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11. 发明授权

US08395688B2 Solid-state imaging device having a shortened correlated double sampling (CDS) period, driving method of the same, and camera including the same 有权
标题翻译：具有缩短的相关双采样（CDS）周期的固态成像装置及其驱动方法，以及包括该固态成像装置的相机
公开(公告)号：US08395688B2
公开(公告)日：2013-03-12
申请号：US12665182
申请日：2008-06-27
申请人： Masashi Murakami , Kenji Watanabe , Masayuki Hirota , Kenichi Shimomura
发明人： Masashi Murakami , Kenji Watanabe , Masayuki Hirota , Kenichi Shimomura
IPC分类号： H04N3/14 , H04N5/335
CPC分类号： H04N5/378 , H04N5/3575 , H04N5/3658
摘要： The solid-state imaging device according to the present invention includes: pixel units arranged two-dimensionally in rows and columns; signal holding units each holding an analog signal outputted from one of the pixel units in a corresponding one of the columns; and column AD circuits each converting, into a digital signal, the analog signal held by a corresponding one of said signal holding units. The signal holding units and the column AD circuits are respectively provided for the columns of the pixel units. Each of the signal holding units includes: a switching element connected to a column signal line through which the analog signal outputted from the one of the pixel units is transmitted; and a capacitor element holding the analog signal and being connected to the column signal line through the switching element.
摘要翻译：根据本发明的固态成像装置包括：以行和列二维排列的像素单元; 信号保持单元，每个保持从对应的一列中的像素单元之一输出的模拟信号; 并且列AD电路将每个信号保持单元中相应的一个所保持的模拟信号转换成数字信号。信号保持单元和列AD电路分别设置用于像素单元的列。每个信号保持单元包括：连接到列信号线的开关元件，通过该开关元件从所述一个像素单元输出的模拟信号被发送; 以及保持模拟信号并通过开关元件连接到列信号线的电容器元件。

12. 发明申请

US20130032716A1 ELECTRON BEAM APPARATUS AND A DEVICE MANUFACTURING METHOD BY USING SAID ELECTRON BEAM APPARATUS 有权
标题翻译：电子束装置和使用电子束装置的装置制造方法
公开(公告)号：US20130032716A1
公开(公告)日：2013-02-07
申请号：US12007511
申请日：2008-01-11
申请人： Mamoru Nakasuji , Takao Kato , Nobuharu Noji , Tohru Satake , Takeshi Murakami , Kenji Watanabe
发明人： Mamoru Nakasuji , Takao Kato , Nobuharu Noji , Tohru Satake , Takeshi Murakami , Kenji Watanabe
IPC分类号： H01J37/07
CPC分类号： H01J3/10 , B82Y10/00 , B82Y40/00 , G01N23/225 , H01J3/021 , H01J37/063 , H01J37/073 , H01J37/1471 , H01J37/1472 , H01J37/3174 , H01J2237/06316 , H01J2237/2817
摘要： An electron beam apparatus, in which an electron beam emitted from an electron gun having a cathode and an anode is focused and irradiated onto a sample, and secondary electrons emanated from the sample are directed into a detector, the apparatus further comprising means for optimizing irradiation of the electron beam emitted from the electron gun onto the sample, the optimizing means may be two-stage deflectors disposed in proximity to the electron gun which deflects and directs the electron beam emitted in a specific direction so as to be in alignment with the optical axis direction of the electron beam apparatus, the electron beam emitted in the specific direction being at a certain angle with respect to the optical axis due to the fact that, among the crystal orientations of said cathode, a specific crystal orientation allowing a higher level of electron beam emission out of alignment with the optical axis direction.
摘要翻译：电子束装置，其中从具有阴极和阳极的电子枪发射的电子束被聚焦并照射到样品上，并且从样品发出的二次电子被引导到检测器中，该装置还包括用于优化照射的装置从电子枪发射到样品上的电子束的优化装置可以是设置在电子枪附近的两级偏转器，其偏转并引导沿特定方向发射的电子束以与光学器件对准电子束装置的轴方向，由于在所述阴极的晶体取向中具有更高水平的特定晶体取向的事实，在特定方向上发射的电子束相对于光轴成一定角度电子束发射与光轴方向不对准。

13. 发明授权

US08368031B2 Inspection system by charged particle beam and method of manufacturing devices using the system 有权
公开(公告)号：US08368031B2
公开(公告)日：2013-02-05
申请号：US13243429
申请日：2011-09-23
申请人： Mamoru Nakasuji , Nobuharu Noji , Tohru Satake , Masahiro Hatakeyama , Toshifumi Kimba , Hirosi Sobukawa , Shoji Yoshikawa , Takeshi Murakami , Kenji Watanabe , Tsutomu Karimata , Shin Oowada , Mutsumi Saito , Yuichiro Yamazaki , Takamitsu Nagai , Ichirota Nagahama
发明人： Mamoru Nakasuji , Nobuharu Noji , Tohru Satake , Masahiro Hatakeyama , Toshifumi Kimba , Hirosi Sobukawa , Shoji Yoshikawa , Takeshi Murakami , Kenji Watanabe , Tsutomu Karimata , Shin Oowada , Mutsumi Saito , Yuichiro Yamazaki , Takamitsu Nagai , Ichirota Nagahama
IPC分类号： H01J37/147 , H01J37/28
CPC分类号： H01J29/70 , G01N23/225 , G01N23/2251 , G01N23/227 , H01J37/06 , H01J37/073 , H01J37/141 , H01J37/185 , H01J37/20 , H01J37/222 , H01J37/244 , H01J37/266 , H01J37/28 , H01J2237/082 , H01J2237/202 , H01J2237/20228 , H01J2237/204 , H01J2237/22 , H01J2237/24564 , H01J2237/2806 , H01J2237/2816 , H01J2237/2817 , H01L21/6719 , H01L21/67213
摘要： An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the electron-optical system; a stage system 50 for holding and moving the object relative to the electron-optical system; a mini-environment chamber 20 for supplying a clean gas to the object to prevent dust from contacting to the object; a working chamber 31 for accommodating the stage device, the working chamber being controllable so as to have a vacuum atmosphere; at least two loading chambers 41, 42 disposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; and a loader 60 for transferring the object to the stage system through the loading chambers.

14. 发明申请

US20130002695A1 DISPLAY DEVICE, TELEVISION RECEIVER, DISPLAY DEVICE CONTROL METHOD, PROGRAMME, AND RECORDING MEDIUM 失效
标题翻译：显示设备，电视接收器，显示设备控制方法，程序和记录介质
公开(公告)号：US20130002695A1
公开(公告)日：2013-01-03
申请号：US13636313
申请日：2011-03-25
申请人： Yoshinori Kohno , Kohichi Takaku , Kenji Watanabe , Tetsuo Ikeyama , Masahiko Takiguchi , Mihoko Watanabe , Tsuyoshi Ohmori , Hiroaki Okumoto
发明人： Yoshinori Kohno , Kohichi Takaku , Kenji Watanabe , Tetsuo Ikeyama , Masahiko Takiguchi , Mihoko Watanabe , Tsuyoshi Ohmori , Hiroaki Okumoto
IPC分类号： G09G5/00
CPC分类号： H04N5/57 , G06F3/012 , G09G5/003 , G09G2320/0613 , G09G2320/0666 , G09G2320/068 , G09G2320/08 , G09G2354/00 , H04N5/44591 , H04N21/4223 , H04N21/4415 , H04N21/4532 , H04N21/4755 , H04N21/4854
摘要： A display device (10) includes: a display section (23) which displays a picture; a user specifying section (130) which specifies a user viewing the display device; an image quality specifying section (170) which, in a case where the user specifying section (130) has specified a plurality of users, (i) obtains, from a recording section which records a plurality of setting values that correspond to user information for discriminating the plurality of users and are used to adjust an image quality, the plurality of setting values that correspond to the respective plurality of users thus specified and (ii) specifies, in accordance with the plurality of setting values thus obtained, a plurality of image qualities of a respective plurality of pictures to be displayed in the display section (23); and an image quality adjustment instructing section (150) which instructs an image quality adjusting section (22) to cause the display section (23) to display the plurality of pictures at the respective plurality of image qualities thus specified.
摘要翻译：显示装置（10）包括：显示图像的显示部（23）用户指定部（130），其指定观看所述显示装置的用户; 在用户指定部（130）指定了多个用户的情况下，（i）从记录了与用户信息对应的多个设定值的记录部获得的图像质量确定部（170）识别多个用户并且用于调整图像质量，对应于如此指定的相应多个用户的多个设置值，并且（ii）根据由此获得的多个设置值指定多个图像要在显示部分（23）中显示的相应多个图片的质量; 以及图像质量调整指示部（150），其指示图像质量调整部（22）使显示部（23）以如此指定的各个图像质量显示多张画面。

15. 发明授权

US08342519B2 Sheet conveying device and image forming apparatus 有权
公开(公告)号：US08342519B2
公开(公告)日：2013-01-01
申请号：US12904021
申请日：2010-10-13
申请人： Kenji Watanabe , Minoru Kawanishi , Motohiro Furusawa , Hiroki Yamaguchi , Shigeo Murayama
发明人： Kenji Watanabe , Minoru Kawanishi , Motohiro Furusawa , Hiroki Yamaguchi , Shigeo Murayama
IPC分类号： B65H9/04
CPC分类号： B65H9/06 , B65H5/06 , B65H9/002 , B65H9/004 , B65H9/10 , B65H2402/515 , B65H2403/541 , B65H2404/722 , B65H2801/06
摘要： A sheet conveying device includes a blocking member having a blocking surface with which a leading end of a sheet that is being conveyed comes into contact for obliquity correction. The blocking member is rotated by being pushed by the sheet against an urging force of a positioning unit that positions the blocking member to be in the standby position. The blocking member is rotatable to be in a sheet-passage-allowing orientation in which the sheet is allowed to pass. When a trailing end of the sheet that is being conveyed has passed the blocking member, the blocking member that is in the sheet-passage-allowing orientation rotates in a same direction as a sheet conveyance direction and is positioned to be in a standby position.

16. 发明申请

US20120237280A1 SHEET DETECTING APPARATUS AND IMAGE FORMING APPARATUS 有权
标题翻译：表格检测装置和图像形成装置
公开(公告)号：US20120237280A1
公开(公告)日：2012-09-20
申请号：US13408129
申请日：2012-02-29
申请人： Akira Yoshimura , Kenji Watanabe , Minoru Kawanishi , Motohiro Furusawa , Yohei Suzuki
发明人： Akira Yoshimura , Kenji Watanabe , Minoru Kawanishi , Motohiro Furusawa , Yohei Suzuki
IPC分类号： G03G15/00 , B65H5/00
CPC分类号： G03G15/6558 , G03G15/235 , G03G15/6561 , G03G2215/00586 , G03G2215/00616 , G03G2215/00721
摘要： A sheet detecting apparatus including: a sheet detecting member having a plurality of abutment surfaces in a peripheral direction thereof, the sheet detecting member being rotated by a conveyed sheet abutting against one of the plurality of abutment surfaces; a detection portion which operates in association with the sheet detecting member; a sensor which generates a signal based on a position of the detection portion; and an urging portion which generates an urging force for positioning the one of the plurality of abutment surfaces of the sheet detecting member in a waiting position in which the leading edge of a sheet conveyed by a conveying portion abuts against the one of the plurality of abutment surfaces, and thereafter the urging portion switching the urging force to an urging force for positioning, in the waiting position, another one of the plurality of abutment surfaces against which a succeeding sheet abuts.
摘要翻译：一种片材检测装置，包括：片材检测部件，其周向具有多个邻接表面，片材检测部件被抵靠在多个邻接表面中的一个的传送片材旋转; 检测部，其与片材检测部件相关联地操作; 传感器，其基于所述检测部的位置生成信号; 以及施力部，其产生用于将片材检测部件的多个抵接面中的一个定位的等待位置，其中由输送部件输送的片材的前缘抵靠在多个抵接部并且此后，所述推动部分将所述推动力切换到用于在所述等待位置中定位另一个所述多个邻接表面中的另一个抵靠表面的推动力，所述多个邻接表面中的另一个邻接表面邻接。

17. 发明申请

US20120128286A1 BEARING APPARATUS 审中-公开
标题翻译：轴承装置
公开(公告)号：US20120128286A1
公开(公告)日：2012-05-24
申请号：US13387868
申请日：2010-07-06
申请人： Masaru Kondo , Kenji Watanabe , Yukiyasu Taguchi
发明人： Masaru Kondo , Kenji Watanabe , Yukiyasu Taguchi
IPC分类号： F16C33/10
CPC分类号： F16C33/105 , F16C9/04 , F16C17/022 , F16C17/246 , F16C33/046 , F16C33/1055 , F16C33/1085
摘要： A sliding bearing 4 is formed in the shape of a cylinder by joining joining surfaces 11A and 12A of a pair of half bearings 11 and 12 together. A through hole 7 is formed in the position of the joining surfaces 11A and 12A in such a manner that the through hole 7 coincides with the trajectory of movement of a lubrication hole 3A in a crankpin 3. A foreign particle discharge groove 8 is formed in an outer circumferential surface of the sliding bearing 4 along the axial direction leading from the through hole 7. When the crankpin 3 is rotated, a lubricant is directly supplied into the through hole 7 as well through the lubrication hole 3A. Foreign particles 15 contained in the lubricant pass through the through hole 7 and are then discharged to the outside the sliding bearing 4 through the foreign particle discharge groove 8. Thus, a sliding bearing 4 that can smoothly discharge foreign particles can be provided.
摘要翻译：滑动轴承4通过将一对半轴承11和12的接合表面11A和12A接合在一起而形成为圆筒形。通孔7形成在接合面11A，12A的位置，通孔7与曲轴销3的润滑孔3A的移动轨迹一致。异物排出槽8形成在滑动轴承4的外圆周表面沿着从通孔7引出的轴向方向。当曲柄销3旋转时，润滑剂也通过润滑孔3A直接供应到通孔7中。容纳在润滑剂中的异物15通过通孔7，然后通过异物排出槽8排出到滑动轴承4的外侧。因此，可以提供能够平滑地排出异物的滑动轴承4。

18. 发明申请

US20120062890A1 Method and Its Apparatus for Inspecting Particles or Defects of a Semiconductor Device 审中-公开
标题翻译：检测颗粒的方法及其装置或半导体器件的缺陷
公开(公告)号：US20120062890A1
公开(公告)日：2012-03-15
申请号：US13298079
申请日：2011-11-16
申请人： Hidetoshi Nishiyama , Minori Noguchi , Yoshimasa Ooshima , Akira Hamamatsu , Kenji Watanabe , Tetsuya Watanabe , Takahiro Jingu
发明人： Hidetoshi Nishiyama , Minori Noguchi , Yoshimasa Ooshima , Akira Hamamatsu , Kenji Watanabe , Tetsuya Watanabe , Takahiro Jingu
IPC分类号： G01N15/02
CPC分类号： G01N21/4738 , G01N21/8806 , G01N21/93 , G01N21/94 , G01N21/9501 , G01N2015/1486 , G01N2015/1493
摘要： Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection apparatus outputs a large number of detected particles/defects, an immense time is required for analyzing the detected particles/defects, resulting in a delay in taking countermeasures to a failure in the manufacturing processes. In the present invention, an apparatus for optically inspecting particles or defects relates a particle or defect size to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles.
摘要翻译：通常，作为检测结果，粒子/缺陷检查装置输出检测出的粒子/缺陷的总数。对于制造过程中的故障采取对策，分析检查装置检测到的颗粒/缺陷。由于检查装置输出大量检测到的粒子/缺陷，所以需要巨大的时间来分析检测到的粒子/缺陷，从而导致制造过程中的失败的对策的延迟。在本发明中，用于光学检查颗粒或缺陷的装置在检查结果中将颗粒或缺陷尺寸与故障原因相关联。数据处理电路从检查结果统计中指出故障原因，并显示检查结果信息。通过设定用于识别半导体装置等上的各区域的故障的阈值来进行故障分析，以统计学评价检测出的粒子。

19. 发明申请

US20120049063A1 SAMPLE SURFACE INSPECTION APPARATUS AND METHOD 有权
标题翻译：样品表面检查装置和方法
公开(公告)号：US20120049063A1
公开(公告)日：2012-03-01
申请号：US13289486
申请日：2011-11-04
申请人： Masahiro Hatakeyama , Kenji Watanabe , Takeshi Murakami , Tohru Satake , Nobuharu Noji
发明人： Masahiro Hatakeyama , Kenji Watanabe , Takeshi Murakami , Tohru Satake , Nobuharu Noji
IPC分类号： H01J37/28
CPC分类号： G03F7/162 , G01N23/225 , H01J37/285 , H01J2237/204 , H01J2237/2812 , H01J2237/2814 , H01J2237/2855 , H01J2237/2857
摘要： The present invention provides a surface inspection method and apparatus for inspecting a surface of a sample, in which a resistive film is coated on the surface, and a beam is irradiated to the surface having the resistive film coated thereon, to thereby conduct inspection of the surface of the sample. In the surface inspection method of the present invention, a resistive film having an arbitrarily determined thickness t1 is first coated on a surface of a sample. Thereafter, a part of the resistive film having the arbitrarily determined thickness t1 is dissolved in a solvent, to thereby reduce the thickness of the resistive film to a desired level. This enables precise control of a value of resistance of the resistive film and suppresses distortion of an image to be detected.
摘要翻译：本发明提供了一种表面检查方法和装置，用于检查表面上涂覆有电阻膜的样品的表面，并且将光束照射到其上涂覆有电阻膜的表面，从而进行样品表面。在本发明的表面检查方法中，首先将具有任意确定的厚度t1的电阻膜涂覆在样品的表面上。此后，将具有任意确定的厚度t1的电阻膜的一部分溶解在溶剂中，从而将电阻膜的厚度减小到期望的水平。这能够精确地控制电阻膜的电阻值并抑制要检测的图像的失真。

20. 发明授权

US08124933B2 Mapping-projection-type electron beam apparatus for inspecting sample by using electrons emitted from the sample 有权
标题翻译：用于通过使用从样品发射的电子来检查样品的映射投影型电子束装置
公开(公告)号：US08124933B2
公开(公告)日：2012-02-28
申请号：US12538416
申请日：2009-08-10
申请人： Kenji Watanabe , Takeshi Murakami , Masahiro Hatakeyama , Yoshinao Hirabayashi , Tohru Satake , Nobuhara Noji , Yuichiro Yamazaki , Ichirota Nagahama
发明人： Kenji Watanabe , Takeshi Murakami , Masahiro Hatakeyama , Yoshinao Hirabayashi , Tohru Satake , Nobuhara Noji , Yuichiro Yamazaki , Ichirota Nagahama
IPC分类号： H01J37/26
CPC分类号： H01J37/32211 , G01N23/225 , H01J37/32357 , H01J2237/2441 , H01J2237/2446
摘要： An apparatus capable of detecting defects of a pattern on a sample with high accuracy and reliability and at a high throughput, and a semiconductor manufacturing method using the same are provided. The electron beam apparatus is a mapping-projection-type electron beam apparatus for observing or evaluating a surface of the sample by irradiating the sample with a primary electron beam and forming on a detector an image of reflected electrons emitted from the sample. An electron impact-type detector such as an electron impact-type CCD or an electron impact-type TDI is used as the detector for detecting the reflected electrons. The reflected electrons are selectively detected from an energy difference between the reflected electrons and secondary electrons emitted from the sample. To eliminate charge-up caused on the sample surface by irradiation with the primary electron beam, the surface of the sample is covered with a cover placed above the sample and a gas is supplied to the space above the sample covered with the cover. The gas is brought into contact with the sample surface to reduce charge-up on the sample surface.
摘要翻译：提供了能够以高精度和可靠性以高产量检测样品上的图案的缺陷的装置，以及使用该缺陷的半导体制造方法。电子束装置是用于通过用一次电子束照射样品来观察或评价样品的表面的映射投影型电子束装置，并在检测器上形成从样品发射的反射电子的图像。作为检测反射电子的检测器，使用电子碰撞型CCD或电子碰撞型TDI等电子轰击型检测器。从反射电子和从样品发射的二次电子之间的能量差选择性地检测反射电子。为了通过照射一次电子束来消除样品表面上产生的电荷，样品的表面被放置在样品上方的盖子覆盖，并将气体供应到覆盖有覆盖物的样品上方。气体与样品表面接触以减少样品表面的充电。

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