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    • 11. 发明授权
    • Methods for fabricating a magnetic head reader using a chemical mechanical polishing (CMP) process for sensor stripe height patterning
    • 使用用于传感器条纹高度图案化的化学机械抛光(CMP)工艺来制造磁头阅读器的方法
    • US08557708B2
    • 2013-10-15
    • US11743404
    • 2007-05-02
    • Hung-Chin GuthrieYing HongMing Jiang
    • Hung-Chin GuthrieYing HongMing Jiang
    • H01L21/302H01L21/461
    • G11B5/3163G11B5/3169
    • Methods for fabricating TMR and CPP GMR magnetic heads using a chemical mechanical polishing (CMP) process with a patterned CMP conductive protective layer for sensor stripe height patterning. The method comprises defining a stripe height of a read sensor of a magnetic head reader. The method further comprises refill depositing an insulator layer on the read sensor. The method further comprises performing a CMP process down to the conductive protective layer on the read sensor deposited while defining the read sensor to remove an overfill portion of the insulator layer above the conductive protective layer and to remove a sensor pattern masking structure on the conductive protective layer. As a result, the insulator layer is planarized and smooth with the read sensor, eliminating fencing and alumina bumps typically encountered in the insulator layer at the edge of the patterned sensor.
    • 使用化学机械抛光(CMP)工艺制造TMR和CPP GMR磁头的方法,具有用于传感器条纹高度图案化的图案化CMP导电保护层。 该方法包括定义磁头读取器的读取传感器的条带高度。 该方法还包括在读取的传感器上填充沉积绝缘体层。 该方法还包括在限定读取传感器的同时,在读取的传感器上执行CMP处理,以去除所述导电保护层上方的绝缘体层的过度填充部分,并且去除导电保护层上的传感器图案掩模结构 层。 结果,绝缘体层与读取传感器平坦化并且平滑,消除了在图案化传感器的边缘处的绝缘体层中通常遇到的栅栏和氧化铝凸块。
    • 20. 发明授权
    • Method for providing a perpendicular magnetic recording (PMR) pole
    • 提供垂直磁记录(PMR)极的方法
    • US08225488B1
    • 2012-07-24
    • US12471278
    • 2009-05-22
    • Jinqiu ZhangYun-Fei LiYing Hong
    • Jinqiu ZhangYun-Fei LiYing Hong
    • G11B5/127H04R31/00
    • G11B5/1278G11B5/3116G11B5/3163Y10T29/49039Y10T29/49043Y10T29/49044Y10T29/49046Y10T29/49048Y10T29/49052
    • A method for providing a PMR pole in a magnetic recording transducer comprises providing a mask on an intermediate layer, the mask including a line having at least one side, providing a hard mask on the mask, a first portion of the hard mask residing on the at least one side and a second portion residing on a surface of the intermediate layer, the hard mask including a dry-etchable layer and a high removal ratio layer on the dry-etchable layer, removing at least part of the first portion of the hard mask, at least a portion of the line being exposed, removing the line, thereby providing an aperture in the hard mask corresponding to the line, forming a trench in the intermediate layer under the aperture using a removal process, and providing the PMR pole, at least a portion of the PMR pole residing in the trench.
    • 用于在磁记录换能器中提供PMR极的方法包括在中间层上提供掩模,所述掩模包括具有至少一个侧面的线,在所述掩模上提供硬掩模,所述硬掩模的位于所述掩模上的第一部分 驻留在中间层的表面上的至少一个侧面和第二部分,该硬掩模包括在该可干蚀刻层上的可干蚀刻层和高去除率层,去除硬的第一部分的至少一部分 掩模,线的至少一部分被暴露,去除线,从而在对应于线的硬掩模中提供孔,使用去除过程在孔下方的中间层中形成沟槽,以及提供PMR极, PMR极的至少一部分位于沟槽中。