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11. 发明申请

US20090230088A1 FORMING A PRINT HEAD WITH A THIN MEMBRANE 审中-公开
标题翻译：形成具有薄膜的打印头
公开(公告)号：US20090230088A1
公开(公告)日：2009-09-17
申请号：US12471670
申请日：2009-05-26
申请人： Andreas Bibl , Zhenfang Chen , Jeffrey Birkmeyer
发明人： Andreas Bibl , Zhenfang Chen , Jeffrey Birkmeyer
IPC分类号： B41J2/16
CPC分类号： B41J2/14233 , B41J2/155 , B41J2/1609 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1639 , B41J2/1642 , B41J2/1646 , B41J2002/14403 , B41J2202/20
摘要： A microfabricated device and method for forming a microfabricated device are described. A thin membrane including silicon is formed on a silicon body by bonding a silicon-on-insulator substrate to a silicon substrate. The handle and insulator layers of the silicon-on-insulator substrate are removed, leaving a thin membrane of silicon bonded to a silicon body such that no intervening layer of insulator material remains between the membrane and the body. A piezoelectric layer is bonded to the membrane.
摘要翻译：描述了一种用于形成微加工装置的微制造装置和方法。通过将绝缘体硅衬底粘合到硅衬底上，在硅体上形成包括硅的薄膜。去除绝缘体上硅衬底的手柄和绝缘体层，留下结合到硅体的硅薄膜，使得膜和体之间不存在中间绝缘体材料层。压电层与膜结合。

12. 发明申请

US20070259468A1 Processing Piezoelectric Material 有权
标题翻译：加工压电材料
公开(公告)号：US20070259468A1
公开(公告)日：2007-11-08
申请号：US11744124
申请日：2007-05-03
申请人： Zhenfang Chen , Jeffrey Birkmeyer
发明人： Zhenfang Chen , Jeffrey Birkmeyer
IPC分类号： H01L21/00
CPC分类号： H01L41/337 , H01L41/313 , Y10T29/42 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49155
摘要： Techniques are described for forming actuators having piezoelectric material. A block of piezoelectric material is bonded to a transfer substrate. The block is then polished. The polished surface is bonded to a MEMS body.
摘要翻译：描述了用于形成具有压电材料的致动器的技术。一块压电材料结合到转印衬底上。然后将该块抛光。抛光表面结合到MEMS体。

13. 发明申请

US20110109694A1 Thermal Oxide Coating On A Fluid Ejector 有权
标题翻译：流体喷射器上的热氧化物涂层
公开(公告)号：US20110109694A1
公开(公告)日：2011-05-12
申请号：US12614356
申请日：2009-11-06
申请人： Zhenfang Chen , Gregory DeBrabander
发明人： Zhenfang Chen , Gregory DeBrabander
IPC分类号： B41J2/16 , B32B7/00
CPC分类号： B41J2/14233 , B41J2/1606 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1642
摘要： A fluid ejection module includes a flow-path body, a first oxide layer, a membrane, and a second oxide layer. The flow-path body has a first outer surface and an opposing second outer surface and a plurality of flow paths, each flow path extending at least from the first outer surface to the second outer surface. The first oxide layer coats at least an interior surface of each of the flow paths and the first and second outer surfaces of the flow-path body and has a thickness that varies by less than 5% along {100} planes. The membrane has a first outer surface. The second oxide layer is coated on the first outer surface of the membrane and has a thickness that varies by less than 5% along {100} planes and is bonded to the first oxide layer.
摘要翻译：流体喷射模块包括流路主体，第一氧化物层，膜和第二氧化物层。流路主体具有第一外表面和相对的第二外表面和多个流动通道，每个流动通道至少从第一外表面延伸到第二外表面。第一氧化物层涂覆至少每个流路的内表面和流动通道体的第一和第二外表面，并且具有沿{100}平面变化小于5％的厚度。膜具有第一外表面。第二氧化物层被涂覆在膜的第一外表面上，并且具有沿{100}面变化小于5％的厚度并且结合到第一氧化物层。

14. 发明申请

US20060028508A1 Print head nozzle formation 有权
公开(公告)号：US20060028508A1
公开(公告)日：2006-02-09
申请号：US10913571
申请日：2004-08-05
申请人： Zhenfang Chen , Andreas Bibl , Paul Hoisington
发明人： Zhenfang Chen , Andreas Bibl , Paul Hoisington
IPC分类号： B41J2/16
CPC分类号： B41J2/1623 , B41J2/162 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1645
摘要： Techniques are provided for forming nozzles in a microelectromechanical device. The nozzles are formed in a layer prior to the layer being bonded onto another portion of the device. Forming the nozzles in the layer prior to bonding enables forming nozzles that have a desired depth and a desired geometry. Selecting a particular geometry for the nozzles can reduce the resistance to ink flow as well as improve the uniformity of the nozzles across the microelectromechanical device.

15. 发明授权

US08377319B2 Print head nozzle formation 有权
标题翻译：打印头喷嘴形成
公开(公告)号：US08377319B2
公开(公告)日：2013-02-19
申请号：US12027597
申请日：2008-02-07
申请人： Zhenfang Chen , Andreas Bibl , Paul A. Hoisington
发明人： Zhenfang Chen , Andreas Bibl , Paul A. Hoisington
IPC分类号： G01D15/00
CPC分类号： B41J2/1623 , B41J2/162 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1645
摘要： Techniques are provided for forming nozzles in a microelectromechanical device. The nozzles are formed in a layer prior to the layer being bonded onto another portion of the device. Forming the nozzles in the layer prior to bonding enables forming nozzles that have a desired depth and a desired geometry. Selecting a particular geometry for the nozzles can reduce the resistance to ink flow as well as improve the uniformity of the nozzles across the microelectromechanical device.
摘要翻译：提供了用于在微机电装置中形成喷嘴的技术。在将层粘合到装置的另一部分之前，喷嘴形成在一层中。在接合之前在层中形成喷嘴可以形成具有期望深度和期望几何形状的喷嘴。为喷嘴选择特定的几何形状可以降低油墨流动的阻力，并且提高喷嘴在整个微机电装置上的均匀性。

16. 发明申请

US20080128387A1 Print Head Nozzle Formation 有权
标题翻译：打印头喷嘴形成
公开(公告)号：US20080128387A1
公开(公告)日：2008-06-05
申请号：US12027597
申请日：2008-02-07
申请人： Zhenfang Chen , Andreas Bibl , Paul A. Hoisington
发明人： Zhenfang Chen , Andreas Bibl , Paul A. Hoisington
IPC分类号： G11B5/127
CPC分类号： B41J2/1623 , B41J2/162 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1645
摘要： Techniques are provided for forming nozzles in a microelectromechanical device. The nozzles are formed in a layer prior to the layer being bonded onto another portion of the device. Forming the nozzles in the layer prior to bonding enables forming nozzles that have a desired depth and a desired geometry. Selecting a particular geometry for the nozzles can reduce the resistance to ink flow as well as improve the uniformity of the nozzles across the microelectromechanical device.
摘要翻译：提供了用于在微机电装置中形成喷嘴的技术。在将层粘合到装置的另一部分之前，喷嘴形成在一层中。在接合之前在层中形成喷嘴可以形成具有期望深度和期望几何形状的喷嘴。为喷嘴选择特定的几何形状可以降低油墨流动的阻力，并且提高喷嘴在整个微机电装置上的均匀性。

17. 发明授权

US07267260B2 Apparatus for holding a fiber array 有权
标题翻译：用于保持光纤阵列的装置
公开(公告)号：US07267260B2
公开(公告)日：2007-09-11
申请号：US10687113
申请日：2003-10-15
申请人： Steven S. Nasiri , Janusz Liberkowski , Zhenfang Chen , Jeff Jarfa
发明人： Steven S. Nasiri , Janusz Liberkowski , Zhenfang Chen , Jeff Jarfa
IPC分类号： B23K35/14
CPC分类号： G02B6/3644 , G02B6/32 , G02B6/3672 , G02B6/3692 , G02B6/3833 , G02B6/3834 , G02B6/4248
摘要： Optical fibers are inserted and bonded in a two dimensional array of feedthroughs provided by an insert having a top plate, a bottom plate and a sandwiched spacer plate. Top and bottom plate feature funnel shaped hole sections that capture the approaching fiber end during its insertion. The funnel sections terminate in narrow hole sections that tightly hold the inserted fiber ends. Having top and bottom plate spaced apart provides for high angular precision of the bonded fiber ends with minimal fabrication effort of the insert. Optical fibers may be combined in linear arrays and simultaneously inserted significantly reducing assembly efforts. The insert is attached to a fiber housing and hermetically sealed within an external housing, which features a glass plate to provide beam propagation to and from the fiber ends. An optical gel fills the gap between the insert's output face and the glass plate.
摘要翻译：将光纤插入并结合在由具有顶板，底板和夹持间隔板的插入件提供的馈通的二维阵列中。顶板和底板都具有漏斗形孔部分，在其插入期间捕获接近光纤端。漏斗部分终止于紧密地保持插入的光纤端部的窄孔部分。具有间隔开的顶板和底板，以最小的插入件制造工作提供了粘合的纤维端部的高角度精度。光纤可以以线性阵列组合，并同时显着地减少组装工作。插入件附接到纤维壳体并气密地密封在外部壳体内，其具有玻璃板以提供光纤传播到光纤端和从纤维端传播。光学凝胶填充插入件的输出面和玻璃板之间的间隙。

18. 发明授权

US07347532B2 Print head nozzle formation 有权
标题翻译：打印头喷嘴形成
公开(公告)号：US07347532B2
公开(公告)日：2008-03-25
申请号：US10913571
申请日：2004-08-05
申请人： Zhenfang Chen , Andreas Bibl , Paul A. Hoisington
发明人： Zhenfang Chen , Andreas Bibl , Paul A. Hoisington
IPC分类号： B41J2/14 , B41J2/16
CPC分类号： B41J2/1623 , B41J2/162 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1645
摘要： Techniques are provided for forming nozzles in a microelectromechanical device. The nozzles are formed in a layer prior to the layer being bonded onto another portion of the device. Forming the nozzles in the layer prior to bonding enables forming nozzles that have a desired depth and a desired geometry. Selecting a particular geometry for the nozzles can reduce the resistance to ink flow as well as improve the uniformity of the nozzles across the microelectromechanical device.
摘要翻译：提供了用于在微机电装置中形成喷嘴的技术。在将层粘合到装置的另一部分之前，喷嘴形成在一层中。在接合之前在层中形成喷嘴可以形成具有期望深度和期望几何形状的喷嘴。为喷嘴选择特定的几何形状可以降低油墨流动的阻力，并且提高喷嘴在整个微机电装置上的均匀性。

19. 发明授权

US06823127B2 Apparatus for holding a fiber array 有权
标题翻译：用于保持光纤阵列的装置
公开(公告)号：US06823127B2
公开(公告)日：2004-11-23
申请号：US10236471
申请日：2002-09-05
申请人： Steven S. Nasiri , Janusz Liberkowski , Zhenfang Chen , Jeff Jarfa
发明人： Steven S. Nasiri , Janusz Liberkowski , Zhenfang Chen , Jeff Jarfa
IPC分类号： G02B600
CPC分类号： G02B6/3644 , G02B6/32 , G02B6/3672 , G02B6/3692 , G02B6/3833 , G02B6/3834 , G02B6/4248
摘要： Optical fibers are inserted and bonded in a two dimensional array of feedthroughs provided by an insert having a top plate, a bottom plate and a sandwiched spacer plate. Top and bottom plate feature funnel shaped hole sections that capture the approaching fiber end during its insertion. The funnel sections terminate in narrow hole sections that tightly hold the inserted fiber ends. Having top and bottom plate spaced apart provides for high angular precision of the bonded fiber ends with minimal fabrication effort of the insert. Optical fibers may be combined in linear arrays and simultaneously inserted significantly reducing assembly efforts. The insert is attached to a fiber housing and hermetically sealed within an external housing, which features a glass plate to provide beam propagation to and from the fiber ends. An optical gel fills the gap between the insert's output face and the glass plate.
摘要翻译：将光纤插入并结合在由具有顶板，底板和夹持间隔板的插入件提供的馈通的二维阵列中。顶板和底板都具有漏斗形孔部分，在其插入期间捕获接近光纤端。漏斗部分终止于紧密地保持插入的光纤端部的窄孔部分。具有间隔开的顶板和底板，以最小的插入件制造工作提供了粘合的纤维端部的高角度精度。光纤可以以线性阵列组合，并同时显着地减少组装工作。插入件附接到纤维壳体并气密地密封在外部壳体内，其具有玻璃板以提供光纤传播到光纤端和从纤维端传播。光学凝胶填充插入件的输出面和玻璃板之间的间隙。

20. 发明授权

US08210649B2 Thermal oxide coating on a fluid ejector 有权
标题翻译：流体喷射器上的热氧化物涂层
公开(公告)号：US08210649B2
公开(公告)日：2012-07-03
申请号：US12614356
申请日：2009-11-06
申请人： Zhenfang Chen , Gregory Debrabander
发明人： Zhenfang Chen , Gregory Debrabander
IPC分类号： B41J2/14 , B41J2/16
CPC分类号： B41J2/14233 , B41J2/1606 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1642
摘要： A fluid ejection module includes a flow-path body, a first oxide layer, a membrane, and a second oxide layer. The flow-path body has a first outer surface and an opposing second outer surface and a plurality of flow paths, each flow path extending at least from the first outer surface to the second outer surface. The first oxide layer coats at least an interior surface of each of the flow paths and the first and second outer surfaces of the flow-path body and has a thickness that varies by less than 5% along {100} planes. The membrane has a first outer surface. The second oxide layer is coated on the first outer surface of the membrane and has a thickness that varies by less than 5% along {100} planes and is bonded to the first oxide layer.
摘要翻译：流体喷射模块包括流路主体，第一氧化物层，膜和第二氧化物层。流路主体具有第一外表面和相对的第二外表面和多个流动通道，每个流动通道至少从第一外表面延伸到第二外表面。第一氧化物层涂覆至少每个流路的内表面和流动通道体的第一和第二外表面，并且具有沿{100}平面变化小于5％的厚度。膜具有第一外表面。第二氧化物层被涂覆在膜的第一外表面上，并且具有沿{100}面变化小于5％的厚度并且结合到第一氧化物层。

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