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11. 发明授权

US08408503B2 Stage apparatus 有权
标题翻译：舞台装置
公开(公告)号：US08408503B2
公开(公告)日：2013-04-02
申请号：US12712566
申请日：2010-02-25
申请人： Yasuzo Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami , Makoto Takahashi , Shinya Ito
发明人： Yasuzo Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami , Makoto Takahashi , Shinya Ito
IPC分类号： A47K1/04
CPC分类号： B65G7/04
摘要： A stage apparatus enables easy position alignment at a real installation site. Mounts 25 having sub base plates 21 arranged thereon are provided on carriages 25 and thereby constitute sub mounting tables 20a to 20d; and the mounts 25 are fixed to a main mounting table 10 having a main base plate 11. The positions of main base plate 11 and sub base plates 21 are aligned with each other by adjustment mechanisms 30 provided on the sub mounting tables 20a to 20d. As main positioning members 16 and sub positioning members 241, 242 are arranged on the main mounting table 10 and sub mounting tables 20a to 20d, separation can be performed so that a state of position alignment is restorable. Accordingly, position alignment is easy when assembling after transportation.
摘要翻译：舞台装置可以在真正的安装地点轻松进行位置对准。安装在其上的副基板21的安装件25设置在滑架25上，从而构成副安装台20a至20d; 并且安装件25固定到具有主底板11的主安装台10.主底板11和副底板21的位置通过设置在副安装台20a至20d上的调节机构30彼此对准。由于主定位构件16和副定位构件241,242布置在主安装台10和副安装台20a至20d上，因此可以进行分离，使得可以恢复位置对准的状态。因此，运输后组装时的位置对准容易。

12. 发明授权

US08100524B2 Stage apparatus 有权
标题翻译：舞台装置
公开(公告)号：US08100524B2
公开(公告)日：2012-01-24
申请号：US12712579
申请日：2010-02-25
申请人： Yasuzo Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami , Makoto Takahashi , Shinya Ito
发明人： Yasuzo Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami , Makoto Takahashi , Shinya Ito
IPC分类号： B41J2/01
CPC分类号： B65H1/00 , B41J11/06 , B65H2405/312 , B65H2701/11312 , B65H2801/15
摘要： A stage apparatus that achieves a high accuracy in assembling and enables easy work at a real installation site. In a stage apparatus of the present invention, sub rails are arranged on respective sub base plates, which are connected respectively with the first and second main rails on a main base plate to extend the first and second main rails. Accordingly, when the sub base plates are fixed to the main base plate 11 with positional alignment performed therebetween, the accuracy in positional alignment of the sub base plates which has already been fixed to the main base plate is not affected.
摘要翻译：一种在组装中实现高精度并能够在真实安装现场方便工作的平台装置。在本发明的舞台装置中，副导轨布置在相应的副底板上，它们分别与主底板上的第一和第二主导轨连接以延伸第一和第二主导轨。因此，当子基板在其间进行位置对准而固定到主基板11上时，已经固定到主底板的副基板的位置对准精度不受影响。

13. 发明申请

US20090092467A1 Stage apparatus 审中-公开
标题翻译：舞台装置
公开(公告)号：US20090092467A1
公开(公告)日：2009-04-09
申请号：US11989646
申请日：2007-02-23
申请人： Yasuzou Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami
发明人： Yasuzou Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami
IPC分类号： H01L21/677
CPC分类号： H01L21/682 , G03F7/70716 , G03F7/70975
摘要： To enable division for transportation and secure proper treatment on a substrate to be treated, the present invention provides a stage apparatus (11) including a substrate holding plane which holds a substrate to be treated, a pair of guide frames (13X1), (13X2) oppositely disposed with the substrate holding plane sandwiched therebetween, and a gantry (13Y) which is movably held on upper surfaces of the pair of guide frames (13X1), (13X2). The stage apparatus (11) is composed of a first structure V1 which includes one guide frame (13X1), a second structure V2 which includes the other guide frame (13X2), and a third structure V3 which includes the gantry (13Y). Thus, even if the stage apparatus is large, since it can be divided into the structures V1 to V3, the stage apparatus can be transported by land. In addition, since there are no joints on a moving path of the gantry (13Y), the stage apparatus can properly treat the substrate without causing deterioration of moving accuracy.
摘要翻译：为了能够进行运输分割并确保正确处理的基板，本发明提供了一种台架装置（11），其包括保持要处理的基板的基板保持平面，一对引导框架（13X1），（13X2））和夹持在基板保持平面之间的相对设置的台架（13Y），可移动地保持在一对引导框架（13X1），（13X2）的上表面上的台架（13Y）。舞台装置（11）由包括一个引导框架（13X1）的第一结构V1，包括另一引导框架（13X2）的第二结构V2和包括台架（13Y）的第三结构V3组成。因此，即使舞台装置大，由于可以分为结构V1〜V3，所以舞台装置能够陆陆运送。此外，由于在台架（13Y）的移动路径上没有接头，所以台架装置可以适当地处理基板而不会导致移动精度的劣化。

14. 发明申请

US20070285609A1 Spacer Forming Method and Spacer Forming Apparatus 有权
标题翻译：间隔成型方法和间隔成型装置
公开(公告)号：US20070285609A1
公开(公告)日：2007-12-13
申请号：US10586064
申请日：2005-10-18
申请人： Yasuzo Tanaka , Masao Murata , Junpei Yuyama , Hiroshi Koshina , Hiroto Uchida , Koji Hane , Takanori Tsuji , Mitsuru Yahagi
发明人： Yasuzo Tanaka , Masao Murata , Junpei Yuyama , Hiroshi Koshina , Hiroto Uchida , Koji Hane , Takanori Tsuji , Mitsuru Yahagi
IPC分类号： G02F1/1339 , B41J29/38
CPC分类号： G02F1/1303 , G02F1/13394 , G02F2203/69
摘要： To provide a spacer forming method by which spacers can be securely formed in a predetermined region on a substrate. Ink containing granular spacers is jetted onto a crossing portion of a black matrix 5 in the shape of lattice. Red pixel R, green pixel G and blue pixel B are formed in the openings of the lattice. The spacer containing ink is jetted onto the spacer forming positions from the nozzle by the ink jetting method. Plural drops of ink 7 are jetted onto each of the spacer forming positions on one of the opposite substrate E. The gap between the opposite substrates can be securely maintained at constant for filling liquid crystal.
摘要翻译：为了提供一种间隔物形成方法，通过该间隔物可以在衬底上的预定区域中可靠地形成间隔物。将含有颗粒状间隔物的油墨喷射到格子形状的黑色矩阵5的交叉部分上。红色像素R，绿色像素G和蓝色像素B形成在格子的开口中。通过喷墨法将含有墨的间隔物从喷嘴喷射到间隔物形成位置上。将多个墨滴7喷射到相对基板E中的一个上的间隔物形成位置的每个上。可以将相对的基板之间的间隙牢固地保持恒定以填充液晶。

15. 发明授权

US08348384B2 Rotational adjustment apparatus for inkjet coating head 有权
标题翻译：喷墨涂装头旋转调节装置
公开(公告)号：US08348384B2
公开(公告)日：2013-01-08
申请号：US13055196
申请日：2010-03-04
申请人： Seiichi Sato , Mitsuru Yahagi
发明人： Seiichi Sato , Mitsuru Yahagi
IPC分类号： B41J23/00
CPC分类号： B41J29/38 , B41J25/003
摘要： There is provided a small-sized and inexpensive rotational adjustment apparatus for a linearly moveable inkjet coating head 6 without providing a rotary mechanism which is separate from and independent of a linear movement mechanism. The apparatus is capable of performing a rotational adjustment, about a rotary axis in a Z-axis direction, of the inkjet coating head in which the Z-axis direction is orthogonal to an X-axis direction which is a direction of movement of the coating head. The apparatus has: first and second moveable bodies, two in total, which are linearly moved by separate driving sources in the X-axis direction; and a converting mechanism which converts the inkjet coating head into a linear movement in the X-axis direction when the first and second moveable bodies synchronously move in the X-axis direction, and into a rotary movement, about the rotary axis of the inkjet coating head, when both the first and the second moveable bodies make a relative movement in the X-axis direction.
摘要翻译：提供了一种用于可直线移动的喷墨涂覆头6的小型和便宜的旋转调节装置，而不提供与线性运动机构分离并独立于其的旋转机构。该装置能够沿着Z轴方向与作为涂层的移动方向的X轴方向正交的喷墨涂布头进行围绕Z轴方向的旋转轴的旋转调整头。该装置具有：第一和第二可移动体，总共两个，它们在X轴方向上由单独的驱动源线性移动; 以及转换机构，当第一和第二可移动体在X轴方向上同步移动时，将喷墨涂布头在X轴方向上转换成线性运动，并且围绕喷墨涂层的旋转轴旋转运动当第一和第二可移动体都在X轴方向上相对移动时，头部。

16. 发明申请

US20110122193A1 ROTATIONAL ADJUSTMENT APPARATUS FOR INKJET COATING HEAD 有权
标题翻译：喷漆涂装头旋转调节装置
公开(公告)号：US20110122193A1
公开(公告)日：2011-05-26
申请号：US13055196
申请日：2010-03-04
申请人： Seiichi Sato , Mitsuru Yahagi
发明人： Seiichi Sato , Mitsuru Yahagi
IPC分类号： B41J23/00
CPC分类号： B41J29/38 , B41J25/003
摘要： There is provided a small-sized and inexpensive rotational adjustment apparatus for a linearly moveable inkjet coating head 6 without providing a rotary mechanism which is separate from and independent of a linear movement mechanism. The apparatus is capable of performing a rotational adjustment, about a rotary axis in a Z-axis direction, of the inkjet coating head in which the Z-axis direction is orthogonal to an X-axis direction which is a direction of movement of the coating head. The apparatus has: first and second moveable bodies, two in total, which are linearly moved by separate driving sources in the X-axis direction; and a converting mechanism which converts the inkjet coating head into a linear movement in the X-axis direction when the first and second moveable bodies synchronously move in the X-axis direction, and into a rotary movement, about the rotary axis of the inkjet coating head, when both the first and the second moveable bodies make a relative movement in the X-axis direction.
摘要翻译：提供了一种用于可直线移动的喷墨涂覆头6的小型和便宜的旋转调节装置，而不提供与线性运动机构分离并独立于其的旋转机构。该装置能够沿着Z轴方向与作为涂层的移动方向的X轴方向正交的喷墨涂布头进行围绕Z轴方向的旋转轴的旋转调整头。该装置具有：第一和第二可移动体，总共两个，它们在X轴方向上由单独的驱动源线性移动; 以及转换机构，当第一和第二可移动体在X轴方向上同步移动时，将喷墨涂布头在X轴方向上转换成线性运动，并且围绕喷墨涂层的旋转轴旋转运动当第一和第二可移动体都在X轴方向上相对移动时，头部。

17. 发明申请

US20110062641A1 STAGE EQUIPPED WITH ALIGNMENT FUNCTION, PROCESSING APPARATUS HAVING THE STAGE EQUIPPED WITH ALIGNMENT FUNCTION, AND METHOD OF ALIGNING SUBSTRATE 审中-公开
标题翻译：具有对准功能的装置，具有对准功能的装置的处理装置，以及对准基板的方法
公开(公告)号：US20110062641A1
公开(公告)日：2011-03-17
申请号：US12991993
申请日：2009-06-03
申请人： Seiichi Sato , Mitsuru Yahagi , Hirofumi Minami , Kazuhiro Musha , Makoto Takahashi
发明人： Seiichi Sato , Mitsuru Yahagi , Hirofumi Minami , Kazuhiro Musha , Makoto Takahashi
IPC分类号： B25B11/00
CPC分类号： H01L21/68785 , B65G49/061 , B65G49/065 , B65G49/067 , B65G2249/045 , H01L21/68 , H01L21/6838
摘要： There is provided an inexpensive stage which is equipped with an alignment function and is capable of easily performing high-accuracy alignment especially in a θ direction even in case an object to be processed is large in weight. The stage equipped with an alignment function has a stage main body for holding a substrate while leaving a processing surface thereof open to access. The stage is provided with: a suction means capable of sucking that surface of the substrate which lies opposite to the processing surface; a gas supply means for supplying a gas to such a region of the substrate as is other than a portion sucked by the suction means; and a drive means to give a rotating force to the suction means so that the substrate can be rotated on the same plane by causing the suction means to serve as the center of rotation.
摘要翻译：提供了具有对准功能的廉价的台阶，并且能够容易地执行高精度对准，特别是在＆thetas中; 即使在待处理物体重的情况下也是如此。具有对准功能的平台具有用于保持基板的台主体，同时保持其打开以进入的处理表面。该台设置有能够吸附与处理面相对的基板的表面的吸引装置; 气体供给装置，用于将除了由所述抽吸装置吸附的部分以外的气体供给到所述基板的所述区域; 以及驱动装置，用于向抽吸装置施加旋转力，使得通过使抽吸装置作为旋转中心，基板能够在同一平面上旋转。

18. 发明授权

US08167417B2 Discharge unit and discharge apparatus 有权
标题翻译：放电单元和放电装置
公开(公告)号：US08167417B2
公开(公告)日：2012-05-01
申请号：US13074633
申请日：2011-03-29
申请人： Takahiro Miyata , Masao Murata , Satoshi Shiba , Hirofumi Minami , Seiichi Satou , Kazuhiro Musha , Mitsuru Yahagi , Jyunpei Yuyama
发明人： Takahiro Miyata , Masao Murata , Satoshi Shiba , Hirofumi Minami , Seiichi Satou , Kazuhiro Musha , Mitsuru Yahagi , Jyunpei Yuyama
IPC分类号： B41J2/17
CPC分类号： B41J2/17596 , B41J2/17556
摘要： The backing pressure of an ink tank is controlled. The ink tank is connected to a pressure control apparatus. The pressure control apparatus has first and second check valves. When the internal pressure of the ink tank becomes smaller than that of outside atmosphere by a first predetermined pressure or more, the first check valve is switched into an open state to connect the outside atmosphere and the ink tank. To the contrary, when the internal pressure of the ink tank becomes larger than that of outside atmosphere by a second predetermined pressure or more, the second check valve is switched to an open state to connect the ink tank with the outside atmosphere. Therefore, the internal pressure of the ink tank is controlled precisely enough to stabilize the meniscus.
摘要翻译：控制墨水罐的背压。墨水罐连接到压力控制装置。压力控制装置具有第一和第二止回阀。当墨罐的内部压力变得比外部气氛的内部压力小于第一预定压力以上时，第一止回阀被切换到打开状态以连接外部气氛和墨水罐。相反，当墨水罐的内部压力变得比外部气氛的内部压力大于第二预定压力以上时，第二止回阀被切换到打开状态以将墨水罐与外部气氛连接。因此，墨水罐的内部压力被精确地控制以稳定弯液面。

19. 发明申请

US20110211026A1 PRINT HEAD, PRINTER 审中-公开
标题翻译：打印头，打印机
公开(公告)号：US20110211026A1
公开(公告)日：2011-09-01
申请号：US13085760
申请日：2011-04-13
申请人： Takahiro Miyata , Masao Murata , Satoshi Shiba , Mitsuru Yahagi , Jyunpei Yuyama
发明人： Takahiro Miyata , Masao Murata , Satoshi Shiba , Mitsuru Yahagi , Jyunpei Yuyama
IPC分类号： B41J2/045
CPC分类号： B41J2/14274 , B41J2/055 , B41J2002/14403 , B41J2002/14419 , B41J2202/09 , H01L51/0005
摘要： Vibration is prevented from being transmitted via a common ink chamber or a fixed substrate. A porous member is disposed between the common ink chamber and a pressure generation chamber so that a discharge liquid passes through the interior of the porous member to move from the common ink chamber to the pressure generation chamber. Vibration generated in one pressure generation chamber is attenuated through the porous member when the vibration is transmitted to another pressure generation chamber via the common ink chamber; and thus, no cross-talk is generated. Furthermore, when piezoelectric vibrators having different lengths are mounted on the same fixed substrate and have the resonance frequencies different from each other, vibration is not transmitted to another pressure generation chamber via the fixed substrate and the piezoelectric vibrator; and therefore, the cross-talk is much less likely to be generated.
摘要翻译：防止振动通过公共墨水室或固定基板传输。多孔构件设置在公共墨室和压力产生室之间，使得排出液体通过多孔构件的内部，以从共用墨室移动到压力产生室。当振动通过公共墨水室传递到另一个压力产生室时，在一个压力产生室中产生的振动通过多孔构件衰减; 因此不产生串扰。此外，当具有不同长度的压电振动器安装在相同的固定基板上并且谐振频率彼此不同时，振动不会经由固定基板和压电振动器传递到另一个压力产生室; 因此，串扰不太可能产生。

20. 发明申请

US20110211027A1 PRINT HEAD, PRINTER 审中-公开
标题翻译：打印头，打印机
公开(公告)号：US20110211027A1
公开(公告)日：2011-09-01
申请号：US13085779
申请日：2011-04-13
申请人： Takahiro Miyata , Masao Murata , Satoshi Shiba , Mitsuru Yahagi , Jyunpei Yuyama
发明人： Takahiro Miyata , Masao Murata , Satoshi Shiba , Mitsuru Yahagi , Jyunpei Yuyama
IPC分类号： B41J2/045
CPC分类号： B41J2/14274 , B41J2002/14419 , B41J2202/09
摘要： Vibration is prevented from being transmitted via a fixed substrate. In order to set the resonance frequencies of the vibration of piezoelectric vibrators to be different from each other, the piezoelectric vibrators having different lengths are attached to the same fixed substrate. Even if residual vibration of a pressure generation chamber, which is expanded/contracted by a piezoelectric vibrator to which a voltage is applied, is transmitted to the fixed substrate; and even if the vibration is transmitted to another piezoelectric vibrator via the fixed substrate; another piezoelectric vibrator does not vibrate because the resonance frequencies between the piezoelectric vibrators are different from each other. Consequently, the pressure generation chamber in contact with the piezoelectric vibrator is not expanded or contracted by the vibration.
摘要翻译：防止振动通过固定基板传递。为了将压电振动器的振动的共振频率设定为不同，将具有不同长度的压电振动器安装在同一固定基板上。即使由施加有电压的压电振动器进行膨胀/收缩的压力产生室的残留振动传递到固定基板; 并且即使振动经由固定基板传递到另一个压电振动器; 另一个压电振动器由于压电振动器之间的谐振频率彼此不同而不振动。因此，与压电振动器接触的压力产生室不会因振动而膨胀或收缩。

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