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11. 发明授权

US06514775B2 In-situ end point detection for semiconductor wafer polishing 有权
标题翻译：用于半导体晶片抛光的原位终点检测
公开(公告)号：US06514775B2
公开(公告)日：2003-02-04
申请号：US10008935
申请日：2001-11-09
申请人： Haiguang Chen , Shing Lee
发明人： Haiguang Chen , Shing Lee
IPC分类号： H01L2100
CPC分类号： B24B37/013 , B24B49/12
摘要： The present invention relates to in-situ techniques for determining process end points in semiconductor wafer polishing processes. Generally, the technique involves utilizing a scanning inspection machine having multiple pair of lasers and sensors located at different angles for detecting signals caused to emanate from an inspected specimen. The detection techniques determine the end points by differentiating between various material properties within a wafer. An accompanying algorithm is used to obtain an end point detection curve that represents a composite representation of the signals obtained from each of the detectors of the inspection machine. This end point detection curve is then used to determine the process end point. Note that computation of the algorithm is performed during the polishing process so that the process end point can be determined without interruptions that diminish process throughputs.
摘要翻译：本发明涉及用于确定半导体晶片抛光工艺中的工艺终点的现场技术。通常，该技术涉及利用具有多对激光器和位于不同角度的传感器的扫描检查机，以检测从检查样品发出的信号。检测技术通过区分晶片内的各种材料特性来确定端点。使用伴随的算法来获得终点检测曲线，其表示从检查机的每个检测器获得的信号的复合表示。然后使用该终点检测曲线来确定过程终点。请注意，在抛光过程中执行算法的计算，以便可以确定过程终点而不会导致过程吞吐量降低的中断。

12. 发明授权

US08570844B1 Absorption enhanced media for energy assisted magnetic recording 有权
标题翻译：用于能量辅助磁记录的吸收增强介质
公开(公告)号：US08570844B1
公开(公告)日：2013-10-29
申请号：US13019095
申请日：2011-02-01
申请人： HongXing Yuan , Shing Lee , Zhong Shi , Jinshan Li
发明人： HongXing Yuan , Shing Lee , Zhong Shi , Jinshan Li
IPC分类号： G11B11/00
CPC分类号： G11B5/64 , G11B5/72 , G11B5/7325 , G11B2005/0021
摘要： A magnetic recording media is disclosed. The media comprises a substrate, a recording layer disposed over the substrate, and a metallic layer disposed between the recording layer and the substrate. The recording layer is configured to receive an electromagnetic radiation, absorb a first portion of the electromagnetic radiation, and transmit a second portion of the electromagnetic radiation. The metallic layer comprises a non-magnetic metal and configured to reflect at least some of the second portion of the electromagnetic radiation towards the recording layer.
摘要翻译：公开了一种磁记录介质。介质包括衬底，设置在衬底上的记录层和设置在记录层和衬底之间的金属层。记录层被配置为接收电磁辐射，吸收电磁辐射的第一部分，并传输电磁辐射的第二部分。金属层包括非磁性金属并且被配置为将电磁辐射的第二部分中的至少一些朝向记录层反射。

13. 发明授权

US08325569B1 EAMR head having improved optical coupling efficiency 有权
标题翻译： EAMR头具有改善的光耦合效率
公开(公告)号：US08325569B1
公开(公告)日：2012-12-04
申请号：US13169720
申请日：2011-06-27
申请人： Zhong Shi , Zhongyan Wang , Shing Lee , Hongxing Yuan
发明人： Zhong Shi , Zhongyan Wang , Shing Lee , Hongxing Yuan
IPC分类号： G11B11/00
CPC分类号： G11B5/6088 , G11B5/314 , G11B2005/0021
摘要： A method and system provide an EAMR transducer having an air-bearing surface (ABS) that resides near a media during use. The EAMR transducer includes a write pole, coil(s), a near field transducer (NFT), a waveguide, and a reflective grating. The write pole writes to a region of the media. The coil(s) energize the write pole. The NFT is proximate to the ABS and focuses the energy onto the media. The waveguide is configured to direct the energy from the laser toward the NFT at an incident angle with respect to the ABS. A first portion of the energy reflects off of the ABS at a reflected angle. The reflective grating receives the first portion of the energy at the reflected angle from the ABS and reflects a second portion of the energy toward the ABS. The NFT resides between at least part of the waveguide and the reflective grating.
摘要翻译：一种方法和系统提供具有在使用期间驻留在介质附近的空气轴承表面（ABS）的EAMR换能器。 EAMR传感器包括写极，线圈，近场换能器（NFT），波导和反射光栅。写入磁极写入媒体的一个区域。线圈使写入极点通电。 NFT靠近ABS，将能量聚焦在媒体上。波导被配置为以相对于ABS的入射角将来自激光器的能量引向NFT。能量的第一部分以反射角反射离开ABS。反射光栅从ABS接收以反射角度的能量的第一部分，并将能量的第二部分反射向ABS。 NFT位于波导和反射光栅的至少一部分之间。

14. 发明申请

US20090279088A1 SYSTEMS AND METHODS FOR MEASUREMENT OF A SPECIMEN WITH VACUUM ULTRAVIOLET LIGHT 有权
标题翻译：用真空紫外线灯测量样品的系统和方法
公开(公告)号：US20090279088A1
公开(公告)日：2009-11-12
申请号：US12506019
申请日：2009-07-20
申请人： John Fielden , Gary Janik , Shing Lee
发明人： John Fielden , Gary Janik , Shing Lee
IPC分类号： G01J4/00
CPC分类号： G03F7/70933 , G03F7/70916
摘要： Various systems for measurement of a specimen are provided. One system includes a first optical subsystem, which is disposed within a purged environment. The purged environment may be provided by a differential purging subsystem. The first optical subsystem performs measurements using vacuum ultraviolet light. This system also includes a second optical subsystem, which is disposed within a non-purged environment. The second optical subsystem performs measurements using non-vacuum ultraviolet light. Another system includes two or more optical subsystems configured to perform measurements of a specimen using vacuum ultraviolet light. The system also includes a purging subsystem configured to maintain a purged environment around the two or more optical subsystems. The purging subsystem is also configured to maintain the same level of purging in both optical subsystems. Some systems also include a cleaning subsystem configured to remove contaminants from a portion of a specimen prior to measurements at vacuum ultraviolet wavelengths.
摘要翻译：提供了用于测量样本的各种系统。一个系统包括设置在净化环境中的第一光学子系统。净化的环境可以由差动清洗子系统提供。第一个光学子系统使用真空紫外线进行测量。该系统还包括第二光学子系统，其被布置在非净化环境中。第二光学子系统使用非真空紫外光进行测量。另一系统包括两个或更多个配置成使用真空紫外光进行样本测量的光学子系统。该系统还包括净化子系统，该净化子系统配置为保持围绕两个或更多个光学子系统的净化环境。清洗子系统还被配置为在两个光学子系统中保持相同的清洗水平。一些系统还包括清洁子系统，被配置为在真空紫外线波长测量之前从试样的一部分去除污染物。

15. 发明授权

US07408641B1 Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system 失效
标题翻译：测量系统被配置为执行被配置成为测量系统提供照明的样本和照明子系统的测量
公开(公告)号：US07408641B1
公开(公告)日：2008-08-05
申请号：US11058153
申请日：2005-02-14
申请人： Hidong Kwak , Shankar Krishnan , Shing Lee , Haixing Zou
发明人： Hidong Kwak , Shankar Krishnan , Shing Lee , Haixing Zou
IPC分类号： G01J4/00
CPC分类号： G01J3/10 , G01B11/0641 , G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0224 , G01J3/0237 , G01J3/14 , G01J3/1809 , G01N21/211 , G01N21/9501 , G01N21/956 , G01N2021/212 , G01N2021/213 , G01N2021/95676
摘要： An illumination subsystem configured to provide illumination for a measurement system includes first and second light sources configured to generate light for measurements in different wavelength regimes. The illumination subsystem also includes a TIR prism configured to be moved into and out of an optical path from the first and second light sources to the measurement system. If the TIR prism is positioned out of the optical path, light from only the first light source is directed along the optical path. If the TIR prism is positioned in the optical path, light from only the second light source is directed along the optical path. Various measurement systems are also provided. One measurement system includes an optical subsystem configured to perform measurements of a specimen using light in different wavelength regimes directed along a common optical path. The different wavelength regimes include vacuum ultraviolet, ultraviolet, visible, and near infrared wavelength regimes.
摘要翻译：被配置为为测量系统提供照明的照明子系统包括被配置为产生用于不同波长方案中的测量的光的第一和第二光源。照明子系统还包括被配置为移入和移出从第一和第二光源到测量系统的光路的TIR棱镜。如果TIR棱镜位于光路外，则仅沿着光路引导来自第一光源的光。如果TIR棱镜位于光路中，则仅沿着光路引导来自第二光源的光。还提供了各种测量系统。一个测量系统包括光学子系统，该光学子系统被配置为使用沿着公共光路引导的不同波长方式的光来对样本进行测量。不同的波长方案包括真空紫外线，紫外线，可见光和近红外波长方案。

16. 发明申请

US20050155931A1 System and method for composting-free disposal of organic wastes 有权
标题翻译：无机废弃物处理有机废物的系统和方法
公开(公告)号：US20050155931A1
公开(公告)日：2005-07-21
申请号：US10759947
申请日：2004-01-15
申请人： Shing Lee
发明人： Shing Lee
IPC分类号： B09B3/00 , C02F3/00 , C02F9/14 , C05F11/08
CPC分类号： B09B3/00
摘要： A system for composting-free disposal of organic waste and method thereof included a heating apparatus, a pretreatment apparatus, and a decomposition apparatus. The heating apparatus heats the pretreatment apparatus and the decomposition apparatus. The organic waste is separated into a slurry and a surface oil-water mixed liquid by the pretreatment apparatus. Microbial enzymes and raw material are added into the slurry to become a mixture. The mixture is then decomposed and sterilized by the decomposition apparatus to become a composting-free organic fertilizer product. All these procedures can be carried out within 3 to 24 hours. The system and the method thereof provides an efficiently fast, space-saving way to deal with organic waste and achieve environmental protection and sanitation.
摘要翻译：无机垃圾处理系统及其方法包括加热装置，预处理装置和分解装置。加热装置加热预处理装置和分解装置。有机废物通过预处理装置分离成浆料和表面油水混合液体。将微生物酶和原料加入到浆料中成为混合物。然后将该混合物通过分解装置分解灭菌，成为无堆肥的有机肥料产品。所有这些程序可以在3到24小时内进行。该系统及其方法提供了有效快速，节省空间的方式来处理有机废物，实现环境保护和卫生。

17. 发明授权

US06108087A Non-contact system for measuring film thickness 失效
标题翻译：用于测量膜厚度的非接触式系统
公开(公告)号：US06108087A
公开(公告)日：2000-08-22
申请号：US28417
申请日：1998-02-24
申请人： Mehrdad Nikoonahad , Shing Lee , Haiming Wang
发明人： Mehrdad Nikoonahad , Shing Lee , Haiming Wang
IPC分类号： G01B21/08 , G01B17/02 , G01N29/00 , G01N29/24 , G01N29/34 , G01B9/02
CPC分类号： G01B17/025 , G01N29/2418 , G01N29/348 , G01N2291/014 , G01N2291/02854 , G01N2291/0427
摘要： Thickness of a film in a sample may be detected by directing pump laser pulses to the surface of a sample to generate an acoustic pulse in a sample. The acoustic pulse propagates downwards until it reaches an interface between the bottom of the film and a substrate and is reflected back to the top surface of the film as a first echo. A reflection of the first echo propagates downwards and is again reflected back towards the surface as a second echo. Interferometry is used to measure the lapse of time between the first and second echos from which the thickness of the film may be determined.
摘要翻译：可以通过将泵浦激光脉冲引导到样品的表面以在样品中产生声脉冲来检测样品中的膜的厚度。声脉冲向下传播直到其到达膜的底部和基底之间的界面并且作为第一回波被反射回到膜的顶表面。第一个回波的反射向下传播并再次反射回到表面作为第二回波。使用干涉测量来测量第一和第二回波之间的时间流逝，从该厚度可以确定膜的厚度。

18. 发明授权

US08320722B1 Non-linear optical grating 有权
标题翻译：非线性光栅
公开(公告)号：US08320722B1
公开(公告)日：2012-11-27
申请号：US12759491
申请日：2010-04-13
申请人： Hongxing Yuan , Shing Lee , Zhongyan Wang , Jinshan Li
发明人： Hongxing Yuan , Shing Lee , Zhongyan Wang , Jinshan Li
IPC分类号： G02B6/34 , G02F1/295
CPC分类号： G02B5/1861 , G02B6/124
摘要： A method and system for providing an optical grating are described. The optical grating is configured for light of a wavelength. The optical grating includes a top cladding, a core, and bottom cladding. The core resides between the bottom cladding and the top cladding. The core includes a plurality of discrete ridges spaced apart by a nonlinear pitch. The light traverses the top cladding before the core and has a plurality of angles of incidence with the core. The nonlinear pitch of the core is larger for a larger angle of incidence of the plurality of angles of incidence.
摘要翻译：描述了一种用于提供光栅的方法和系统。光栅被配置用于波长的光。光栅包括顶部包层，芯部和底部包层。核心位于底部包层和顶部包层之间。芯部包括由非线性间距间隔开的多个离散脊。光穿过芯之前的顶部包层并且具有多个与芯的入射角。对于多个入射角的较大入射角，芯的非线性间距较大。

19. 发明授权

US08320220B1 Method and system for providing an energy assisted magnetic recording disk drive having a non-conformal heat spreader 有权
标题翻译：用于提供具有非保形散热器的能量辅助磁记录盘驱动器的方法和系统
公开(公告)号：US08320220B1
公开(公告)日：2012-11-27
申请号：US13273203
申请日：2011-10-13
申请人： Hongxing Yuan , Wentao Yan , Shing Lee , Zhong Shi , Jerome Marcelino , Yunfei Li , Zhongyan Wang
发明人： Hongxing Yuan , Wentao Yan , Shing Lee , Zhong Shi , Jerome Marcelino , Yunfei Li , Zhongyan Wang
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： An energy assisted magnetic recording (EAMR) transducer coupled with a laser is described. The EAMR transducer has an air-bearing surface (ABS) residing near a media during use. The laser provides energy. The transducer includes a waveguide, a near field transducer (NFT) proximate to the ABS, a write pole, a heat spreader, and at least one coil. The waveguide directs the energy from the laser toward the ABS. The NFT is optically coupled with the waveguide, focuses the energy onto the media, and includes a disk having an NFT width. The write pole writes to the media. The heat spreader is thermally coupled with the NFT. A first portion of the heat spreader is between the NFT and the pole, is between the ABS and a second portion of the heat spreader, and has a first width. The second portion has a second width greater than the first width.
摘要翻译：描述了与激光器耦合的能量辅助磁记录（EAMR）传感器。在使用过程中，EAMR传感器具有驻留在介质附近的空气轴承表面（ABS）。激光器提供能量。换能器包括靠近ABS的波导，近场换能器（NFT），写柱，散热器和至少一个线圈。波导将能量从激光器引向ABS。 NFT与波导光学耦合，将能量聚焦到介质上，并且包括具有NFT宽度的盘。写入磁极写入媒体。散热器与NFT热耦合。散热器的第一部分在NFT和极之间，位于ABS和散热器的第二部分之间，并且具有第一宽度。第二部分具有大于第一宽度的第二宽度。

20. 发明授权

US07869040B1 Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system 有权
标题翻译：测量系统被配置为执行被配置成为测量系统提供照明的样本和照明子系统的测量
公开(公告)号：US07869040B1
公开(公告)日：2011-01-11
申请号：US12184419
申请日：2008-08-01
申请人： Hidong Kwak , Shankar Krishnan , Shing Lee , Haixing Zou
发明人： Hidong Kwak , Shankar Krishnan , Shing Lee , Haixing Zou
IPC分类号： G01J4/00
CPC分类号： G01J3/10 , G01B11/0641 , G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0224 , G01J3/0237 , G01J3/14 , G01J3/1809 , G01N21/211 , G01N21/9501 , G01N21/956 , G01N2021/212 , G01N2021/213 , G01N2021/95676
摘要： An illumination subsystem configured to provide illumination for a measurement system includes first and second light sources configured to generate light for measurements in different wavelength regimes. The illumination subsystem also includes a TIR prism configured to be moved into and out of an optical path from the first and second light sources to the measurement system. If the TIR prism is positioned out of the optical path, light from only the first light source is directed along the optical path. If the TIR prism is positioned in the optical path, light from only the second light source is directed along the optical path. Various measurement systems are also provided. One measurement system includes an optical subsystem configured to perform measurements of a specimen using light in different wavelength regimes directed along a common optical path. The different wavelength regimes include vacuum ultraviolet, ultraviolet, visible, and near infrared wavelength regimes.
摘要翻译：被配置为为测量系统提供照明的照明子系统包括被配置为产生用于不同波长方案中的测量的光的第一和第二光源。照明子系统还包括被配置为移入和移出从第一和第二光源到测量系统的光路的TIR棱镜。如果TIR棱镜位于光路外，则仅沿着光路引导来自第一光源的光。如果TIR棱镜位于光路中，则仅沿着光路引导来自第二光源的光。还提供了各种测量系统。一个测量系统包括光学子系统，该光学子系统被配置为使用沿着公共光路引导的不同波长方式的光来对样本进行测量。不同的波长方案包括真空紫外线，紫外线，可见光和近红外波长方案。

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