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    • 11. 发明授权
    • Determining calibration parameters for a lithographic process
    • 确定光刻工艺的校准参数
    • US08849008B2
    • 2014-09-30
    • US13608776
    • 2012-09-10
    • Xin ZhouYaogang LianRobert E. Gleason
    • Xin ZhouYaogang LianRobert E. Gleason
    • G06K9/00G03F7/20
    • G03F7/705G03F7/70516G03F7/70641
    • A technique for determining a set of calibration parameters for use in a model of a photo-lithographic process is described. In this calibration technique, images of a test pattern that was produced using the photo-lithographic process are used to determine corresponding sets of calibration parameters. These images are associated with at least three different focal planes in an optical system, such as a photo-lithographic system that implements the photo-lithographic process. Moreover, an interpolation function is determined using the sets of calibration parameters. This interpolation function can be used to determine calibration parameters at an arbitrary focal plane in the photo-lithographic system for use in simulations of the photolithographic process, where the set of calibration parameters are used in a set of transmission cross coefficients in the model of the photo-lithographic process.
    • 描述了用于确定用于光刻工艺的模型中的一组校准参数的技术。 在该校准技术中,使用使用光刻工艺制作的测试图案的图像来确定相应的校准参数组。 这些图像与光学系统中的至少三个不同的焦平面相关联,例如实现光刻工艺的光刻系统。 此外,使用校准参数集来确定内插函数。 该内插函数可以用于确定光刻系统中的任意焦平面处的校准参数,以用于光刻工艺的模拟,其中在一组模拟中的传输交叉系数中使用该组校准参数 光刻工艺。
    • 13. 发明申请
    • System and method for sharing multiple network resources on stand-alone machine
    • 在独立机器上共享多个网络资源的系统和方法
    • US20140164625A1
    • 2014-06-12
    • US14234210
    • 2011-10-18
    • Xin Zhou
    • Xin Zhou
    • H04L12/911
    • H04L47/78H04L67/00H04L67/06H04L69/14
    • The disclosure discloses a system and method for sharing multiple network resources on a stand-alone machine. The system includes: a task managing subsystem configured to receive a downloading task, acquire a task parameter, divide the downloading task into M downloading subtasks and allocate the M downloading subtasks respectively to respective network equipments, merge downloaded messages after the respective downloading subtasks are completed, and report the merged message; an equipment managing subsystem configured to maintain an equipment status of each network equipment and provide an equipment parameter; a protocol managing subsystem configured to encapsulate a downloading request and send the downloading request to a route managing subsystem, receive and parse a message sent by the route managing subsystem, and store the parsed message in a corresponding memory space; and the route managing subsystem configured to maintain a route table, forward the downloading request to a network side via a corresponding network equipment, and send a message returned by the network side to the protocol managing subsystem. By integrating multiple network equipments on the stand-alone machine, the disclosure achieves sharing of multiple network resources, maximizing utilization of network resources of the stand-alone machine, which meets the demand of a high-speed network application.
    • 本公开公开了一种用于在独立机器上共享多个网络资源的系统和方法。 该系统包括:任务管理子系统,被配置为接收下载任务,获取任务参数,将下载任务划分为M个下载子任务,并将M个下载子任务分别分配给各个网络设备,在相应的下载子任务完成后合并下载的消息 并报告合并信息; 配置为维护每个网络设备的设备状态并提供设备参数的设备管理子系统; 配置为封装下载请求并将所述下载请求发送到路由管理子系统,接收并解析由所述路由管理子系统发送的消息并将解析的消息存储在对应的存储器空间中的协议管理子系统; 所述路由管理子系统被配置为维护路由表,经由相应的网络设备将所述下载请求转发到网络侧,并将由所述网络侧返回的消息发送到所述协议管理子系统。 通过在独立机器上集成多个网络设备,实现共享多个网络资源,最大限度地利用独立机器的网络资源,满足高速网络应用的需求。
    • 15. 发明申请
    • SPATIAL MAP OF MASK-PATTERN DEFECTS
    • 掩模图缺陷的空间图
    • US20130152026A1
    • 2013-06-13
    • US13313957
    • 2011-12-07
    • Jun PENGGuoqiang BaiXin Zhou
    • Jun PENGGuoqiang BaiXin Zhou
    • G06F17/50
    • G03F1/36G03F1/70
    • A technique for providing information about defects in a mask pattern is described. In this technique, defects in the mask pattern may be determined based on differences between a calculated pattern produced at an image plane in the photolithographic process, when the mask pattern, illuminated by an associated source pattern, is at an object plane in the photolithographic process, and a target pattern that excludes the defects. Then the defect information may be provided to the user, such as a spatial map of the determined defects, where the spatial map is associated with at least the portion of the mask pattern.
    • 描述了一种用于提供关于掩模图案中的缺陷的信息的技术。 在这种技术中,掩模图案中的缺陷可以基于当在光刻工艺中由相关源图案照亮的掩模图案处于物平面时在光刻工艺中在像平面处产生的计算图案之间的差异来确定 ,以及排除缺陷的目标模式。 然后可以向用户提供缺陷信息,例如确定的缺陷的空间图,其中空间图与至少掩模图案的该部分相关联。
    • 17. 发明申请
    • Determining Calibration Parameters For a Lithographic Process
    • 确定平版印刷工艺的校准参数
    • US20130004056A1
    • 2013-01-03
    • US13608776
    • 2012-09-10
    • Xin ZhouYaogang LianRobert E. Gleason
    • Xin ZhouYaogang LianRobert E. Gleason
    • G06K9/00
    • G03F7/705G03F7/70516G03F7/70641
    • A technique for determining a set of calibration parameters for use in a model of a photo-lithographic process is described. In this calibration technique, images of a test pattern that was produced using the photo-lithographic process are used to determine corresponding sets of calibration parameters. These images are associated with at least three different focal planes in an optical system, such as a photo-lithographic system that implements the photo-lithographic process. Moreover, an interpolation function is determined using the sets of calibration parameters. This interpolation function can be used to determine calibration parameters at an arbitrary focal plane in the photo-lithographic system for use in simulations of the photolithographic process, where the set of calibration parameters are used in a set of transmission cross coefficients in the model of the photo-lithographic process.
    • 描述了用于确定用于光刻工艺的模型中的一组校准参数的技术。 在该校准技术中,使用使用光刻工艺制作的测试图案的图像来确定相应的校准参数组。 这些图像与光学系统中的至少三个不同的焦平面相关联,例如实现光刻工艺的光刻系统。 此外,使用校准参数集来确定内插函数。 该内插函数可以用于确定光刻系统中的任意焦平面处的校准参数,以用于光刻工艺的模拟,其中在一组模拟中的传输交叉系数中使用该组校准参数 光刻工艺。
    • 18. 发明申请
    • Method and system for synchronizing data between QUALCOMM platform terminal and PC side
    • 高通平台终端和PC端同步数据的方法和系统
    • US20120296956A1
    • 2012-11-22
    • US13574742
    • 2010-10-12
    • Jianfei YuXin Zhou
    • Jianfei YuXin Zhou
    • G06F15/16
    • H04L67/1095G06F9/547H04W24/06
    • The present disclosure discloses a method for synchronizing data between a Qualcomm platform terminal and a Personal Computer (PC) side, which comprises the following steps: the DIAG module of the Qualcomm platform terminal receives a request packet from the PC side, converts the request packet into a pseudo request packet, and transmits the pseudo request packet to an application layer module of the Qualcomm platform terminal via an Original Equipment Manufacturer (OEM) layer module of the Qualcomm platform terminal; the application layer module fills a pseudo response packet according to the pseudo request packet transmitted from the OEM layer module and then transmits the pseudo response packet to the DIAG module via the OEM layer module; and the DIAG module converts the pseudo response packet transmitted from the OEM layer module into a real response packet and then transmits the real response packet to the PC side. The present disclosure also discloses a system for synchronizing data between a Qualcomm platform terminal and a PC side. In the present disclosure, the implementations of a bottom layer and an application layer are not mixed together any more, which reduces code coupling degree, avoids the occurrence of a fault in a data synchronization process and facilitate the extension of new functions.
    • 本公开公开了一种在Qualcomm平台终端和个人计算机(PC)侧之间同步数据的方法,包括以下步骤:高通平台终端的DIAG模块从PC端接收请求分组,转换请求分组 并通过高通平台终端的原始设备制造商(OEM)层模块将伪请求包发送到高通平台终端的应用层模块; 应用层模块根据从OEM层模块发送的伪请求报文填充伪响应报文,然后通过OEM层模块将伪响应报文发送给DIAG模块; 并且DIAG模块将从OEM层模块发送的伪应答包转换成真实响应包,然后将真实响应包发送到PC端。 本公开还公开了一种用于在Qualcomm平台终端和PC侧之间同步数据的系统。 在本公开中,底层和应用层的实现不再混合在一起,这降低了代码耦合度,避免了数据同步过程中的故障的发生并且促进了新功能的扩展。
    • 19. 发明授权
    • Displaying web pages without downloading static files
    • 显示网页而不下载静态文件
    • US08291312B1
    • 2012-10-16
    • US13413376
    • 2012-03-06
    • Xin Zhou
    • Xin Zhou
    • G06F17/00G06F15/177
    • G06F17/30902G06F17/30893H04L41/0809H04L43/16H04L67/06
    • A computing device is configured to receive a configuration file. The configuration filed includes at least one reference to a static file associated with a web page of a website. The static file is ranked as a most-downloaded static file, of a plurality of static files, by a provider of the configuration file and the website. The computing device is further configured to retrieve the static file based on the reference; store the static file in a memory local to the computing device; receive a request for the web page; identify the static file for the web page; and use the static file to display the web page in a browser associated with the computing device.
    • 计算设备被配置为接收配置文件。 配置文件包括至少一个对与网站的网页相关联的静态文件的引用。 该静态文件由配置文件和网站的提供者排列为多个静态文件中最多下载的静态文件。 所述计算设备还被配置为基于所述参考来检索所述静态文件; 将静态文件存储在计算设备本地的内存中; 接收网页的请​​求; 识别网页的静态文件; 并使用静态文件在与计算设备相关联的浏览器中显示网页。
    • 20. 发明授权
    • Determining calibration parameters for a lithographic process
    • 确定光刻工艺的校准参数
    • US08285030B2
    • 2012-10-09
    • US12724362
    • 2010-03-15
    • Xin ZhouYaogang LianRobert E. Gleason
    • Xin ZhouYaogang LianRobert E. Gleason
    • G06K9/00
    • G03F7/705G03F7/70516G03F7/70641
    • A technique for determining a set of calibration parameters for use in a model of a photo-lithographic process is described. In this calibration technique, images of a test pattern that was produced using the photo-lithographic process are used to determine corresponding sets of calibration parameters. These images are associated with at least three different focal planes in an optical system, such as a photo-lithographic system that implements the photo-lithographic process. Moreover, an interpolation function is determined using the sets of calibration parameters. This interpolation function can be used to determine calibration parameters at an arbitrary focal plane in the photo-lithographic system for use in simulations of the photo-lithographic process, where the set of calibration parameters are used in a set of transmission cross coefficients in the model of the photo-lithographic process.
    • 描述了用于确定用于光刻工艺的模型中的一组校准参数的技术。 在该校准技术中,使用使用光刻工艺制作的测试图案的图像来确定相应的校准参数组。 这些图像与光学系统中的至少三个不同的焦平面相关联,例如实现光刻工艺的光刻系统。 此外,使用校准参数集来确定内插函数。 该内插函数可以用于确定光刻系统中的任意焦平面处的校准参数,以用于光刻工艺的模拟,其中在一组模型中的传输交叉系数中使用该组校准参数 的光刻工艺。