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11. 发明授权

US06185028B2 Optical barrier apparatus 失效
公开(公告)号：US06185028B2
公开(公告)日：2001-02-06
申请号：US09539027
申请日：2000-03-30
申请人： Norihiro Asada , Koichi Futsuhara
发明人： Norihiro Asada , Koichi Futsuhara
IPC分类号： G02B2608
CPC分类号： G01V8/10 , G01V8/12 , G01V8/20 , G01V8/26
摘要： A laser beam generated from a laser beam generating means 201 is reflected on a semiconductor mirror galvanometer 102. A region 105 to be inspected is scanned with the reflected laser beam 106. The laser beam 106 passing through the region 105 to be inspected is received by a light receiving device array 130. A pulse train included in an output signal produced from the light receiving device array 130 are monitored by a signal processing circuit 206. If an obstacle intrudes into the region 105 to be inspected and induces a pulse deficiency in the pulse train, the deficiency is detected by use of a pulse deficiency detecting circuit 204. A constitution mentioned above provides an optical barrier apparatus capable of reducing manufacturing costs without endangering a fail-safe property.

12. 发明授权

US6046834A Optical barrier 失效
标题翻译：光屏障
公开(公告)号：US6046834A
公开(公告)日：2000-04-04
申请号：US930077
申请日：1997-11-07
申请人： Norihiro Asada , Koichi Futsuhara
发明人： Norihiro Asada , Koichi Futsuhara
IPC分类号： G01V8/10 , G01V8/12 , G01V8/20 , G01V8/26 , G02B26/08
CPC分类号： G01V8/10 , G01V8/12 , G01V8/20 , G01V8/26
摘要： A laser beam generated from a laser beam generating means 201 is reflected on a semiconductor mirror galvanometer 102. A region 105 to be inspected is scanned with the reflected laser beam 106. The laser beam 106 passing through the region 105 to be inspected is received by a light receiving device array 130. A pulse train included in an output signal produced from the light receiving device array 130 are monitored by a signal processing circuit 206. If an obstacle intrudes into the region 105 to be inspected and induces a pulse deficiency in the pulse train, the deficiency is detected by use of a pulse deficiency detecting circuit 204. A constitution mentioned above provides an optical barrier apparatus capable of reducing manufacturing costs without endangering a fail-safe property.
摘要翻译： PCT No.PCT / JP97 / 00742 Sec。 371日期：1997年11月7日 102（e）日期1997年11月7日PCT 1997年3月10日PCT公布。出版物WO97 / 33186 日期1997年9月12日从激光束产生装置201产生的激光束在半导体反射镜电流计102上被反射。要被检查的区域105用反射激光束106扫描。激光束106通过区域105到由光接收装置阵列130接收检查。由光接收装置阵列130产生的输出信号中包括的脉冲串由信号处理电路206监视。如果障碍物进入要检查的区域105并且引起脉冲串中的脉冲不足，通过使用脉冲缺陷检测电路204来检测不足。上述结构提供了能够降低制造成本而不危及故障安全性的光阻挡装置。

13. 发明授权

US5606447A Planar type mirror galvanometer and method of manufacture 失效
标题翻译：平面式反射镜及其制造方法
公开(公告)号：US5606447A
公开(公告)日：1997-02-25
申请号：US507244
申请日：1995-10-19
申请人： Norihiro Asada , Masayoshi Esashi
发明人： Norihiro Asada , Masayoshi Esashi
IPC分类号： B41J2/44 , G02B26/08 , G02B26/10
CPC分类号： G02B26/085 , G02B26/0816 , G02B26/105 , Y10S359/90
摘要： A slim-type small size mirror galvanometer is made using semiconductor manufacturing techniques to form a silicon substrate 2 having a planar movable plate 5 and a torsion bar 6 for axially supporting the movable plate 5 formed integrally therewith, with a planar coil 7 and a total reflecting mirror 8 provided on an upper face of the movable plate 5. Upper and lower glass substrates 3, 4 are provided on upper and lower faces of the silicon substrate 2, and permanent magnets 10A, 10B and 11A, 11B are fixed to the upper and lower substrates 3, 4 at predetermined locations so as to produce a magnetic field at the planar coil 7. The direction and quantity of current flowing in the planar coil 7 is controlled to variably control the displacement angle of the movable plate 5 depending on the balance between the generated magnetic force and the torsion force of the torsion bar 6.
摘要翻译： PCT No.PCT / JP94 / 02062 Sec。 371 1995年10月19日日期 102（e）1995年10月19日PCT PCT 1994年12月8日PCT公布。 WO95 / 17698 PCT公开号日期：1995年6月29日使用半导体制造技术制造薄型小型反射镜电流计，以形成具有平面可动板5的硅基板2和用于轴向支撑与其一体形成的可动板5的扭杆6，线圈7和设置在可动板5的上表面上的全反射镜8.上玻璃基板3,4和下玻璃基板3,4设置在硅基板2的上表面和下表面上，永磁体10A，10B和11A，11B 在预定位置处固定到上基板3,4和下基板3上，以在平面线圈7处产生磁场。控制在平面线圈7中流动的电流的方向和数量以可变地控制可移动的位移角板5取决于所产生的磁力与扭杆6的扭转力之间的平衡。

14. 发明申请

US20070158759A1 Silicon spring electrode and anisotropic conductive sheet 失效
标题翻译：硅弹簧电极和各向异性导电片
公开(公告)号：US20070158759A1
公开(公告)日：2007-07-12
申请号：US10581852
申请日：2004-11-30
申请人： Norihiro Asada
发明人： Norihiro Asada
IPC分类号： H01L29/76
CPC分类号： H01R13/2414 , H01R13/035
摘要： In order to provide an anisotropic conductive sheet which can be applied to more finely and more narrowly pitched electrodes and also to provide spring electrodes applied for the anisotropic conductive sheet, the spring electrodes manufactured as follows. A part having a bending leaf spring shape is formed out of a monocrystal silicon by anisotropic etching and gold is plated on the surface of the part so as to obtain a silicon spring electrode 1. The silicon spring electrodes 1 are inserted in through holes formed on a silicone rubber sheet and fixed to the through holes.
摘要翻译：为了提供可应用于更精细和更窄的俯仰电极并且还提供用于各向异性导电片的弹簧电极的各向异性导电片，如下制造的弹簧电极。通过各向异性蚀刻由单晶硅形成具有弯曲板簧形状的部分，并且在部件的表面上镀金，以获得硅弹簧电极1。硅弹簧电极1插入形成在硅橡胶片上的通孔中并固定到通孔。

15. 发明授权

US06178027B1 Optical barrier apparatus 失效
标题翻译：光屏障装置
公开(公告)号：US06178027B1
公开(公告)日：2001-01-23
申请号：US09538758
申请日：2000-03-30
申请人： Norihiro Asada , Koichi Futsuhara
发明人： Norihiro Asada , Koichi Futsuhara
IPC分类号： G02B2608
CPC分类号： G01V8/10 , G01V8/12 , G01V8/20 , G01V8/26
摘要： A laser beam generated from a laser beam generating means 201 is reflected on a semiconductor mirror galvanometer 102. A region 105 to be inspected is scanned with the reflected laser beam 106. The laser beam 106 passing through the region 105 to be inspected is received by a light receiving device array 130. A pulse train included in an output signal produced from the light receiving device array 130 are monitored by a signal processing circuit 206. If an obstacle intrudes into the region 105 to be inspected and induces a pulse deficiency in the pulse train, the deficiency is detected by use of a pulse deficiency detecting circuit 204. A constitution mentioned above provides an optical barrier apparatus capable of reducing manufacturing costs without endangering a fail-safe property.
摘要翻译：从激光束产生装置201产生的激光束被反射在半导体反射镜检流计102上。被检查的区域105被反射的激光束106扫描。通过要检查的区域105的激光束106被接收到包含在从光接收装置阵列130产生的输出信号中的脉冲序列由信号处理电路206监视。如果障碍物进入待检查的区域105，并且引起脉冲不足脉冲串，通过使用脉冲缺陷检测电路204检测不足。上述结构提供了能够降低制造成本而不危及故障保护性的光阻挡装置。

16. 发明授权

US5966009A Electromagnetic actuator and manufacturing method therefor 失效
标题翻译：电磁执行器及其制造方法
公开(公告)号：US5966009A
公开(公告)日：1999-10-12
申请号：US981245
申请日：1997-12-22
申请人： Norihiro Asada
发明人： Norihiro Asada
IPC分类号： G02B26/10 , B81B7/02 , G02B7/182 , G02B26/08 , G01R13/38 , G01R13/40
CPC分类号： G02B26/085 , G02B7/1821
摘要： A portion of a torsion bar (6) for axially supporting a movable plate (5) of a planar electromagnetic actuator, is made conducting by diffusing boron therein in a high concentration. An external power source can thus be electrically connected to a planar coil (7) via the torsion bar (6) itself. As a result, the possibility of disconnection faults in the electrical wiring due to back and forth twisting movement of the torsion bar is eliminated, thus improving the durability and reliability of the electromagnetic actuator.
摘要翻译： PCT No.PCT / JP96 / 01148 Sec。 371 1997年12月22日第 102（e）日期1997年12月22日PCT 1996年4月26日PCT公布。出版物WO97 / 41632 日期1997年11月6日用于轴向支撑平面电磁致动器的可动板（5）的扭杆（6）的一部分通过以高浓度扩散硼而导通。因此，外部电源可以经由扭杆（6）本身电连接到平面线圈（7）。结果，消除了由于扭杆的来回扭转运动而导致的电线中的断线故障的可能性，从而提高了电磁致动器的耐久性和可靠性。

17. 发明授权

US5767666A Planar type mirror galvanometer incorpotating a displacement detection function 失效
标题翻译：平面式反射镜具有位移检测功能
公开(公告)号：US5767666A
公开(公告)日：1998-06-16
申请号：US530103
申请日：1995-09-26
申请人： Norihiro Asada , Masayoshi Esashi
发明人： Norihiro Asada , Masayoshi Esashi
IPC分类号： G02B26/08 , G02B26/10 , G01R13/38
CPC分类号： G02B26/0841 , G02B26/0816 , G02B26/105
摘要： The present invention relates to a slim-type small size mirror galvanometer wherein the mirror displacement angle can be detected, made using semiconductor manufacturing techniques. Using semiconductor manufacturing techniques, a movable plate 5 and a torsion bar 6 for axially supporting the movable plate 5 are formed integrally on a silicon substrate 2, with a planar coil 7 and a total reflecting mirror 8 formed on an upper face of the movable plate 5, and permanent magnets 10A, 10B and 11A, 11B fixedly located so as to produce a magnetic field at the planar coil 7. The direction and quantity of current flowing in the planar coil 7 is controlled to variably control the swing angle of the movable plate 5 depending on the balance between the generated magnetic force and the torsion force in the torsion bar 6. Moreover, detection coils 12A, 12B are provided beneath the movable plate 5, and a detection current is superimposed on the drive current in the planar coil 7. The mirror displacement angle is detected by a change in the mutual inductance due to the detection current, between the planar coil and the detection coils 12A, 12B.
摘要翻译： PCT No.PCT / JP95 / 00066 Sec。 371日期：1995年9月26日 102（e）1995年9月26日PCT PCT 1995年1月23日PCT公布。公开号WO95 / 20774 日期：1995年8月3日本发明涉及一种薄型小型反射镜电流计，其中可以使用半导体制造技术来检测反射镜位移角。使用半导体制造技术，可动板5和用于轴向支撑可动板5的扭力杆6一体地形成在硅基板2上，平面线圈7和形成在可动板的上表面上的全反射镜8 5以及固定在永久磁铁10A，10B，11A，11B上，以便在平面线圈7处产生磁场。控制平面线圈7中流动的电流的方向和数量，以可变地控制可动板5依赖于产生的磁力与扭力杆6的扭转力之间的平衡。此外，检测线圈12A，12B设置在可动板5的下方，检测电流叠加在平面线圈的驱动电流上通过由平面线圈和检测线圈12A，12B之间的检测电流引起的互感变化来检测反射镜位移角。

18. 发明授权

US5442303A Electromagnetically coupled fail-safe logic circuit 失效
标题翻译：电磁耦合故障安全逻辑电路
公开(公告)号：US5442303A
公开(公告)日：1995-08-15
申请号：US204405
申请日：1994-03-16
申请人： Norihiro Asada , Masakazu Kato , Koichi Futsuhara , Masayoshi Esashi
发明人： Norihiro Asada , Masakazu Kato , Koichi Futsuhara , Masayoshi Esashi
IPC分类号： H03K19/007 , H03K19/003
CPC分类号： H03K19/007
摘要： A fail-safe logic circuit employs a transformer (T) and a level tester (1). The transformer receives input signals each representing a binary logic variable and provides the sum of magnetic flux based on the input signals. The level tester tests the level of the sum of the magnetic flux and provides a binary output (y) representing a logic value of 1 or 0. This circuit is simple and capable of lowering an output level.
摘要翻译： PCT No.PCT / JP92 / 00911 Sec。 371日期1994年3月16日 102（e）1994年3月16日PCT提交1992年7月16日PCT公布。出版物WO94 / 00292 日期：1994年2月3日。故障安全逻辑电路采用变压器（T）和电平测试仪（1）。变压器接收各自表示二进制逻辑变量的输入信号，并根据输入信号提供磁通量之和。电平测试仪测试磁通总和的电平，并提供表示逻辑值为1或0的二进制输出（y）。该电路简单，能够降低输出电平。

19. 发明申请

US20090115289A1 Resonator Capable of Varying Its Resonance Frequency and Method for Varying Its Resonance Frequency 审中-公开
标题翻译：谐振器能够改变其谐振频率和改变谐振频率的方法
公开(公告)号：US20090115289A1
公开(公告)日：2009-05-07
申请号：US11988322
申请日：2006-06-27
申请人： Norihiro Asada
发明人： Norihiro Asada
IPC分类号： H01L41/047 , H01L41/06
CPC分类号： H01P7/06
摘要： The present invention provides a resonator capable of varying its resonance frequency of good performance with a low dispersion at a high manufacturing yield and a low cost. The resonator comprises a fixed electrode 1; a movable electrode 3 arranged with a predetermined distance apart from and parallel to the fixed electrode; a plurality of conductive leaf springs 2 with conductive property, all of which are bent outward or inward beforehand, arranged parallel apart from each other wherein, one end of each leaf spring is integrated into the fixed electrode and the other end of each leaf spring is integrated into the movable electrode; and an actuator 6 attached to the movable electrode for deforming the leaf springs by pushing or pulling the movable electrode.
摘要翻译：本发明提供一种能够以高制造成品率和低成本以低分散度改变其良好性能的谐振频率的谐振器。谐振器包括固定电极1; 以与固定电极平行的方式配置的可动电极3; 具有导电性的多个导电板簧2，其全部都预先向外或向内弯曲，彼此平行分布设置，其中每个板簧的一端一体地固定在固定电极中，每个板簧的另一端为集成到可动电极中; 以及附接到可动电极的致动器6，用于通过推动或拉动可移动电极来使板簧变形。

20. 发明授权

US06774445B2 Actuator 失效
标题翻译：执行器
公开(公告)号：US06774445B2
公开(公告)日：2004-08-10
申请号：US10159753
申请日：2002-05-30
申请人： Kiyotaka Mutoh , Yuzuru Ueda , Norihiro Asada
发明人： Kiyotaka Mutoh , Yuzuru Ueda , Norihiro Asada
IPC分类号： H01L2982
CPC分类号： G02B26/0833 , B81B3/0072 , B81B2201/042 , B81B2203/0109 , B81B2203/058
摘要： The invention aims at suppressing an amount of deformation of a central portion of a movable part in a micro-miniature semiconductor actuator. A boundary portion is provided between a central portion and an edge of a movable part which is axially supported in a rotatable manner by torsion bars of an actuator, the boundary portion suppressing transmission of a warp due to an influence of air resistance at the edge of the movable part or moment of inertia, or heat generated by a driving force generating portion at the edge of the movable part, to a central portion of the movable part, to suppress deformation of the central portion of the movable part.
摘要翻译：本发明旨在抑制微型半导体致动器中的可移动部件的中心部分的变形量。边界部分设置在可动部件的中心部分和边缘之间，该可移动部件通过致动器的扭杆以可旋转的方式轴向支撑，边界部分抑制由于在边缘处的空气阻力的影响而产生的翘曲的传播活动部分或惯性矩，或者由可动部分的边缘处的驱动力产生部分产生的热量到可移动部分的中心部分，以抑制可移动部分的中心部分的变形。

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