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    • 15. 发明授权
    • Semiconductor device fabrication method and semiconductor fabrication control method
    • 半导体器件制造方法和半导体制造控制方法
    • US06800538B2
    • 2004-10-05
    • US10695650
    • 2003-10-29
    • Masayuki FuruhashiMitsuaki Hori
    • Masayuki FuruhashiMitsuaki Hori
    • H01L21336
    • H01L21/3081H01L21/02052H01L21/3003H01L21/30604H01L21/324
    • The method for fabricating a semiconductor device including a step of forming a gate insulation film on a semiconductor substrate 10, the method further comprises, before the step of forming the gate insulation film, the step of forming an insulation film 12, covering a first side (upper side) and a second side (underside) of the semiconductor substrate 10, the step of etching off the insulation film 12 on the first side of the semiconductor substrate 10, and the step of annealing the semiconductor substrate 10 with the insulation film 12 present on the second side of the semiconductor substrate 10. The semiconductor film 12 on the second side of the semiconductor substrate 10 is removed, and the semiconductor substrate 10 is heat-treated with the insulation film 12 present on the second side of the semiconductor substrate 10, whereby even when the annealing is performed at high temperature, the sublimation of semiconductor constituent atoms from the second side of the semiconductor substrate 10 can be prevented. Accordingly, the adhesion of the semiconductor constituent atoms to the temperature sensor, etc. can be prevented, which permits semiconductor devices to be fabricated without complicated maintenance. Thus, semiconductor devices can be fabricated with high fabrication efficiency.
    • 制造半导体器件的方法包括在半导体衬底10上形成栅极绝缘膜的步骤,该方法还包括在形成栅极绝缘膜的步骤之前,形成绝缘膜12的步骤,覆盖第一侧 (上侧)和第二面(下侧),蚀刻半导体衬底10的第一侧上的绝缘膜12的步骤以及用绝缘膜12退火半导体衬底10的步骤 存在于半导体衬底10的第二侧上。去除半导体衬底10的第二侧上的半导体膜12,并且半导体衬底10用半导体衬底的第二面上存在的绝缘膜12进行热处理 如图10所示,即使当在高温下进行退火时,半导体组成原子从半导体su的第二侧升华 可以防止臀部10。 因此,可以防止半导体组成原子对温度传感器等的粘合,这允许在不需要复杂维护的情况下制造半导体器件。 因此,可以以高制造效率制造半导体器件。