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11. 发明授权

US5202898A Laser oscillator, laser resonator, and apparatus for manufacturing of semiconductor 失效
标题翻译：激光振荡器，激光共振器和制造半导体器件
公开(公告)号：US5202898A
公开(公告)日：1993-04-13
申请号：US733646
申请日：1991-07-22
申请人： Hiroyuki Sugawara , Toshiharu Shirakura , Takeshi Yamamura , Hideki Yamai
发明人： Hiroyuki Sugawara , Toshiharu Shirakura , Takeshi Yamamura , Hideki Yamai
IPC分类号： H01S3/08 , H01S3/098
CPC分类号： H01S3/0805 , H01S3/08
摘要： The present invention relates to a laser oscillator, especially to a laser oscillator suitable for ultrafine manufacturing such as an apparatus for manufacturing of a semiconductor wherein the laser oscillator is provided with constant directivity chronically, although the directivity is not so fine, for avoiding a blurred image spatially and chronically in order to obtain a stable mask in the ultrafine manufacturing. The laser oscillator includes apparatus for enabling at least one of selection of the directivity of parallel light from a resonator between a whole reflector and a laser medium; an optical system for stopping oscillation of the laser medium before a laser beam, which is generated at the resonator, becomes a single mode and for eliminating the laser beam having poor directivity; prevention of the laser medium from re-entry of unnecessary natural emitting light which is generated in the laser medium; and providing a value of a diameter of an aperture of the optical system for maintaining directivity so as to make an order number of the transverse mode high.
摘要翻译：激光振荡器技术领域本发明涉及一种激光振荡器，特别涉及一种适用于超细制造的激光振荡器，例如半导体制造装置，其中激光振荡器长期地具有恒定的方向性，尽管方向性不是很好，以避免模糊图像空间和长期，以便在超细制造中获得稳定的掩模。激光振荡器包括用于使得能够在整个反射器和激光介质之间选择来自谐振器的平行光的方向性中的至少一个的装置; 在谐振器产生的激光束之前停止激光介质的振荡的光学系统成为单一模式，并且用于消除方向性差的激光束; 防止激光介质重新进入在激光介质中产生的不必要的天然发光; 并且提供光学系统的孔径的值以维持方向性，以使横向模式的订单数量高。

12. 发明授权

US4740980A Gas laser device 失效
标题翻译：气体激光装置
公开(公告)号：US4740980A
公开(公告)日：1988-04-26
申请号：US919423
申请日：1986-10-16
申请人： Toshiharu Shirakura , Hiroyuki Sugawara , Shigeo Shiono , Minoru Suzuki , Humio Shibata
发明人： Toshiharu Shirakura , Hiroyuki Sugawara , Shigeo Shiono , Minoru Suzuki , Humio Shibata
IPC分类号： H01S3/03 , H01S3/036 , H01S3/038 , H01S3/095 , H01S3/097
CPC分类号： H01S3/038 , H01S3/036 , Y10S372/701
摘要： In a gas laser device according to this invention, a gas inlet having an electrode protrudes within each of expanded portions protruding on the side, where the gas inlet is disposed, of the principal portion of the discharge tube. Gas medium ejected from the gas inlet in the principal portion of a discharge tube collides with the inner surface of the principal portion of a discharge tube, while forming a flame extending along the ejected gas medium from the electrode and is divided into two partial flows. One of them flows along the wall of the expanded portion; collides with the gas inlet; and is divided further into two partial flows. Therefore it does not collide with the gas medium within the gas inlet. Consequently the gas medium and the flame fluctuate hardly and are stabilized. In this way it is possible to stabilize the laser output.
摘要翻译：在根据本发明的气体激光装置中，具有电极的气体入口在放电管的主要部分的设置有气体入口侧的突出部分的每一个内突出。从排出管的主要部分的气体入口排出的气体介质与排出管的主要部分的内表面相撞，同时形成从喷射的气体介质沿电极延伸的火焰，并分成两部分流。其中一个沿着扩展部分的壁流动; 与气体入口碰撞; 并进一步分为两部分流。因此，它不会与气体入口内的气体介质碰撞。因此，气体介质和火焰几乎不波动并且稳定。以这种方式，可以稳定激光输出。

13. 发明授权

US4991180A Metallic vapor laser apparatus 失效
标题翻译：金属蒸气激光装置
公开(公告)号：US4991180A
公开(公告)日：1991-02-05
申请号：US525344
申请日：1990-05-18
申请人： Motoo Yamaguchi , Hiroyuki Sugawara , Akira Wada , Toshiharu Shirakura , Tuneyoshi Oohashi , Toshimichi Kichikawa
发明人： Motoo Yamaguchi , Hiroyuki Sugawara , Akira Wada , Toshiharu Shirakura , Tuneyoshi Oohashi , Toshimichi Kichikawa
IPC分类号： H01S3/03 , H01S3/036
CPC分类号： H01S3/031 , H01S3/036 , H01S3/227
摘要： A metallic vapor laser apparatus includes a cylindrical discharge tube (31) having an internal space (2), a heat-insulating material (6) encompassing the periphery of the discharge tube (31), and two electrodes (3a) and (3b) having a cylindrical portion coaxial with the discharge tube (31) and disposed at both ends of the discharge tube (31). The internal space (2) are filled with a gas containing the vapor of copper as a laser medium for effecting laser oscillation by the excitation of the filler gas and the discharge. A gas inlet (40) from introducing a buffer gas (G) into the inside is formed at one of the outside position of the two electrodes (3a) and (3b) in the axial direction and gas exhaust ports (33a) for exhausting the buffer gas (G) to the outside are formed in the proximity of both ends of the heat-insulating material (6) so that flow paths in which the buffer gas flows from the side of the internal space (2) to the side of the heat-insulating material are formed between the discharge tube (31) and the electrodes (3a) and (3b).

14. 发明授权

US5117434A Metal vapor laser apparatus 失效
标题翻译：金属蒸气激光装置
公开(公告)号：US5117434A
公开(公告)日：1992-05-26
申请号：US641585
申请日：1991-01-15
申请人： Tuneyoshi Oohashi , Motoo Yamaguchi , Akira Wada , Toshiharu Shirakura , Toshimichi Kichikawa , Hiroyuki Sugawara
发明人： Tuneyoshi Oohashi , Motoo Yamaguchi , Akira Wada , Toshiharu Shirakura , Toshimichi Kichikawa , Hiroyuki Sugawara
IPC分类号： H01S3/038 , H01S3/03 , H01S3/041
CPC分类号： H01S3/041 , H01S3/031
摘要： A metal vapor laser has a discharge tube with electrodes at opposite ends. A power source is electronically connected to the electrodes and generates a discharge in a discharge region within the discharge tube. The discharge generates laser light which emerges from the tube via windows. In order to cool the apparatus, the discharge tube is surrounded by a cooling jacket in the form of a hollow cooling vessel. A liquid flows in the cooling vessel and removes heat. The space between the cooling vessel and the discharge tube is evacuated. The cooling vessel is conductive and, since it is connected between one of the electrodes and the power supply, its inner and outer walls provide two potential paths for return current. The fact that the inner and outer walls have different diameters means that the inductance of the return paths is large. Therefore, the outer wall has a gap in it filled with insulating material. This forms a break in the conductive path from the electrode to the power source through the outer wall, and so reduces the inductance of the return path. Other geometries are also possible in which all but the innermost path are broken by insulating material.

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