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    • 14. 发明授权
    • Multi-step landing micro-mirror, method for manufacturing the same and multi-step landing micro-mirror array
    • 多步登陆微镜,制造相同和多步登陆微镜阵列的方法
    • US06922270B2
    • 2005-07-26
    • US10735669
    • 2003-12-16
    • Moon Youn JungChi Hoon JunChang Auck ChoiYun Tae Kim
    • Moon Youn JungChi Hoon JunChang Auck ChoiYun Tae Kim
    • B81B3/00G02B26/08
    • G02B26/0841B81B3/0062B81B2201/042Y10S359/904
    • A multi-step landing micro-mirror, a method for manufacturing the same, and a multi-step landing micro-mirror array are disclosed. The multi-step landing micro-mirror comprises a trench formed in a substrate and having N−1 steps in one side wall thereof; N plates rotated in or on the trench; and 2N springs for connecting the plates to each other; wherein the N plates are composed of an outermost first plate, a second plate connected with the first plate by the spring and located in the first plate, . . . , and a N-th plate connected with a (N−1)-th plate by the spring and located in the (N−1)-th plate, wherein when voltages are applied to the N plates and the trench, respectively, the first plate is subjected to a first landing with a predetermined rotation angle on a first step of the trench due to the constant voltage, the second plate is subjected to a second landing with the predetermined rotation angle on a second step of the trench, . . . , the N-th plate is subjected to a N-th landing with the predetermined rotation angle on the other side wall of the trench. Accordingly, the low voltage driving can be performed by performing the multi-step driving during the electrostatic force is applied, the elastic force of the spring for supporting the mirror can be enhanced, therefore the reliability of the optical switch can be improved.
    • 公开了一种多步着陆微镜,其制造方法以及多台阶着陆微镜阵列。 多台阶着陆微反射镜包括形成在基板中并在其一个侧壁中具有N-1个台阶的沟槽; N个板在沟槽中或沟槽上旋转; 和2N弹簧,用于将板彼此连接; 其中所述N个板由最外面的第一板,通过弹簧与所述第一板连接并位于所述第一板中的第二板组成。 。 。 以及通过弹簧与第(N-1)板连接并位于(N-1)板中的第N板,其中当分别向N个板和沟槽施加电压时, 第一板由于恒定的电压在沟槽的第一台阶上以预定的旋转角度进行第一次着陆,第二板在沟槽的第二台阶上以预定的旋转角进行第二次着陆。 。 。 第N个板在沟槽的另一个侧壁上以预定的旋转角进行第N次着陆。 因此,通过在施加静电力的同时进行多级驱动,可以进行低压驱动,可以提高用于支撑反射镜的弹簧的弹力,从而可以提高光开关的可靠性。