会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 13. 发明授权
    • Sub-lithographic diffractive MEMS
    • 亚光刻衍射MEMS
    • US08638490B1
    • 2014-01-28
    • US12905352
    • 2010-10-15
    • Alexander P. Payne
    • Alexander P. Payne
    • G02B26/00
    • G02B26/0841G02B26/0808
    • A diffractive MicroElectroMechanical systems and a method of fabricating the same are provided. In one embodiment, the method comprises: depositing a sacrificial layer onto a substrate; depositing a first structural layer on the sacrificial layer and patterning the structural layer to form a patterned structural layer including plurality of actuators; conformably depositing a sacrificial film on the patterned structural layer; depositing a second structural layer on the sacrificial film; planarizing the second structural layer to expose the sacrificial film and the plurality of actuators; and removing the sacrificial layer and sacrificial film to release the plurality of actuators, each of the plurality of actuators separated from the second structural layer by a thickness of the conformal sacrificial film. Other embodiments are also provided.
    • 提供了一种衍射微电子机械系统及其制造方法。 在一个实施例中,该方法包括:在衬底上沉积牺牲层; 在牺牲层上沉积第一结构层并图案化结构层以形成包括多个致动器的图案化结构层; 在图案化的结构层上顺应地沉积牺牲膜; 在所述牺牲膜上沉积第二结构层; 平面化第二结构层以暴露牺牲膜和多个致动器; 并且去除所述牺牲层和牺牲膜以释放所述多个致动器,所述多个致动器中的每一个致动器与所述第二结构层分离所述共形牺牲膜的厚度。 还提供了其他实施例。
    • 14. 发明授权
    • MEMS devices with increased damping for suspended movable structures
    • 具有增加用于悬浮活动结构的阻尼的MEMS装置
    • US07215461B1
    • 2007-05-08
    • US11213135
    • 2005-08-26
    • Omar S. LeungAlexander P. Payne
    • Omar S. LeungAlexander P. Payne
    • G02B26/00G02B27/44
    • G02B26/0841
    • In one embodiment, a light modulator includes a substrate and a number of modulator elements disposed above and spaced apart from the substrate. Each modulator element has an optically active portion adapted to receive light incident thereon, and a support portion on either side of the active portion to support the modulator element above the substrate. The modulator elements include at least one deflectable modulator element. To shorten damping time, the deflectable modulator element has a lower surface in the support portion that is closer to the substrate than a lower surface under the optically active portion.
    • 在一个实施例中,光调制器包括衬底和设置在衬底上方并与衬底间隔开的多个调制器元件。 每个调制器元件具有适于接收入射到其上的光的光学活性部分和在有源部分的任一侧上的支撑部分,以将调制器元件支撑在衬底上。 调制器元件包括至少一个可偏转调制器元件。 为了缩短阻尼时间,可偏转调制器元件在支撑部分中具有比光学活性部分下的下表面更靠近基板的下表面。