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11. 发明授权

US07003193B2 Miniature movable device 失效
标题翻译：微型移动装置
公开(公告)号：US07003193B2
公开(公告)日：2006-02-21
申请号：US10958722
申请日：2004-10-04
申请人： Yoshichika Kato , Keiichi Mori , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
发明人： Yoshichika Kato , Keiichi Mori , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
IPC分类号： G02B6/26 , G02B6/00
CPC分类号： G02B6/3566 , G02B6/3514 , G02B6/3546 , G02B6/357 , G02B6/358 , G02B6/3584 , G02B6/3596 , G02B6/3636 , G02B6/3692
摘要： A movable part formed on a substrate and adapted to be displaced in a direction parallel to the sheet surface of the substrate, a fixing part formed and fixedly mounted on the substrate, and springy hinges extending parallel to the sheet surface of the substrate and having their opposite ends connected to the movable part and the fixing part for supporting the movable part in a displaceable manner are provided. As viewed in cross section in a plane perpendicular to the lengthwise direction of the hinges, the hinge has a width which is diminishing as the top surface of the substrate is approached, thus having a trapezoidal or triangular cross section. A width as measured on the top surface of the hinge which is required to provide an equivalent spring constant can be chosen to be greater than the width of a hinge having a rectangular cross section (constant width), and this facilitates the implementation of the photolithography during the manufacture.
摘要翻译：可移动部件形成在基板上并且适于沿平行于基板的板表面的方向移位，形成并固定地安装在基板上的固定部分，以及平行于基板的板表面延伸的弹性铰链，提供连接到可移动部分的相对端和用于以可移位方式支撑可移动部件的固定部分。从与铰链长度方向垂直的平面中的横截面看，铰链的宽度随着基板的上表面接近而减小，因此具有梯形或三角形横截面。可以选择在铰链的顶表面上测量的提供等效弹簧常数的宽度大于具有矩形横截面（恒定宽度）的铰链的宽度，并且这有助于实现光刻在制造过程中。

12. 发明申请

US20050078908A1 Miniature movable device 失效
标题翻译：微型移动装置
公开(公告)号：US20050078908A1
公开(公告)日：2005-04-14
申请号：US10958722
申请日：2004-10-04
申请人： Yoshichika Kato , Keiichi Mori , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
发明人： Yoshichika Kato , Keiichi Mori , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
IPC分类号： G02B6/35 , G02B6/36
CPC分类号： G02B6/3566 , G02B6/3514 , G02B6/3546 , G02B6/357 , G02B6/358 , G02B6/3584 , G02B6/3596 , G02B6/3636 , G02B6/3692
摘要： A movable part formed on a substrate and adapted to be displaced in a direction parallel to the sheet surface of the substrate, a fixing part formed and fixedly mounted on the substrate, and springy hinges extending parallel to the sheet surface of the substrate and having their opposite ends connected to the movable part and the fixing part for supporting the movable part in a displaceable manner are provided. As viewed in cross section in a plane perpendicular to the lengthwise direction of the hinges, the hinge has a width which is diminishing as the top surface of the substrate is approached, thus having a trapezoidal or triangular cross section. A width as measured on the top surface of the hinge which is required to provide an equivalent spring constant can be chosen to be greater than the width of a hinge having a rectangular cross section (constant width), and this facilitates the implementation of the photolithography during the manufacture.
摘要翻译：可移动部件形成在基板上并且适于沿平行于基板的板表面的方向移位，形成并固定地安装在基板上的固定部分，以及平行于基板的板表面延伸的弹性铰链，提供连接到可移动部分的相对端和用于以可移位方式支撑可移动部件的固定部分。从与铰链长度方向垂直的平面中的横截面看，铰链的宽度随着基板的上表面接近而减小，因此具有梯形或三角形横截面。可以选择在铰链的顶表面上测量的提供等效弹簧常数的宽度大于具有矩形横截面（恒定宽度）的铰链的宽度，并且这有助于实现光刻在制造过程中。

13. 发明申请

US20050078907A1 Miniature movable device 失效
标题翻译：微型移动装置
公开(公告)号：US20050078907A1
公开(公告)日：2005-04-14
申请号：US10957284
申请日：2004-10-01
申请人： Yoshichika Kato , Keiichi Mori , Satoshi Yoshida , Osamu Imaki , Yoshihiko Hamada , Kenji Kondou
发明人： Yoshichika Kato , Keiichi Mori , Satoshi Yoshida , Osamu Imaki , Yoshihiko Hamada , Kenji Kondou
IPC分类号： G02B6/35 , H02N1/00
CPC分类号： G02B6/358 , G02B6/3514 , G02B6/3546 , G02B6/357 , G02B6/3584 , G02B6/3596 , H02N1/008
摘要： A miniature movable device comprises a movable part (a mirror, a movable rod, support arms, and a movable comb tooth electrode) formed on a substrate and adapted to be displaced in a direction parallel to the sheet surface of the substrate, a fixing part formed and fixedly mounted on the substrate, and hinges, each having its opposite ends connected to the movable part and the fixing part and assuming two flexural conditions which are reversed in flexural, the hinges being effective to maintain the movable part at two positions by a self-holding action when it assumes either flexural condition. The substrate is formed with wall surfaces which are disposed oppositely to the opposite surfaces of the hinges over a movable range of the hinges. Spacings between the hinges and the wall surfaces disposed on the opposite sides thereof are equal to each other at every point along the lengthwise direction of the hinges when the hinges assume one of the two flexural conditions (an initial condition assumed upon manufacture). This eliminates an inconvenience that during a drying step which follows a wet etching operation during the manufacture, a liquid may remain on only one side of the hinges to cause the hinges to be held attracted to the wall surfaces.
摘要翻译：微型可移动装置包括：形成在基板上的可移动部分（反射镜，活动杆，支撑臂和可移动梳齿电极），并且适于在平行于基板的片材表面的方向上移位;固定部分形成并固定地安装在基板上，以及铰链，每个铰链的相对端连接到可动部分和固定部分，并且假设两个在弯曲中相反的弯曲条件，铰链有效地将可动部件保持在两个位置，当它承担弯曲状态时的自我保持动作。衬底形成有在铰链的可移动范围上相对于铰链的相对表面设置的壁表面。铰链和设置在其相对侧的壁表面之间的间隔在铰链处于两个弯曲条件（制造时假定的初始条件）之一时沿着铰链的长度方向的每个点处彼此相等。这消除了在制造期间在湿蚀刻操作之后的干燥步骤期间的液体可以仅保留在铰链的一侧上以使铰链被保持被吸引到壁表面的不便。

14. 发明授权

US07973373B2 Microminiature moving device 有权
标题翻译：微型移动装置
公开(公告)号：US07973373B2
公开(公告)日：2011-07-05
申请号：US12315363
申请日：2008-12-01
申请人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
发明人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
IPC分类号： H01L27/14
CPC分类号： B81C1/00825 , B81B7/0029 , B81B2201/045 , B81B2203/033 , G02B26/0841 , Y10T29/49 , Y10T29/49002 , Y10T307/865
摘要： A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single -crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.
摘要翻译：微型移动装置设置在单晶硅衬底上，可移动元件如可移动杆和可移动梳状电极可平行移动到衬底表面，固定部分固定固定在单晶硅衬底上绝缘层夹在中间。在单晶硅衬底的不存在固定部分并且可移动部件位于凹部上方的表面区域中形成凹陷。凹陷形成足够大的间隙，以防止异物引起可动部件的短路和故障。

15. 发明授权

US07582497B2 Method of manufacturing micro-optic device 失效
公开(公告)号：US07582497B2
公开(公告)日：2009-09-01
申请号：US12070931
申请日：2008-02-22
申请人： Yoshichika Kato , Satoshi Yoshida , Keiichi Mori , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
发明人： Yoshichika Kato , Satoshi Yoshida , Keiichi Mori , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
IPC分类号： H01L21/00
CPC分类号： G02B6/3584 , B81B3/0083 , B81B2201/045 , B81C1/00182 , G02B6/122 , G02B6/136 , G02B6/3514 , G02B6/3518 , G02B6/3546 , G02B6/357 , G02B6/3596 , G02B26/0841
摘要： A micro-optic device including a complicate structure and a movable mirror is made to be manufactured in a reduced length of time. A silicon substrate and a single crystal silicon device layer with an intermediate layer of silicon dioxide interposed therebetween defines a substrate on which a layer of mask material is formed and is patterned to form a mask having the same pattern as the configuration of the intended optical device as viewed in plan view. A surface which is to be constricted as a mirror surface is chosen to be in a plane of the silicon crystal. Using the mask, the device layer is vertically etched by a reactive ion dry etching until the intermediate layer is exposed. Subsequently, using KOH solution, a wet etching which is anisotropic to the crystallographic orientation is performed with an etching rate which is on the order of 0.1 μm/min for a time interval on the order of ten minutes is performed to convert the sidewall surface of the mirror into a smooth crystallographic surface. Subsequently, the intermediate layer is selectively subject to a wet etching to remove the intermediate layer only in an area located below the movable part of the optical device.

16. 发明授权

US07476948B2 Microminiature moving device and method of making the same 失效
标题翻译：微型移动装置及其制作方法
公开(公告)号：US07476948B2
公开(公告)日：2009-01-13
申请号：US11069184
申请日：2005-02-28
申请人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
发明人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
IPC分类号： H01L29/82
CPC分类号： B81C1/00825 , B81B7/0029 , B81B2201/045 , B81B2203/033 , G02B26/0841 , Y10T29/49 , Y10T29/49002 , Y10T307/865
摘要： In a microminiature moving device that has disposed, on a single-crystal silicon substrate, movable elements (a movable rod 46, a movable comb electrode 49, etc.) displaceable in parallel to the substrate surface and stationary parts (a stationary part 40a, etc.), the stationary parts are fixedly secured to the single-crystal silicon substrate 61 with an insulating layer 62 sandwiched therebetween, and depressions 64 are formed in those surface regions of the single-crystal silicon substrate 61 where no stationary parts are present, and the movable parts are positioned above the depressions 64. The depressions 64 form gaps 50 large enough to prevent foreign bodies from causing troubles such as malfunction of the movable parts and shoring.
摘要翻译：在微单元移动装置中，在单晶硅基板上设置可移动的元件（可动杆46，活动梳状电极49等），其可平行于基板表面和静止部分（静止部分40a，等等）时，固定部分被固定地固定在单晶硅衬底61上，绝缘层62夹在它们之间，在单晶硅衬底61的不存在静止部分的那些表面区域形成凹陷64，并且可动部件位于凹部64的上方。凹部64形成足够大的间隙50，以防止异物引起诸如可移动部件和支撑件的故障的麻烦。

17. 发明授权

US07476561B2 Method of making microminiature moving device 失效
标题翻译：制作微型移动装置的方法
公开(公告)号：US07476561B2
公开(公告)日：2009-01-13
申请号：US11407468
申请日：2006-04-19
申请人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
发明人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
IPC分类号： H01L21/00
CPC分类号： B81C1/00825 , B81B7/0029 , B81B2201/045 , B81B2203/033 , G02B26/0841 , Y10T29/49 , Y10T29/49002 , Y10T307/865
摘要： In a microminiature moving device that has disposed, on a single-crystal silicon substrate, movable elements (a movable rod 46, a movable comb electrode 49, etc.) displaceable in parallel to the substrate surface and stationary parts (a stationary part 40a, etc.), the stationary parts are fixedly secured to the single-crystal silicon substrate 61 with an insulating layer 62 sandwiched therebetween, and depressions 64 are formed in those surface regions of the single-crystal silicon substrate 61 where no stationary parts are present, and the movable parts are positioned above the depressions 64. The depressions 64 form gaps 50 large enough to prevent foreign bodies from causing troubles such as malfunction of the movable parts and shoring.
摘要翻译：在微单元移动装置中，在单晶硅基板上设置可移动的元件（可动杆46，活动梳状电极49等），其可平行于基板表面和静止部分（静止部分40a，等等）时，固定部分被固定地固定在单晶硅衬底61上，绝缘层62夹在它们之间，在单晶硅衬底61的不存在静止部分的那些表面区域形成凹陷64，并且可动部件位于凹部64的上方。凹部64形成足够大的间隙50，以防止异物引起诸如可移动部件和支撑件的故障的麻烦。

18. 发明申请

US20060186498A1 Microminiature moving device and method of making the same 失效
标题翻译：微型移动装置及其制作方法
公开(公告)号：US20060186498A1
公开(公告)日：2006-08-24
申请号：US11407468
申请日：2006-04-19
申请人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
发明人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
IPC分类号： H01L21/00 , H01L27/14
CPC分类号： B81C1/00825 , B81B7/0029 , B81B2201/045 , B81B2203/033 , G02B26/0841 , Y10T29/49 , Y10T29/49002 , Y10T307/865
摘要： In a microminiature moving device that has disposed, on a single-crystal silicon substrate, movable elements (a movable rod 46, a movable comb electrode 49, etc.) displaceable in parallel to the substrate surface and stationary parts (a stationary part 40a, etc.), the stationary parts are fixedly secured to the single-crystal silicon substrate 61 with an insulating layer 62 sandwiched therebetween, and depressions 64 are formed in those surface regions of the single-crystal silicon substrate 61 where no stationary parts are present, and the movable parts are positioned above the depressions 64. The depressions 64 form gaps 50 large enough to prevent foreign bodies from causing troubles such as malfunction of the movable parts and shoring.
摘要翻译：在微单元移动装置中，在单晶硅基板上设置可移动的元件（可移动的杆46，可移动梳状电极49等），其可平行于基底表面和静止部分（静止部分40a 等），固定部分被固定地固定在单晶硅衬底61上，绝缘层62夹在它们之间，在单晶硅衬底61的不存在固定部分的那些表面区域形成凹陷64 并且可动部件位于凹部64的上方。凹陷64形成足够大的间隙50，以防止异物引起诸如可移动部件和支撑件的故障的麻烦。

19. 发明申请

US20070253045A1 Optical switch 失效
标题翻译：光开关
公开(公告)号：US20070253045A1
公开(公告)日：2007-11-01
申请号：US11789771
申请日：2007-04-24
申请人： Yoshichika Kato , Yoshihiko Hamada , Keiichi Mori , Osamu Imaki , Kenji Kondou
发明人： Yoshichika Kato , Yoshihiko Hamada , Keiichi Mori , Osamu Imaki , Kenji Kondou
IPC分类号： G02B26/08
CPC分类号： G02B6/3514 , G02B6/3518 , G02B6/352 , G02B6/355 , G02B6/357 , G02B6/3584
摘要： An optical switch, wherein the first and second output ports (optical fibers) are disposed on the opposite sides of the input port (optical fiber) so as to form acute angles with respect to the input port, the input port and the first output port are optically coupled to each other through a first mirror surface, and the input port and the second output port are optically coupled to each other through a second mirror surface. The incident angles of an incident light beam with respect to the mirror surfaces are equalized, and optical path lengths between the input port and the first and second output ports are equalized. The actuator inserts and withdraws the second mirror surface on a position at the front of the first mirror surface.
摘要翻译：一种光开关，其中第一和第二输出端口（光纤）设置在输入端口（光纤）的相对侧上，以便相对于输入端口，输入端口和第一输出端口形成锐角通过第一镜面彼此光学耦合，并且输入端口和第二输出端口通过第二镜面彼此光学耦合。入射光束相对于镜面的入射角度相等，输入端口与第一和第二输出端口之间的光程长度相等。致动器在第一镜面前部的位置处插入和撤回第二镜面。

20. 发明申请

US20070086698A1 Optical switch 有权
标题翻译：光开关
公开(公告)号：US20070086698A1
公开(公告)日：2007-04-19
申请号：US11580599
申请日：2006-10-13
申请人： Yoshichika Kato , Keiichi Mori , Kenji Kondou , Osamu Imaki , Yoshihiko Hamada
发明人： Yoshichika Kato , Keiichi Mori , Kenji Kondou , Osamu Imaki , Yoshihiko Hamada
IPC分类号： G02B6/26 , G02B6/42
CPC分类号： G02B6/352 , G02B6/3514 , G02B6/355 , G02B6/357 , G02B6/358 , G02B26/0841
摘要： The end parts of three optical waveguide parts are supported, mutually in parallel, on a substrate, the end part of the center optical waveguide part being one input port and the end parts of other two optical waveguide parts being a first and a second output port, the emitted light from the input port is switched, by means of a first moving mirror and a second moving mirror which are switchingly inserted into positions having the same distance from the end face of the input port, to either the first output port side or the second output port side, the light from the first moving mirror and the light from the second moving mirror being reflected respectively in a first fixed mirror or a second fixed mirror, the light being respectively coupled to the first or the second output port.
摘要翻译：三个光波导部分的端部相互并联地支撑在基板上，中心光波导部分的端部是一个输入端口，另外两个光波导部分的端部是第一和第二输出端口通过第一移动反射镜和第二移动反射镜将来自输入端口的发射光切换到与输入端口的端面相同距离的位置切换到第一输出端口侧或第二输入端口侧第二输出端口侧，来自第一移动镜的光和来自第二移动镜的光分别被反射在第一固定镜或第二固定镜中，所述光分别耦合到第一输出端口或第二输出端口。

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