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    • 15. 发明授权
    • Thin film transistors and methods of manufacturing thin film transistors
    • 薄膜晶体管和制造薄膜晶体管的方法
    • US08586427B2
    • 2013-11-19
    • US13204785
    • 2011-08-08
    • Sang-Hun JeonMoon-Sook LeeByeong-Ok Cho
    • Sang-Hun JeonMoon-Sook LeeByeong-Ok Cho
    • H01L21/8234H01L29/786
    • H01L29/41733H01L27/1292H01L29/42384
    • A thin film transistor includes a layer structure having a gate electrode, a gate insulation layer and a channel layer. A source line may contact the channel layer, and may extend along a direction crossing over the gate electrode. The source line may partially overlap the gate electrode so that both sides of the source line overlapping the gate electrode may be entirely positioned between both sides of the gate electrode. A drain line may make contact with the channel layer and may be spaced apart from the source line by a channel length. The drain line may have a structure symmetrical to that of the source line. Overlap areas among the gate electrode, the source line and the drain line may be reduced, so that the thin film transistor may ensure a high cut-off frequency.
    • 薄膜晶体管包括具有栅电极,栅极绝缘层和沟道层的层结构。 源极线可以接触沟道层,并且可以沿着与栅电极交叉的方向延伸。 源极线可以部分地与栅电极重叠,使得与栅极重叠的源极线的两侧可以完全位于栅电极的两侧之间。 漏极线可以与沟道层接触并且可以与源极线隔开通道长度。 漏极线可以具有与源极线对称的结构。 可以减小栅电极,源极线和漏极线之间的重叠区域,使得薄膜晶体管可以确保高的截止频率。
    • 16. 发明授权
    • CMOS transistor and method of manufacturing the same
    • CMOS晶体管及其制造方法
    • US07994581B2
    • 2011-08-09
    • US12506656
    • 2009-07-21
    • Sang-Hun JeonMoon-Sook LeeByeong-Ok Cho
    • Sang-Hun JeonMoon-Sook LeeByeong-Ok Cho
    • H01L27/092
    • H01L27/124B82Y10/00H01L27/095H01L27/1214H01L27/1222H01L27/1225H01L27/1251H01L29/0665H01L29/0673H01L29/45H01L29/7839H01L29/78681H01L29/7869
    • In a complementary metal-oxide semiconductor (CMOS) transistor and a method of manufacturing the same, a semiconductor channel material having a first conductivity type is provided on a substrate. A first transistor having the first conductivity type and a second transistor having a second conductivity type are positioned on the substrate, respectively. The first transistor includes a first gate positioned on a first surface of the channel material through a medium of a gate insulation layer and a pair of ohmic contacts positioned on a second surface of the channel material and crossing over both side portions of the first gate electrode, respectively. The second transistor includes a second gate positioned on the first surface of the channel material through a medium of the gate insulation layer and a pair of Schottky contacts positioned on the second surface of the channel material and crossing over both side portions of the second gate electrode, respectively.
    • 在互补金属氧化物半导体(CMOS)晶体管及其制造方法中,在基板上设置具有第一导电类型的半导体沟道材料。 具有第一导电类型的第一晶体管和具有第二导电类型的第二晶体管分别位于衬底上。 第一晶体管包括位于通道材料的第一表面上的第一栅极,该第一栅极通过栅极绝缘层的介质和位于沟道材料的第二表面上的一对欧姆触点,并且跨越第一栅电极的两侧部分 , 分别。 第二晶体管包括通过栅极绝缘层的介质定位在沟道材料的第一表面上的第二栅极和位于沟道材料的第二表面上并与第二栅电极的两侧部分交叉的一对肖特基触点 , 分别。
    • 17. 发明申请
    • CMOS TRANSISTOR AND METHOD OF MANUFACTURING THE SAME
    • CMOS晶体管及其制造方法
    • US20100013018A1
    • 2010-01-21
    • US12506656
    • 2009-07-21
    • Sang-Hun JeonMoon-Sook LeeByeong-Ok Cho
    • Sang-Hun JeonMoon-Sook LeeByeong-Ok Cho
    • H01L27/092
    • H01L27/124B82Y10/00H01L27/095H01L27/1214H01L27/1222H01L27/1225H01L27/1251H01L29/0665H01L29/0673H01L29/45H01L29/7839H01L29/78681H01L29/7869
    • In a complementary metal-oxide semiconductor (CMOS) transistor and a method of manufacturing the same, a semiconductor channel material having a first conductivity type is provided on a substrate. A first transistor having the first conductivity type and a second transistor having a second conductivity type are positioned on the substrate, respectively. The first transistor includes a first gate positioned on a first surface of the channel material through a medium of a gate insulation layer and a pair of ohmic contacts positioned on a second surface of the channel material and crossing over both side portions of the first gate electrode, respectively. The second transistor includes a second gate positioned on the first surface of the channel material through a medium of the gate insulation layer and a pair of Schottky contacts positioned on the second surface of the channel material and crossing over both side portions of the second gate electrode, respectively.
    • 在互补金属氧化物半导体(CMOS)晶体管及其制造方法中,在基板上设置具有第一导电类型的半导体沟道材料。 具有第一导电类型的第一晶体管和具有第二导电类型的第二晶体管分别位于衬底上。 第一晶体管包括位于通道材料的第一表面上的第一栅极,该第一栅极通过栅极绝缘层的介质和位于沟道材料的第二表面上的一对欧姆触点,并且跨越第一栅电极的两侧部分 , 分别。 第二晶体管包括通过栅极绝缘层的介质定位在沟道材料的第一表面上的第二栅极和位于沟道材料的第二表面上并与第二栅电极的两侧部分交叉的一对肖特基触点 , 分别。
    • 18. 发明申请
    • Thin Film Transistors
    • 薄膜晶体管
    • US20100006849A1
    • 2010-01-14
    • US12497852
    • 2009-07-06
    • Sang-Hun JeonMoon-Sook LeeByeong-Ok Cho
    • Sang-Hun JeonMoon-Sook LeeByeong-Ok Cho
    • H01L29/786
    • H01L29/41733H01L27/1292H01L29/42384
    • A thin film transistor includes a layer structure having a gate electrode, a gate insulation layer and a channel layer. A source line may contact the channel layer, and may extend along a direction crossing over the gate electrode. The source line may partially overlap the gate electrode so that both sides of the source line overlapping the gate electrode may be entirely positioned between both sides of the gate electrode. A drain line may make contact with the channel layer and may be spaced apart from the source line by a channel length. The drain line may have a structure symmetrical to that of the source line. Overlap areas among the gate electrode, the source line and the drain line may be reduced, so that the thin film transistor may ensure a high cut-off frequency.
    • 薄膜晶体管包括具有栅电极,栅极绝缘层和沟道层的层结构。 源极线可以接触沟道层,并且可以沿着与栅电极交叉的方向延伸。 源极线可以部分地与栅电极重叠,使得与栅电极重叠的源极线的两侧可以完全位于栅电极的两侧之间。 漏极线可以与沟道层接触并且可以与源极线隔开通道长度。 漏极线可以具有与源极线对称的结构。 可以减小栅电极,源极线和漏极线之间的重叠区域,使得薄膜晶体管可以确保高的截止频率。
    • 19. 发明授权
    • Thin film transistors
    • 薄膜晶体管
    • US08022410B2
    • 2011-09-20
    • US12497852
    • 2009-07-06
    • Sang-Hun JeonMoon-Sook LeeByeong-Ok Cho
    • Sang-Hun JeonMoon-Sook LeeByeong-Ok Cho
    • H01L29/786
    • H01L29/41733H01L27/1292H01L29/42384
    • A thin film transistor includes a layer structure having a gate electrode, a gate insulation layer and a channel layer. A source line may contact the channel layer, and may extend along a direction crossing over the gate electrode. The source line may partially overlap the gate electrode so that both sides of the source line overlapping the gate electrode may be entirely positioned between both sides of the gate electrode. A drain line may make contact with the channel layer and may be spaced apart from the source line by a channel length. The drain line may have a structure symmetrical to that of the source line. Overlap areas among the gate electrode, the source line and the drain line may be reduced, so that the thin film transistor may ensure a high cut-off frequency.
    • 薄膜晶体管包括具有栅电极,栅极绝缘层和沟道层的层结构。 源极线可以接触沟道层,并且可以沿着与栅电极交叉的方向延伸。 源极线可以部分地与栅电极重叠,使得与栅电极重叠的源极线的两侧可以完全位于栅电极的两侧之间。 漏极线可以与沟道层接触并且可以与源极线隔开通道长度。 漏极线可以具有与源极线对称的结构。 可以减小栅电极,源极线和漏极线之间的重叠区域,使得薄膜晶体管可以确保高的截止频率。