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    • 20. 发明授权
    • Method for manufacturing polycrystalline silicon, and polycrystalline silicon for solar cells manufactured by the method
    • 用于制造多晶硅的方法和通过该方法制造的用于太阳能电池的多晶硅
    • US07732012B2
    • 2010-06-08
    • US11630395
    • 2005-05-16
    • Tatsuhiko HonguYasuhiro KatoHiroshi Hagimoto
    • Tatsuhiko HonguYasuhiro KatoHiroshi Hagimoto
    • C23C14/10C23C16/00B05D7/22C01B33/02C30B23/00C30B25/00C30B28/12C30B28/14H01L31/00
    • C01B33/035H01L31/182Y02E10/546Y02P70/521
    • Provided is a method for the preparation of polycrystalline silicon in which, in conducting preparation of polycrystalline silicon by the Siemens method or by the monosilane method, no outer heating means is necessitated for the core member (seed rod), onto which polycrystalline silicon is deposited, from the initial stage of heating, the deposition rate is high and the core member seed rod can be used repeatedly.The method for deposition of high-purity polycrystalline silicon, at a high temperature, onto a white-heated seed rod in a closed reaction furnace by pyrolysis or hydrogen reduction of a starting silane gas supplied thereto, is characterized in that the seed rod is a member made from an alloy having a recrystallization temperature of 1200° C. or higher. It is preferable that the alloy member is of an alloy of Re—W, W—Ta, Zr—Nb, titanium-zirconium, or a carbon-added molybdenum (TZM) in the form of a wire member having a diameter of at least 0.5 mm, a plate member having a thickness of at least 1 mm or a prismatic member, or a tubular member having a diameter of at least 1 mm, wall thickness of at least 0.2 mm with an inner diameter not exceeding 5 mm, that the plate member, wire member, prismatic member or tubular member has a tapered form and further that the tubular member is a tapered duplex tube.
    • 提供了一种制备多晶硅的方法,其中在通过西门子方法或通过单硅烷法制备多晶硅时,不需要在芯材(籽晶棒)上沉积多晶硅的外部加热装置 ,从加热的初始阶段,沉积速率高,并且可以重复使用芯部种子棒。 通过热分解或氢还原提供给其的起始硅烷气体,将高纯度多晶硅沉积在封闭反应炉中的白加热种子棒上的方法的特征在于种子棒是 由重结晶温度为1200℃以上的合金制成的部件。 优选的是,合金构件是具有至少直径的线材的形式的Re-W,W-Ta,Zr-Nb,钛 - 锆或添加碳的钼(TZM)的合金 厚度为至少1mm的板构件或棱柱构件,或直径为至少1mm的管状构件,壁厚为至少0.2mm,内径不超过5mm,使得 板构件,线构件,棱柱构件或管状构件具有锥形形状,并且还包括管状构件是锥形双面管。