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    • 12. 发明申请
    • THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME
    • 薄膜沉积装置及使用其制造有机发光显示装置的方法
    • US20110045617A1
    • 2011-02-24
    • US12862153
    • 2010-08-24
    • Hee-Cheol KANGHyun-Sook ParkJae-Kwang RyuYong-Sup CholYun-Ml LeeSang-Soo Kim
    • Hee-Cheol KANGHyun-Sook ParkJae-Kwang RyuYong-Sup CholYun-Ml LeeSang-Soo Kim
    • H01L33/26C23C16/44
    • C23C14/044C23C14/12C23C14/243C23C14/568H01L51/001H01L51/0081H01L51/56Y10S414/135Y10T279/23
    • A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, an a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body. The plurality of chambers are maintained in a vacuum state. The at least one thin film deposition assembly is located in at least one of the plurality of chambers, is separated from the substrate by a predetermined distance, and is used to form a thin film on the substrate supported by the electrostatic chuck. The carrier is used to move the electrostatic chuck to pass through the plurality of chambers. The first power source plug is installed to be attachable to and detachable from one of the power source holes in order to supply power to the electrode. The first power source plug is installed at an upstream of a path in which the electrostatic chuck is moved by the carrier. The second power source plug is installed to be attachable to and detachable from another of the power source holes in order to supply power to the electrode. The second power source plug is installed in the path to be downstream to the first power source plug with respect to the path.
    • 一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。 薄膜沉积设备包括静电卡盘,多个腔室; 至少一个薄膜沉积组件; 承运人 第一个电源插头; 和第二电源插头。 静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体,其中基板是沉积靶; 电极,其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。 多个室保持在真空状态。 所述至少一个薄膜沉积组件位于所述多个室中的至少一个室中,与所述衬底分离预定距离,并且用于在由所述静电吸盘支撑的所述衬底上形成薄膜。 载体用于移动静电卡盘以通过多个室。 第一电源插头被安装成可以从电源孔之一附接和拆卸,以向电极供电。 第一电源插头安装在静电卡盘由载体移动的路径的上游。 第二电源插头被安装成可以与另一个电源孔相连接和拆卸,以向电极供电。 第二电源插头安装在相对于路径到第一电源插头的下游的路径中。
    • 13. 发明授权
    • Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
    • 薄膜沉积装置及使用该有机发光显示装置的方法
    • US08137466B2
    • 2012-03-20
    • US12862153
    • 2010-08-24
    • Hee-Cheol KangHyun-Sook ParkJae-Kwang RyuYong-Sup ChoiYun-Mi LeeSang-Soo Kim
    • Hee-Cheol KangHyun-Sook ParkJae-Kwang RyuYong-Sup ChoiYun-Mi LeeSang-Soo Kim
    • C23C16/00C23F1/00H01L21/306
    • C23C14/044C23C14/12C23C14/243C23C14/568H01L51/001H01L51/0081H01L51/56Y10S414/135Y10T279/23
    • A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, an a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body. The plurality of chambers are maintained in a vacuum state. The at least one thin film deposition assembly is located in at least one of the plurality of chambers, is separated from the substrate by a predetermined distance, and is used to form a thin film on the substrate supported by the electrostatic chuck. The carrier is used to move the electrostatic chuck to pass through the plurality of chambers. The first power source plug is installed to be attachable to and detachable from one of the power source holes in order to supply power to the electrode. The first power source plug is installed at an upstream of a path in which the electrostatic chuck is moved by the carrier. The second power source plug is installed to be attachable to and detachable from another of the power source holes in order to supply power to the electrode. The second power source plug is installed in the path to be downstream to the first power source plug with respect to the path.
    • 一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。 薄膜沉积设备包括静电卡盘,多个腔室; 至少一个薄膜沉积组件; 承运人 第一个电源插头; 和第二电源插头。 静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体,其中基板是沉积靶; 电极,其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。 多个室保持在真空状态。 所述至少一个薄膜沉积组件位于所述多个室中的至少一个室中,与所述衬底分离预定距离,并且用于在由所述静电吸盘支撑的所述衬底上形成薄膜。 载体用于移动静电卡盘以通过多个室。 第一电源插头被安装成可以从电源孔之一附接和拆卸,以向电极供电。 第一电源插头安装在静电卡盘由载体移动的路径的上游。 第二电源插头被安装成可以与另一个电源孔相连接和拆卸,以向电极供电。 第二电源插头安装在相对于路径到第一电源插头的下游的路径中。
    • 20. 发明授权
    • Organic layer deposition apparatus
    • 有机层沉积装置
    • US08951610B2
    • 2015-02-10
    • US13467998
    • 2012-05-09
    • Uno ChangJae-Kwang Ryu
    • Uno ChangJae-Kwang Ryu
    • C23C16/52C23C14/12C23C14/04C23C14/54H01L51/00
    • C23C14/12C23C14/042C23C14/54H01L51/0008
    • An organic layer deposition apparatus that may be precisely aligned with a substrate during a deposition process. The apparatus includes: a deposition source; a deposition source nozzle unit; and a patterning slit sheet, which is spaced from and smaller than the substrate, and having a plurality of patterning slits arranged in a second direction perpendicular to the first direction. Deposition is performed while the substrate is moved relative to the deposition apparatus in the first direction. The patterning slit sheet includes first and second alignment marks that are spaced from each other. The substrate includes first and second alignment patterns that are spaced from each other. The deposition apparatus also includes first and second camera assemblies for respectively photographing the first alignment mark/pattern and the second alignment mark/pattern. A moving speed of the substrate is synchronized with shooting speeds of the first and second camera assemblies.
    • 一种有机层沉积设备,其可以在沉积工艺期间精确地与衬底对准。 该装置包括:沉积源; 沉积源喷嘴单元; 以及与基板间隔开并且小于基板的图案化缝隙片,并且具有沿垂直于第一方向的第二方向布置的多个图案化狭缝。 在基板沿着第一方向相对于沉积装置移动时执行沉积。 图案化缝隙片包括彼此间隔开的第一和第二对准标记。 衬底包括彼此间隔开的第一和第二对准图案。 沉积设备还包括用于分别拍摄第一对准标记/图案和第二对准标记/图案的第一和第二相机组件。 基板的移动速度与第一和第二相机组件的拍摄速度同步。