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    • 12. 发明申请
    • FILAMENT ELECTRICAL DISCHARGE ION SOURCE
    • FILAMENT电子放电源
    • US20110080095A1
    • 2011-04-07
    • US12812246
    • 2009-01-08
    • Maxime MakarovMarc Mestres
    • Maxime MakarovMarc Mestres
    • H05B31/26
    • H01J27/08
    • Filament electric discharge ion source (1) including an ionization chamber (3) provided with internal walls and configured so as to contain a gas to be ionized, filaments (13) placed in the ionization chamber (3) and a power supply (19) for applying voltage to the filaments, in which the filaments (13) are placed so as to be substantially parallel to one another and connected to the power supply (19) through the internal walls, at least one first filament being connected to the power supply through a first internal wall and at least one second filament being connected to the power supply through a second internal wall opposite the first internal wall.
    • 电晕放电用离子源(1)具备设置有内壁的离子化室(3),其构成为含有被离子化的气体,放置在电离室(3)内的细丝(13)和电源(19) 用于向长丝施加电压,其中灯丝(13)被放置成彼此基本平行并且通过内壁连接到电源(19),至少一个第一灯丝连接到电源 通过第一内壁和至少一个第二细丝通过与第一内壁相对的第二内壁连接到电源。
    • 17. 发明申请
    • Controlling the spatio-temporal uniformity of a pulsed gas laser beam
    • 控制脉冲气体激光束的时空均匀性
    • US20070133645A1
    • 2007-06-14
    • US10552500
    • 2004-03-09
    • Maxime MakarovMarc Stehle
    • Maxime MakarovMarc Stehle
    • H01S3/22H01S3/097
    • H01S3/09705H01S3/09716H01S3/104
    • The invention relates to the control of the spatio-temporal uniformity of a pulsed gas laser beam, especially generated by a high-power excimer laser. According to the invention, two raised lateral parts are provided on at least one of the discharge electrodes, said parts enabling the electrical discharge to be initialised at this level and to remain constantly stuck at this level after having spread over the entire surface of the electrode between said raised parts. In order to compensate for the lack of uniformity of the discharge created by the lack of uniformity of the electric field, the collimation mask of the preionisation X-rays is thinned from the edges thereof towards the centre thereof in order to progressively reinforce the preionisation from the outer level of the discharge to the centre of the same. The invention enables a discharge to be obtained, and thus a plasma, which are both spatially uniform and temporally stable. The laser beam obtained from said plasma is thus uniform and stable itself.
    • 本发明涉及脉冲气体激光束的时空均匀性的控制,特别是由大功率准分子激光器产生的。 根据本发明,在至少一个放电电极上设置两个升高的侧向部分,所述部件使得放电能够以该水平初始化并且在扩展到电极的整个表面之后始终保持在该高度 在所述凸起部分之间。 为了补偿由于缺乏电场均匀性而导致的放电均匀性的缺失,将前置电离X射线的准直掩模从其边缘朝向其中心变薄,以便逐渐加强来自 外层的排放到同一中心。 本发明使得能够获得放电,并且因此能够在空间均匀和时间上稳定的等离子体。 从所述等离子体获得的激光束本身是均匀和稳定的。