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11. 发明授权

US06330102B1 Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics 有权
标题翻译：使用单轴反射镜阵列和继电器光学的二维转向光束NxM光开关的装置和方法
公开(公告)号：US06330102B1
公开(公告)日：2001-12-11
申请号：US09536164
申请日：2000-03-25
申请人： Michael J. Daneman , Behrang Behin , Satinderpall Pannu
发明人： Michael J. Daneman , Behrang Behin , Satinderpall Pannu
IPC分类号： G02B2600
CPC分类号： G02B6/3556 , B81B3/0021 , B81B2201/033 , B81B2201/045 , B81B2203/0181 , B81B2203/058 , B81B2207/07 , B81C1/00214 , G02B6/3512 , G02B6/3518 , G02B6/3542 , G02B6/3546 , G02B6/356 , G02B6/357 , G02B6/3584 , G02B26/0833 , G02B26/085 , G02B26/0858 , G02B26/0866 , H02N1/008
摘要： A beam steering module and switching system. The steering module is composed of a N×M array of single axis mirrors able to rotate about a particular axis (X-axis), a second N×M array of single axis mirrors able to rotate about an axis orthogonal to that of the first N×M array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.
摘要翻译：光束转向模块和开关系统。转向模块由能够围绕特定轴线（X轴）旋转的单轴镜的N×M阵列组成，能够围绕与第一N×M阵列阵列的轴正交的轴线旋转的单轴镜的第二N×M阵列（Y轴）和设计成将第一反射镜阵列成像到第二反射镜阵列上的中继透镜，使得可以通过调整X中的适当反射镜的角度来控制X和Y轴两者的光束角度，以及 Y镜阵列。可以组合两个转向模块以形成切换系统。使用两个这样的转向模块，可以在输出光纤阵列的平面处完全确定从任何输入光纤出射的光束的位置和角度。

12. 发明授权

US06480319B2 Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays 有权
标题翻译：使用单轴反射镜阵列的二维转向光束NxM光学开关的装置和方法
公开(公告)号：US06480319B2
公开(公告)日：2002-11-12
申请号：US09917490
申请日：2001-07-28
申请人： Michael J. Daneman , Behrang Behin , Satinderpall S. Pannu
发明人： Michael J. Daneman , Behrang Behin , Satinderpall S. Pannu
IPC分类号： G02B2600
CPC分类号： G02B6/3556 , B81B3/0021 , B81B2201/033 , B81B2201/045 , B81B2203/0181 , B81B2203/058 , B81B2207/07 , B81C1/00214 , G02B6/3512 , G02B6/3518 , G02B6/3542 , G02B6/3546 , G02B6/356 , G02B6/357 , G02B6/3584 , G02B26/0833 , G02B26/085 , G02B26/0858 , G02B26/0866 , H02N1/008
摘要： A beam steering module and switching system. The steering module is composed of a N×M array of single axis mirrors able to rotate about a particular axis (X-axis), a second N×M array of single axis mirrors able to rotate about an axis orthogonal to that of the first N×M array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.
摘要翻译：光束转向模块和开关系统。转向模块由能够围绕特定轴线（X轴）旋转的单轴镜的N×M阵列组成，能够围绕与第一N×M阵列阵列的轴正交的轴旋转的单轴镜的第二N×M阵列（Y轴）和设计成将第一反射镜阵列成像到第二反射镜阵列上的中继透镜，使得可以通过调整X中的适当反射镜的角度来控制X和Y轴两者的光束角度，以及 Y镜阵列。可以组合两个转向模块以形成切换系统。使用两个这样的转向模块，可以在输出光纤阵列的平面处完全确定从任何输入光纤出射的光束的位置和角度。

13. 发明授权

US06437902B2 Optical beam steering switching system 有权
标题翻译：光束转向开关系统
公开(公告)号：US06437902B2
公开(公告)日：2002-08-20
申请号：US09917431
申请日：2001-07-28
申请人： Michael J. Daneman , Behrang Behin , Satinderpall S. Pannu
发明人： Michael J. Daneman , Behrang Behin , Satinderpall S. Pannu
IPC分类号： G02B2600
CPC分类号： G02B6/3556 , B81B3/0021 , B81B2201/033 , B81B2201/045 , B81B2203/0181 , B81B2203/058 , B81B2207/07 , B81C1/00214 , G02B6/3512 , G02B6/3518 , G02B6/3542 , G02B6/3546 , G02B6/356 , G02B6/357 , G02B6/3584 , G02B26/0833 , G02B26/085 , G02B26/0858 , G02B26/0866 , H02N1/008
摘要： A beam steering module and switching system. The steering module is composed of a N×M array of single axis mirrors able to rotate about a particular axis (X-axis), a second N×M array of single axis mirrors able to rotate about an axis orthogonal to that of the first N×M array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.
摘要翻译：光束转向模块和开关系统。转向模块由能够围绕特定轴线（X轴）旋转的单轴镜的N×M阵列组成，能够围绕与第一N×M阵列阵列的轴正交的轴线旋转的单轴镜的第二N×M阵列（Y轴）和设计成将第一反射镜阵列成像到第二反射镜阵列上的中继透镜，使得可以通过调整X中的适当反射镜的角度来控制X和Y轴两者的光束角度，以及 Y镜阵列。可以组合两个转向模块以形成切换系统。使用两个这样的转向模块，可以在输出光纤阵列的平面处完全确定从任何输入光纤出射的光束的位置和角度。

14. 发明授权

US06819820B1 Use of applied force to improve MEMS switch performance 有权
标题翻译：使用施加力来提高MEMS开关性能
公开(公告)号：US06819820B1
公开(公告)日：2004-11-16
申请号：US09932433
申请日：2001-08-18
申请人： Murali Chaparala , Michael J. Daneman
发明人： Murali Chaparala , Michael J. Daneman
IPC分类号： G02B642
CPC分类号： G02B26/0841 , B81B3/0008 , B81B2201/045 , B81B2203/0181 , B81B2203/058 , B81C1/00214 , G02B6/32 , G02B6/3514 , G02B6/3518 , G02B6/3548 , G02B6/357 , G02B6/358 , G02B6/3584 , G02B2006/12104
摘要： A method is disclosed for operating a MEMS device having a flap that is movable with respect to a base. The method includes applying a force to the flap to move the flap at least partially out of contact with an underlying base. Means for applying such a biasing force may be incorporated into a microelectromechanical (MEMS) apparatus having a base and a flap with a portion coupled to the base so that the flap may move out of the plane of the base between first and second position. The base may have a cavity with largely vertical sidewalls that contact a portion of the flap when the flap is in the second position Electrodes may be placed on the vertical sidewalls and electrically isolated from the base to provide electrostatic clamping of the flap to the sidewall. The base may be made from a substrate portion of a silicon-on-insulator (SOI) wafer and the flap defined from a device layer of the SOI wafer. The flap may be connected to the base by one or more flexures such as torsional beams. An array of one or more of such structures may be used to form an optical switch.
摘要翻译：公开了一种用于操作具有相对于基座可移动的翼片的MEMS装置的方法。所述方法包括向所述翼片施加力以使所述翼片至少部分地与下面的基座接触。用于施加这种偏压力的装置可以结合到具有基部和翼片的微机电（MEMS）装置中，该翼片具有联接到基部的部分，使得翼片可以在第一和第二位置之间移动离开基部的平面。底座可以具有一个具有很大垂直侧壁的空腔，当瓣片处于第二位置时，电极可以被放置在垂直侧壁上并与底座电隔离以提供瓣片向侧壁的静电夹持。基底可以由绝缘体上硅（SOI）晶片的衬底部分和从SOI晶片的器件层限定的瓣形成。翼片可以通过一个或多个挠曲件（例如扭转梁）连接到基座。可以使用一个或多个这样的结构的阵列来形成光学开关。

15. 发明授权

US07177081B2 High contrast grating light valve type device 有权
标题翻译：高对比度光栅光阀型装置
公开(公告)号：US07177081B2
公开(公告)日：2007-02-13
申请号：US09802619
申请日：2001-03-08
申请人： Akira Tomita , David Thomas Amm , Michael J. Daneman , James Hunter , Bryan Staker
发明人： Akira Tomita , David Thomas Amm , Michael J. Daneman , James Hunter , Bryan Staker
IPC分类号： G02B5/18
CPC分类号： G02B26/0808 , G02B5/1828
摘要： A grating light valve has with a plurality of spaced reflective ribbons are spatially arranged over a substrate with reflective surfaces. The grating light valve is configured to optimized the conditions for constructive and destructive interference with an incident light source having a wavelength λ. The grating light valve preferably has a set of movable active ribbons alternating between the set of stationary bias ribbons. The active ribbons and the bias ribbons are spatially separated over the substrate surface such that reflective regions of the substrate surface correspond to the spaces between the ribbons. The ribbons and reflective regions of the substrate optically and geometrically optimized for to generate the conditions for constrictive and destructive interference with the incident light source. Accordingly, ribbons of the active ribbons are configured with reflective cross sections that are is approximately equal to the sum of the diffraction cross sections of the bias ribbons and the reflective regions of the substrate. In operation, active ribbons are moved by a multiple of λ/4 to switch between the conditions for constructive and destructive interference.
摘要翻译：光栅光阀具有多个间隔开的反射带，其空间上布置在具有反射表面的基板上。光栅光阀被配置为优化与具有波长λ的入射光源的建构性和相消干涉的条件。光栅光阀优选地具有在一组固定偏置带之间交替的一组可移动有源带。有源带和偏置带在衬底表面上在空间上分开，使得衬底表面的反射区域对应于带之间的空间。光学和几何优化的基板的带和反射区域以产生用于对入射光源的收缩和相消干涉的条件。因此，有源带的带被构造成具有近似等于偏置带的衍射横截面和基板的反射区域之和的反射横截面。在操作中，活动色带移动λ/ 4的倍数，以在建构性和相消干涉的条件之间切换。

16. 发明授权

US08384134B2 MEMS device including an electrical interconnect through a substrate 有权
标题翻译： MEMS器件包括通过衬底的电互连
公开(公告)号：US08384134B2
公开(公告)日：2013-02-26
申请号：US13455494
申请日：2012-04-25
申请人： Michael J. Daneman , Steven S. Nasiri , Martin Lim
发明人： Michael J. Daneman , Steven S. Nasiri , Martin Lim
IPC分类号： H01L27/148 , H01L29/84 , H01L21/00
CPC分类号： A45D27/42 , B81C1/00238 , B81C2203/0792 , H01L21/76898
摘要： A MEMS device is disclosed. The MEMS device comprises a MEMS substrate and a CMOS substrate having a front surface, a back surface and one or more metallization layers. The front surface being bonded to the MEMS substrate. The MEMS device includes one or more conductive features on the back surface of the CMOS substrate and electrical connections between the one or more metallization layers and the one or more conductive features.
摘要翻译：公开了MEMS器件。 MEMS器件包括MEMS衬底和具有前表面，后表面和一个或多个金属化层的CMOS衬底。前表面接合到MEMS基板上。 MEMS器件包括在CMOS衬底的背面上的一个或多个导电特征以及一个或多个金属化层与一个或多个导电特征之间的电连接。

17. 发明授权

US06873756B2 Tiling of optical MEMS devices 有权
标题翻译：光学MEMS器件的平铺
公开(公告)号：US06873756B2
公开(公告)日：2005-03-29
申请号：US09949210
申请日：2001-09-07
申请人： Timothy E. Beerling , Michael J. Daneman
发明人： Timothy E. Beerling , Michael J. Daneman
IPC分类号： G02B26/08 , G02B6/26
CPC分类号： G02B26/0841
摘要： An optical microelectromechanical system (MEMS) device and a method for making it are disclosed. The device generally includes a substrate with two or more device dies attached to the substrate. Each device die includes one or more MEMS optical elements. A common clamping die is attached to the device dies such that each MEMS optical element aligns with a corresponding clamping surface on the common clamping die. The single larger clamping die, which covers all the elements on the smaller device dies, forces mirrors contained thereon to register accurately, in the “ON” state. Such a device may be made by attaching two or more device dies to a substrate, and attaching a common clamping die to the two or more device dies. The device dies may be attached to the substrate before attaching the common clamping die to the device dies. Alternatively, the common clamping die may be attached to the device dies before the device dies are attached to the substrate. High yields may be achieved since simple semiconductor process may be used to fabricate the larger clamping die.
摘要翻译：公开了一种光学微机电系统（MEMS）装置及其制造方法。该装置通常包括具有附接到基板的两个或更多个器件裸片的衬底。每个器件管芯包括一个或多个MEMS光学元件。常见的夹紧模具附接到器件管芯，使得每个MEMS光学元件与公共夹紧模具上的对应夹紧表面对准。覆盖较小器件裸片上的所有元件的单个较大的夹紧裸片在“ON”状态下迫使容纳在其上的反射镜准确地进行寄存。这样的装置可以通过将两个或更多个器件管芯附接到衬底并且将公共夹紧管芯附接到两个或更多个器件管芯来制造。在将公共夹紧模具附接到器件裸片之前，器件管芯可以附接到衬底。或者，在将器件管芯附接到衬底之前，可以将公共夹紧模具附接到器件管芯。可以实现高产率，因为可以使用简单的半导体工艺来制造更大的夹紧模具。

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