此外,所使用的废塑料可以在热裂化之前脱氯,或者可以在一种或多种选自氢氧化铁,水合铁氧化物和氧化铁中的成员的存在下进行热裂解。