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    • 12. 发明授权
    • X-ray generating apparatus and inspection apparatus using the same therein
    • X射线发生装置和使用该装置的检查装置
    • US08644451B2
    • 2014-02-04
    • US13131611
    • 2010-03-26
    • Shozo AokiMasahiro Nonoguchi
    • Shozo AokiMasahiro Nonoguchi
    • H01J35/18G01N23/04
    • H01J35/08H01J2235/081H01J2235/086
    • An X-ray generating apparatus is disclosed which includes a tube body having a vacuum interior, an electron source provided within the tube body to generate an electron beam, a target, within the tube body that is irradiated with the electron beam to generate an X-ray, and an X-ray window for taking out the X-ray generated outside of the tube body. A plurality of grooves are formed on a surface of a member building up the target. The grooves each have a fine width and are inclined by a predetermined angle (α), from a direction perpendicular to an elongating direction of the grooves, so that they bridge over the plural numbers of grooves. The X-ray generating apparatus is configured such that a multi-line X-ray generating from the plural numbers of multi-line targets, which are formed between the grooves, emits at a predetermined extraction angle (β), passing through the X-ray window. An inspection apparatus which includes the X-ray generating apparatus is also disclosed.
    • 公开了一种X射线产生装置,其包括具有真空内部的管体,设置在管体内以产生电子束的电子源,在管体内照射电子束以产生X的电子束 射线和用于取出管体外部产生的X射线的X射线窗口。 在构成目标的构件的表面上形成有多个槽。 这些槽各自具有微细的宽度,并且从垂直于槽的延伸方向的方向倾斜预定角度(α),使得它们跨越多个槽。 X射线产生装置被配置为使得从形成在凹槽之间的多个多线目标产生的多线X射线以预定的提取角(β)发射,穿过X射线 射线窗口。 还公开了一种包括X射线产生装置的检查装置。
    • 13. 发明申请
    • X-RAY GENERATING APPARATUS AND INSPECTION APPARATUS USING THE SAME THEREIN
    • X射线发生装置及其检测装置
    • US20110235781A1
    • 2011-09-29
    • US13131611
    • 2010-03-26
    • Shozo AokiMasahiro Nonoguchi
    • Shozo AokiMasahiro Nonoguchi
    • H01J35/18G01N23/04
    • H01J35/08H01J2235/081H01J2235/086
    • An X-ray generating apparatus is disclosed which includes a tube body having a vacuum interior, an electron source provided within the tube body to generate an electron beam, a target, within the tube body that is irradiated with the electron beam to generate an X-ray, and an X-ray window for taking out the X-ray generated outside of the tube body. A plurality of grooves are formed on a surface of a member building up the target. The grooves each have a fine width and are inclined by a predetermined angle (α), from a direction perpendicular to an elongating direction of the grooves, so that they bridge over the plural numbers of grooves. The X-ray generating apparatus is configured such that a multi-line X-ray generating from the plural numbers of multi-line targets, which are formed between the grooves, emits at a predetermined extraction angle (β), passing through the X-ray window. An inspection apparatus which includes the X-ray generating apparatus is also disclosed.
    • 公开了一种X射线产生装置,其包括具有真空内部的管体,设置在管体内以产生电子束的电子源,在管体内被照射电子束以产生X的X射线产生装置 射线和用于取出管体外部产生的X射线的X射线窗口。 在构成目标的构件的表面上形成有多个槽。 这些槽各自具有微细的宽度,并且从垂直于槽的延伸方向的方向倾斜预定角度(α),使得它们跨越多个槽。 X射线产生装置被配置为使得从形成在凹槽之间的多个多线目标产生的多线X射线以预定的提取角度(&bgr)发射,穿过X -ray窗口。 还公开了一种包括X射线产生装置的检查装置。