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    • 11. 发明授权
    • Pulsation suppression device for a pump
    • 泵的脉动抑制装置
    • US06095194A
    • 2000-08-01
    • US265355
    • 1999-03-10
    • Yoji MinatoMasayoshi KatsuraMakoto Fujii
    • Yoji MinatoMasayoshi KatsuraMakoto Fujii
    • F04B11/00F16L55/04
    • F04B11/0016
    • The present invention relates to a pulsation suppression device which is interposingly used in a liquid transporting pipe through which a chemical liquid such as a surface washing liquid for washing an IC is transported by a reciprocal pump. The pulsation suppression device of the present invention has: a bellows which partitions the interior of the device body having a sealed container-like shape, into a liquid chamber and an gas chamber; an operating rod which is reciprocated in interlock relationship with the bellows; and an extension and contraction restricting mechanism which, when the bellows extends to a predetermined value, is contacted in parallel with a closed end face of the bellows, thereby restricting further extension of the bellows. Furthermore, the pulsation suppression device of the present invention has a guide for making the reciprocal operation of the operating rod coincident with the extension and contraction directions of the bellows. The guide is made of a low-friction resin material. According to the present invention, pulsation due to the discharge pressure of the transported liquid is absorbed and the amplitude of pulsation is suppressed to a low level. Moreover, the bellows used in the pulsation suppression device is prevented from being damaged, and the pulsation suppression function can be stabilized.
    • 脉动抑制装置技术领域本发明涉及一种脉冲抑制装置,其被插入到液体输送管中,通过该液体输送管中的诸如用于清洗IC的表面清洗液的化学液体通过往复泵输送。 本发明的脉动抑制装置具有:将具有密封容器状的装置主体的内部分隔成液体室和气室的波纹管; 与波纹管互锁的操作杆; 以及延伸收缩限制机构,当波纹管延伸到预定值时,其与波纹管的封闭端面平行地接触,从而限制波纹管的进一步延伸。 此外,本发明的脉动抑制装置具有使操作杆的往复运转与波纹管的伸缩方向一致的引导件。 导轨由低摩擦树脂材料制成。 根据本发明,由于输送液体的排出压力而产生的脉动被吸收,脉动幅度被抑制到低水平。 此外,防止在脉动抑制装置中使用的波纹管被损坏,并且可以使脉动抑制功能稳定。
    • 12. 发明申请
    • Structure for connection between integrated panel and fluid device
    • 集成面板和流体设备之间的连接结构
    • US20100013213A1
    • 2010-01-21
    • US11919651
    • 2006-04-28
    • Masayoshi Katsura
    • Masayoshi Katsura
    • F16L39/00
    • F16L39/005F16J15/062
    • A connecting structure for an integration panel and a fluid device which, in order to promote integration of fluid pipes, can be further compactified is provided. In a concentric double flow path type connecting structure, an integration panel 1 and a valve 2 are connected to each other in a sealed state via inner and outer annular gaskets G1, G2 while pipe-like fluid passages 3a, 7 and annular fluid passages 4a, 8 are concentrically arranged. Annular projections 11, 21, 31, 41 are formed on fluid supply/discharge port portions 1A, 2A made of a fluororesin, and annular grooves 51, 61 are formed in the gaskets G1, G2 made of a fluororesin. A joined state where the annular projections and the annular grooves are fitted to each other to form a fitting sealing portion 10 is held by holding means I for attracting together the fluid supply/discharge port portions 1A, 2A and maintaining the attraction. The inner first gasket G1 is configured as a multifunctional intermediate gasket in which the inner peripheral face 54a functions also as the outer walls of the pipe-like fluid passages 3a, 7, and the outer peripheral face 55a functions also as the inner walls of the annular fluid passages 4a, 8.
    • 提供了一种用于集成面板和流体装置的连接结构,其为了促进流体管的一体化而进一步压实。 在同心双流路型连接结构中,集成面板1和阀2通过内外环形垫圈G1,G2以密封状态彼此连接,而管状流体通道3a,7和环形流体通道4a ,8同心地布置。 环形突起11,21,31,41形成在由氟树脂制成的流体供给/排出口部分1A,2A上,并且在由氟树脂制成的垫圈G1,G2中形成环形槽51,61。 环形突起和环形槽彼此嵌合以形成配件密封部分10的接合状态由用于吸引流体供给/排出端口部分1A,2A并保持吸引力的保持装置I保持。 内部第一衬垫G1被构造为多功能中间衬垫,其中内周面54a也用作管状流体通道3a,7的外壁,并且外周面55a也用作管状流体通道的内壁 环形流体通道4a,8。
    • 13. 发明申请
    • Connection Structure of Stack Panel to Fluid Device
    • 堆叠面板与流体装置的连接结构
    • US20090072536A1
    • 2009-03-19
    • US11988556
    • 2006-06-15
    • Masayoshi Katsura
    • Masayoshi Katsura
    • F16L19/00
    • F16L39/00F16L19/0231F16L23/04F16L23/18
    • A connecting structure for an integration panel and a fluid device in which an excellent sealing property can be held even when substantially no further fastening is performed, and the assembling workability is improved is provided. When an integration panel 1 and a valve 2 are to be communicatingly connected to each other in a sealed state through single circular pipe-like fluid passages 3, 7 by using an annular gasket G, annular projections 11, 21 are formed in first and second fluid supply/discharge port portions 1A, 2A, the gasket G is configured by a fluororesin having a pair of annular grooves 51, 51 which are formed in an outer-diameter portion of a fluid path W to be fitted to the annular projections 11, 21, respectively, and holding means I for holding a joined state is equipped. In the joined state, the integration panel 1 and the valve 2 are attracted to each other, and the annular projections 11, 21 of the first and second fluid supply/discharge port portions 1A, 2A are fitted respectively to the annular grooves 51 of the gasket G to form a fitting sealing portion.
    • 一种用于集成面板和流体装置的连接结构,其中即使在基本上不进一步紧固的情况下也能够保持优异的密封性,并且提供了组装加工性能。 当通过使用环形垫圈G通过单个圆形管状流体通道3,7将密封状态下的集成面板1和阀门2彼此连通地连接时,环形突起11,21在第一和第二 流体供给/排出口部分1A,2A,垫圈G由具有一对环形槽51,51的氟树脂构成,环形槽51,51形成在流体通道W的外径部分中以与环形突起11相配合, 21,并且配备有用于保持接合状态的保持装置I。 在接合状态下,集成面板1和阀2彼此吸引,第一和第二流体供给/排出口部分1A,2A的环形突起11,21分别装配到 垫圈G以形成配件密封部分。
    • 14. 发明申请
    • Fluid gasket
    • 流体垫圈
    • US20070145691A1
    • 2007-06-28
    • US11603983
    • 2006-11-22
    • Masayoshi Katsura
    • Masayoshi Katsura
    • F16L17/06
    • F16L39/005F16L23/18
    • In order to seal-connect a first fluid supply/discharge port portion 1A of a first fluid device 1 having a pipe-like fluid passage 3 and an annular fluid passage 4 with a second fluid supply/discharge port portion 2A of a second fluid device 2 having a pipe-like fluid passage 7 and an annular fluid passage 8, while the passages 3, 4, 7, 8 are mutually correspond to one another, a fluid gasket has first and second ring-like gasket portions G1, G2. In the gasket portions G1, G2, first sealing portions g12, g22 which abut against the first fluid supply/discharge port portion 1A, second sealing portions g11, g21 which abut against the second fluid supply/discharge port portion 2A, and fluid paths w1, w2 through which the passages 3, 4 and the passages 7, 8 communicate with each other. A bridge portion B is placed so as to traverse the fluid path w2, thereby connecting and integrating the first and second ring-like gasket portions G1, G2 with each other.
    • 为了将具有管状流体通道3的第一流体装置1和环形流体通道4的第一流体供给/排出口部分1A密封连接到第二流体供给/排出端口部分2A 流体装置2具有管状流体通道7和环形流体通道8,而通道3,4,7,8彼此相对应,流体垫圈具有第一和第二环形垫圈部分G 1, 在垫圈部分G 1,G 2中,抵靠第一流体供给/排出口部分1A的第一密封部分g 12,g 22,抵靠第二流体供应源的第二密封部分g 11, /排出口部分2A以及通道3,4和通道7,8彼此连通的流体通道w 1,w 2。 桥接部分B被放置成横过流体路径w 2,从而将第一和第二环状垫圈部分G 1,G 2彼此连接并整合。
    • 15. 发明授权
    • Fluid apparatus having downwardly inclined lower lamella portion of a bellows
    • 流体装置具有向下倾斜的波纹管的下薄片部分
    • US06945761B1
    • 2005-09-20
    • US09868938
    • 2000-11-20
    • Kiyoshi NishioMakoto FujiiMasayoshi KatsuraHitoshi Kawamura
    • Kiyoshi NishioMakoto FujiiMasayoshi KatsuraHitoshi Kawamura
    • F04B43/00F04B43/08F15B1/08F16J3/04F01B3/00
    • F15B1/103F04B43/0063F04B43/084F04B43/088F15B2201/205F15B2201/3153
    • A bellows that is extendingly and contractingly deformable in the axial direction is placed in a pump body and forms a liquid chamber inside the bellows. A suction portion and a discharge portion are formed in an inner bottom face of the pump body facing the liquid chamber. Liquid is sucked from the suction port into the liquid chamber by extension of the bellows, and the liquid in the liquid chamber is discharged from the discharge portion by contraction of the bellows. The extending and contracting portion of the bellows which is configured by forming ridge-like folds and valley-like folds in a vertically alternate and continuous manner is formed into a shape in which the lower one of upper and lower lamella portions of each of the ridge-like folds, or the lower lamella portion is inclined downwardly toward the axis defining the axial direction, not only in an extending state but also in a contracting state. Even in the case where liquid containing a sedimenting material such as slurry is used, therefore, the sedimenting material can be prevented from sedimenting and stagnating in the extending and contracting portion of the bellows.
    • 在轴向方向上可伸缩地变形的波纹管被放置在泵体内并在波纹管内部形成液体室。 抽吸部分和排出部分形成在泵体的面向液体室的内底面中。 通过波纹管的延伸将液体从吸入口吸入液体室,液体室中的液体通过波纹管的收缩从排出部排出。 通过以垂直交替连续的方式形成脊状折叠和谷状折叠而构成的波纹管的伸缩部分形成为每个脊的上部和下部薄片部分的下部的一个形状 或者下薄片部分朝向限定轴向方向的轴向下倾斜,不仅处于延伸状态而且处于收缩状态。 因此,即使在使用含有浆料等沉降物的液体的情况下,也能够防止沉积物在波纹管的伸缩部分的沉降和滞留。