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    • 11. 发明授权
    • Semiconductor cleaning composition comprising an ethoxylated surfactant
    • 包含乙氧基化表面活性剂的半导体清洁组合物
    • US07235516B2
    • 2007-06-26
    • US10294658
    • 2002-11-15
    • Hitoshi MorinagaHideaki MochizukiAtsushi Itou
    • Hitoshi MorinagaHideaki MochizukiAtsushi Itou
    • C11D3/395C11D7/06C11D1/72
    • C11D3/044C11D1/72C11D3/3947C11D11/0047C11D11/007C23G1/18H01L21/02052
    • A substrate surface cleaning liquid medium and a cleaning method using the cleaning liquid medium are capable of removing finely particulate contaminants more efficiently than conventional techniques from substrates for devices in the production of semiconductor devices, display devices, etc., which cleaning liquid medium contains the following ingredients (A), (B), (C), and (D), has a pH of 9 or higher, and a content of ingredient (C) of 0.01 to 4% by weight: (A) an ethylene oxide addition type surfactant which has an optionally substituted hydrocarbon group and a polyoxyethylene group in the same molecular structure and in which the ratio of the number of carbon atoms contained in the hydrocarbon group (m) to the number of oxyethylene groups in the polyoxyethylene group (n), m/n, is m/n≦1.5, (B) an alkali ingredient, (C) hydrogen peroxide, and (D) water.
    • 基板表面清洁液体介质和使用清洁液体介质的清洁方法能够比常规技术更有效地除去细颗粒污染物,从用于生产半导体器件,显示装置等的器件的衬底,清洁液体介质包含 以下成分(A),(B),(C)和(D)的pH为9以上,成分(C)的含量为0.01〜4重量%:(A) 具有相同分子结构的任选取代的烃基和聚氧乙烯基的烃类表面活性剂,其中烃基(m)中所含的碳原子数与聚氧乙烯基(n)中的氧化乙烯基的数量的比例, m / n为m / n <= 1.5,(B)碱成分,(C)过氧化氢和(D)水。
    • 13. 发明授权
    • Add-drop multiplexing apparatus
    • 分插复用装置
    • US6122249A
    • 2000-09-19
    • US810406
    • 1997-03-04
    • Hideaki MochizukiRitsuko Ohkura
    • Hideaki MochizukiRitsuko Ohkura
    • H04J3/00H04J3/08H04J3/14H04L1/22
    • H04J3/085
    • An add drop multiplexing (ADM) apparatus has a simple and compact structure. The ADM apparatus has high-order interfaces connected to a high-order network, path setting units each for setting a path for a signal according to path data and inserting or dropping the signal to or from the high-order network, a first path protection switch for selecting one of the signals dropped by the path setting units, low-order interfaces each for receiving the selected signal and transmitting the same to a low-order network, and a second path protection switch for receiving low-order signals from the low-order interfaces and transferring one of them to the path setting units so that the path setting units may insert the signal into the high-order network.
    • 添加分复用(ADM)装置具有简单紧凑的结构。 ADM装置具有连接到高阶网络的高阶接口,路径设置单元,每个路径设置单元用于根据路径数据设置用于信号的路径并将信号插入到高阶网络或从高阶网络插入信号;第一路径保护 用于选择由路径设置单元丢弃的信号之一的开关,用于接收所选择的信号并将其发送到低阶网络的低阶接口,以及用于从低位网络接收低阶信号的第二路径保护开关 并将其中的一个传送到路径设置单元,使得路径设置单元可以将信号插入到高阶网络中。
    • 16. 发明授权
    • Path protection switching device
    • 路径保护开关装置
    • US5572513A
    • 1996-11-05
    • US343707
    • 1994-11-22
    • Kanta YamamotoHideaki Mochizuki
    • Kanta YamamotoHideaki Mochizuki
    • H04J3/00H04J3/06H04J3/08H04J3/14H04L12/437H04Q11/04
    • H04J3/14H04J3/0623H04J3/08H04J2203/0042H04J2203/006
    • A path protection switching device is provided for a SONET type transmitter-receiver for transmitting and receiving synchronous byte multiplex signals, wherein the scale of circuitry such as a path switch, alarm detecting sections and the like can be reduced. A path switch selects one of channel signals input thereto at identical timing, from time-division multiplex signals output from first and second TSAs while the multiplex signals remain multiplexed. In order for one of the channel signals to be selected while the signals remain multiplexed, the channel signals must be in phase; therefore, phase adjusting sections are provided to cope with the situation where the channel signals are out of phase. Further, to enable the path protection switching device to operate on time- division multiplex signals in which channel signals of difference sizes are multiplexed, VT size detecting sections each detect the size of individual channel signals forming the multiplex signal, and supply the detected signal size to the path switch.
    • 为SONET型发送接收机提供路径保护切换装置,用于发送和接收同步字节多路复用信号,其中诸如路径切换,报警检测部分等的电路规模可以减小。 路径开关从多个第一和第二TSA输出的时分多路复用信号在多路复用信号保持多路复用时,以相同的定时选择输入到其中的一个信道信号。 为了在信号保持多路复用时选择一个信道信号,信道信号必须同相; 因此,提供相位调整部以应对信道信号异相的情况。 此外,为了使路径保护开关装置对差分大小的信道信号进行复用的时分复用信号进行动作,VT尺寸检测部分检测形成多路复用信号的各个信道信号的大小,并提供检测到的信号大小 到路径切换。
    • 17. 发明授权
    • Jitter correction method and circuit
    • 抖动校正方法和电路
    • US08000429B2
    • 2011-08-16
    • US11520609
    • 2006-09-14
    • Hideo AbeYuji ObanaHideaki Mochizuki
    • Hideo AbeYuji ObanaHideaki Mochizuki
    • H04L7/00
    • H04L7/0008H04L1/205
    • In a jitter correction method and circuit, combination data combined by adding, to referenced data, an end bit of data 1 clock prior to and a head bit of data 1 clock subsequent to the referenced data is sequentially generated. Each bit of the combination data is sequentially referred. When a change between a referenced bit and a bit directly adjoining the referenced bit is detected, and when a number of references reaches a multiplication number of the oversampling and a change between at least three adjoining bits including the referenced bit is not detected, change position display data regarding the directly adjoining bit as a change bit of the referenced data is generated and the number of references is initialized. When the change is not detected and the number of references does not reach the multiplication number, the number of references is incremented. All the change bits are extracted from the referenced data and the change position display data, and a data reproduction is performed corresponding to the multiplication number.
    • 在抖动校正方法和电路中,通过将参考数据的1位时钟之后的数据的结束位和参考数据后的数据1个时钟的头位相加,结合数据组合数据。 顺序地参考组合数据的每一位。 当检测到参考位和与参考位直接相邻的位之间的变化时,并且当参考数量达到过采样的乘数并且未检测到包括参考位的至少三个相邻位之间的变化时,改变位置 生成关于直接相邻位的显示数据作为参考数据的改变位,并且引用的数量被初始化。 当未检测到变化,引用次数未达到乘数时,引用次数增加。 从参考数据和改变位置显示数据中提取所有改变位,并且对应于乘数执行数据再现。
    • 18. 发明授权
    • Transmission device
    • 传输设备
    • US07400655B2
    • 2008-07-15
    • US10705465
    • 2003-11-10
    • Hideaki MochizukiRitsuko Isonuma
    • Hideaki MochizukiRitsuko Isonuma
    • H04J3/06
    • H04J3/14H04J3/085
    • A transmission device which cross connects channels on a synchronous multiplex transmission network which forms a ring, and which performs restoration of communication by looping back signals in a protection path when a failure occurs includes a memory area which stores information for determining whether an alarm indication signal needs to be inserted in a channel or not, wherein the size of the memory area corresponds to the number of channels targeted for the restoration, and a part which inserts said alarm indication signal in a channel by switching results of the determination according to predetermined information. Further, the transmission device may switch and recover a path without skipping an event which arises between polling accesses by a CPU of said transmission device. Furthermore, the transmission device may include a part, provided in each interface part, which performs phase adjusting of channel signals.
    • 交叉连接形成环的同步复用传输网络上的信道的传输装置,并且当发生故障时通过环回保护路径中的信号来执行通信恢复包括存储区域,该存储区域存储用于确定警报指示信号 需要插入到通道中,其中存储区域的大小对应于恢复目标的通道的数量,以及通过根据预定信息切换确定结果而将通道中的报警指示信号插入的部分 。 此外,发送装置可以切换和恢复路径而不跳过由所述发送装置的CPU进行轮询访问之间发生的事件。 此外,发送装置可以包括设置在每个接口部分中的部分,其执行信道信号的相位调整。
    • 19. 发明授权
    • Digital phase locked circuit capable of dealing with input clock signal provided in burst fashion
    • 数字锁相电路能够处理以突发方式提供的输入时钟信号
    • US07397882B2
    • 2008-07-08
    • US10671593
    • 2003-09-29
    • Ichiro YokokuraYuji ObanaHideaki Mochizuki
    • Ichiro YokokuraYuji ObanaHideaki Mochizuki
    • H03D3/24
    • H03L7/0993H03L7/107H04J3/076
    • A digital phase locked circuit provides an output clock signal whose phase is synchronous with the phase of an input clock signal under a desired level of a phase absorption characteristic even if the input clock signal is supplied in a burst fashion. A phase comparing part compares the phase of the output clock signal with the phase of the input clock signal. A phase comparison result detecting part outputs an INC/DEC request signal for controlling a division operation based on a phase comparison signal. An execution rate computing part computes a phase difference between the input clock signal and the output clock signal based on the INC/DEC request signal and outputs an execution rate corresponding to the phase difference. A clock generating part controls a division operation for the master clock signal in accordance with the INC/DEC request signal and changes phase absorption speed of the output clock signal in accordance with the execution rate.
    • 数字锁相电路提供输出时钟信号,其输出时钟信号的相位与期望的相位吸收特性水平下的输入时钟信号的相位同步,即使以突发方式提供输入时钟信号。 相位比较部分将输出时钟信号的相位与输入时钟信号的相位进行比较。 相位比较结果检测部分输出用于根据相位比较信号控制除法运算的INC / DEC请求信号。 执行率计算部分根据INC / DEC请求信号计算输入时钟信号和输出时钟信号之间的相位差,并输出与相位差对应的执行速率。 时钟产生部分根据INC / DEC请求信号控制主时钟信号的除法运算,并根据执行速率改变输出时钟信号的相位吸收速度。
    • 20. 发明授权
    • Method for cleaning a surface of a substrate
    • 清洗基材表面的方法
    • US06896744B2
    • 2005-05-24
    • US10718574
    • 2003-11-24
    • Hitoshi MorinagaHideaki Mochizuki
    • Hitoshi MorinagaHideaki Mochizuki
    • B08B3/08C11D7/06C11D7/08C11D7/32C11D11/00H01L21/02H01L21/306C23G1/02
    • H01L21/02052B08B3/08C11D7/06C11D7/08C11D7/32C11D7/3245C11D11/0011C11D11/0047
    • A highly efficient method for cleaning a substrate, whereby in the cleaning of the substrate, {circle around (1)} in a short time, {circle around (2)} both particle contaminants and metal contaminants can be removed, and {circle around (3)} a problem associated therewith, such as re-deposition of contaminants or a dimensional change due to etching, can be remarkably reduced, and which has the following characteristics.A method for cleaning a surface of a substrate, which comprises at least the following steps (1) and (2), wherein the step (2) is carried out after carrying out the step (1):Step (1): A cleaning step of cleaning the surface of the substrate with an alkaline cleaning agent containing a completing agent, andStep (2): A cleaning step employing a cleaning agent having a hydrofluoric acid content C (wt %) of from 0.03 to 3 wt %, wherein the cleaning time t (seconds) of the substrate with said cleaning agent is at most 45 seconds, and C and t satisfy the relationship of 0.25≦tC1.29≦5.
    • 用于清洗基材的高效方法,由此在基材的清洗中(绕圆周(在短时间内为1)(绕圆周(2个颗粒污染物和金属污染物都可以除去)和{圆周(3个问题) 一种清洗基材表面的方法,该方法至少包括以下步骤(1),其中, (2),其中在执行步骤(1)之后执行步骤(2):步骤(1):清洁步骤,用包含完成剂的碱性清洁剂清洁基材的表面,步骤 (2):使用氢氟酸含量C(重量%)为0.03〜3重量%的清洗剂的清洗工序,其中,基板与清洗剂的清洗时间t(秒)为45秒以下, C和t满足0.25 <= TC 1.29 <= 5。