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11. 发明授权

US07482750B2 Plasma extraction microcavity plasma device and method 有权
标题翻译：等离子体提取微腔等离子体装置及方法
公开(公告)号：US07482750B2
公开(公告)日：2009-01-27
申请号：US11344514
申请日：2006-01-31
申请人： J. Gary Eden , Sung-Jin Park
发明人： J. Gary Eden , Sung-Jin Park
IPC分类号： H01J17/49
CPC分类号： G01N21/73 , G01N21/6404 , H05H1/2406 , H05H2001/2412
摘要： A preferred embodiment plasma extraction microcavity plasma device generates a spatially-confined plasma in a gas or vapor, or gas and vapor mixture, including, for example, atmospheric pressure air. A microcavity plasma device is excited by a potential applied between excitation electrodes of the microcavity plasma device, and a probe electrode proximate the microcavity is maintained at the potential of one of the electrodes, extracts plasma from the microcavity plasma device. In preferred embodiments, the excitation electrodes of the microcavity plasma device are isolated from the plasma by dielectric, and time-varying (AC, RF, bipolar or pulsed DC, etc.) potential excites a plasma that is then extracted by the probe electrode. In alternate embodiments, the microcavity plasma device has an excitation electrode that contacts the plasma. A DC potential excites a plasma that is then extracted by the probe electrode.
摘要翻译：优选的实施方案等离子体提取微腔等离子体装置在气体或蒸汽或气体和蒸汽混合物中产生空间限制的等离子体，包括例如大气压的空气。微腔等离子体装置被施加在微腔等离子体装置的激励电极之间的电位激发，并且靠近微腔的探针电极保持在电极之一的电位，从微腔等离子体装置中提取等离子体。在优选实施例中，微腔等离子体装置的激发电极通过电介质与等离子体隔离，时变（AC，RF，双极或脉冲DC等）电位激发等离子体，然后等离子体被探针电极提取。在替代实施例中，微腔等离子体装置具有接触等离子体的激发电极。 DC电位激发等离子体，然后由探针电极提取。

12. 发明授权

US07297041B2 Method of manufacturing microdischarge devices with encapsulated electrodes 有权
标题翻译：具有封装电极的微放电器件的制造方法
公开(公告)号：US07297041B2
公开(公告)日：2007-11-20
申请号：US10958174
申请日：2004-10-04
申请人： J. Gary Eden , Sung-Jin Park
发明人： J. Gary Eden , Sung-Jin Park
IPC分类号： H01J9/00
CPC分类号： H01J17/04 , H01J9/02
摘要： A method for fabricating dielectric encapsulated electrodes. The process includes anodizing a metal to form a dielectric layer with columnar micropores; dissolving a portion of the dielectric layer and then anodizing the resultant structure a second time. The nanoporous structure that results can provide properties superior to those of conventional dielectric encapsulated metals. The pores of the dielectric may be backfilled with one or more materials to further tailor the properties of the dielectric.
摘要翻译：一种制造电介质密封电极的方法。该方法包括阳极氧化金属以形成具有柱状微孔的介电层; 溶解电介质层的一部分，然后第二次阳极氧化所得结构。导致的纳米多孔结构可提供优于常规电介质包封金属的性质。电介质的孔可以用一种或多种材料回填以进一步调整电介质的性质。

13. 发明申请

US20070108910A1 Plasma extraction microcavity plasma device and method 有权
标题翻译：等离子体提取微腔等离子体装置及方法
公开(公告)号：US20070108910A1
公开(公告)日：2007-05-17
申请号：US11344514
申请日：2006-01-31
申请人： J. Gary Eden , Sung-Jin Park
发明人： J. Gary Eden , Sung-Jin Park
IPC分类号： H01J61/04
CPC分类号： G01N21/73 , G01N21/6404 , H05H1/2406 , H05H2001/2412
摘要： A preferred embodiment plasma extraction microcavity plasma device generates a spatially-confined plasma in a gas or vapor, or gas and vapor mixture, including, for example, atmospheric pressure air. A microcavity plasma device is excited by a potential applied between excitation electrodes of the microcavity plasma device, and a probe electrode proximate the microcavity is maintained at the potential of one of the electrodes, extracts plasma from the microcavity plasma device. In preferred embodiments, the excitation electrodes of the microcavity plasma device are isolated from the plasma by dielectric, and time-varying (AC, RF, bipolar or pulsed DC, etc.) potential excites a plasma that is then extracted by the probe electrode. In alternate embodiments, the microcavity plasma device has an excitation electrode that contacts the plasma. A DC potential excites a plasma that is then extracted by the probe electrode.
摘要翻译：优选的实施方案等离子体提取微腔等离子体装置在气体或蒸汽或气体和蒸汽混合物中产生空间限制的等离子体，包括例如大气压的空气。微腔等离子体装置被施加在微腔等离子体装置的激励电极之间的电位激发，并且靠近微腔的探针电极保持在电极之一的电位，从微腔等离子体装置提取等离子体。在优选实施例中，微腔等离子体装置的激发电极通过电介质与等离子体隔离，时变（AC，RF，双极或脉冲DC等）电位激发等离子体，然后等离子体被探针电极提取。在替代实施例中，微腔等离子体装置具有接触等离子体的激发电极。 DC电位激发等离子体，然后由探针电极提取。

14. 发明授权

US06828730B2 Microdischarge photodetectors 失效
标题翻译：微放电光电探测器
公开(公告)号：US06828730B2
公开(公告)日：2004-12-07
申请号：US10306632
申请日：2002-11-27
申请人： J. Gary Eden , Sung-Jin Park
发明人： J. Gary Eden , Sung-Jin Park
IPC分类号： H01J4000
CPC分类号： H01J47/00 , H01J17/40
摘要： A microdischarge photodetector has a photocathode, an insulator and an anode. A cavity of limited size is disposed in the insulator and filled with gas. A voltage applied between the photocathode and the anode produces a plasma. Light incident on the photocathode having photon energies larger than about the work function produces photoelectrons are ejected from the photocathode and accelerated by the plasma electric field. The incident light is detected by detecting an increase in the plasma current or light emission from the plasma. The cavity may be flat or tapered and is designed to optimize detector performance.
摘要翻译：微放电光电检测器具有光电阴极，绝缘体和阳极。有限尺寸的空腔设置在绝缘体中并充满气体。施加在光电阴极和阳极之间的电压产生等离子体。入射到具有大于工作功能的光子能量的光电子的光产生光电子从光电阴极喷出并被等离子体电场加速。通过检测等离子体电流的增加或来自等离子体的发光来检测入射光。空腔可以是平坦的或锥形的，并且被设计成优化检测器的性能。

15. 发明授权

US06563257B2 Multilayer ceramic microdischarge device 有权
公开(公告)号：US06563257B2
公开(公告)日：2003-05-13
申请号：US09753242
申请日：2000-12-29
申请人： Bruce A. Vojak , J. Gary Eden , Sung-Jin Park , Clark Wagner
发明人： Bruce A. Vojak , J. Gary Eden , Sung-Jin Park , Clark Wagner
IPC分类号： H01J1900
CPC分类号： H01J17/04 , H01J17/06
摘要： A discharge device of the invention includes multiple bonded ceramic layers with electrodes formed between the layers. It can be combined with the various MCIC technologies to produce myriad useful devices. Contacts are made to the electrodes, which may be grouped in different arrangements. The electrodes contact a hole through some or all of the ceramic layers to define a discharge cavity. Different groupings of the electrodes will produce different types of discharge. Alternating the electrodes in interdigitated pairs permits an arbitrary extension of the discharge cavity length. Having consecutive anodes or cathodes permits formation of regions where electrons may cool. Another device of the invention includes a multilayer ceramic structure having a hole formed in a least one outer layer through an electrode on the outer side of the layer and in contact with an electrode between two layers. A contact is formed to the electrode between layers through any remaining layers in the multilayer ceramic structure.

16. 发明申请

US20110181169A1 MICROCAVITY AND MICROCHANNEL PLASMA DEVICE ARRAYS IN A SINGLE, UNITARY SHEET 有权
标题翻译：微阵列和微通道等离子体装置阵列
公开(公告)号：US20110181169A1
公开(公告)日：2011-07-28
申请号：US12991237
申请日：2009-05-14
申请人： J. Gary Eden , Sung-Jin Park , Taek-Lim Kim , Kwang-Soo Kim
发明人： J. Gary Eden , Sung-Jin Park , Taek-Lim Kim , Kwang-Soo Kim
IPC分类号： H05H1/24 , C25D11/02
CPC分类号： H05H1/24 , H01J11/36 , H01J61/86 , H05H1/2406 , H05H2001/2418
摘要： An array of microcavity plasma devices is formed in a unitary sheet of oxide with embedded microcavities or microchannels and embedded metal driving electrodes isolated by oxide from the microcavities or microchannels and arranged so as to generate sustain a plasma in the embedded microcavities or microchannels upon application of time-varying voltage when a plasma medium is contained in the microcavities or microchannels.
摘要翻译：微腔等离子体装置的阵列形成在具有嵌入的微腔或微通道的一体的氧化物片和由微腔或微通道中的氧化物隔离的嵌入的金属驱动电极中，并且被布置成在施加了微腔或微通道时在嵌入的微腔或微通道中产生维持等离子体当等离子体介质包含在微通道或微通道中时，具有时变电压。

17. 发明申请

US20100296978A1 MICROCHANNEL LASER HAVING MICROPLASMA GAIN MEDIA 有权
标题翻译：具有微波增益介质的MICROCHANNEL激光
公开(公告)号：US20100296978A1
公开(公告)日：2010-11-25
申请号：US12682977
申请日：2008-10-27
申请人： Sung-Jin Park , J. Gary Eden , Paoyei Chen , Paul A. Tchertchian , Thomas M. Spinka
发明人： Sung-Jin Park , J. Gary Eden , Paoyei Chen , Paul A. Tchertchian , Thomas M. Spinka
IPC分类号： H01S5/20 , H01S5/187 , B01J19/08
CPC分类号： H01S3/05 , H01S3/03 , H01S3/063 , H01S3/09 , H01S3/0971
摘要： The invention provides microchannel lasers having a microplasma gain medium. Lasers of the invention can be formed in semiconductor materials, and can also be formed in polymer materials. In a microlaser of the invention, high density plasmas are produced in microchannels. The microplasma acts as a gain medium with the electrodes sustaining the plasma in the microchannel. Reflectors are used with the microchannel for obtaining optical feedback to obtain lasing in the microplasma gain medium in devices of the invention for a wide range of atomic and molecular species. Several atomic and molecular gain media will produce sufficiently high gain coefficients that reflectors (mirrors) are not necessary. Microlasers of the invention are based on microplasma generation in channels of various geometries. Preferred embodiment microlaser designs can be fabricated in semiconductor materials, such as Si wafers, by standard photolithographic techniques, or in polymers by replica molding.
摘要翻译：本发明提供了具有微质增益介质的微通道激光器。本发明的激光器可以形成在半导体材料中，也可以形成在聚合物材料中。在本发明的微型激光器中，在微通道中产生高密度等离子体。微量体作为增益介质，其中电极在微通道中维持等离子体。反射器与微通道一起使用以获得光学反馈，以在广泛的原子和分子物种的本发明装置中的微量级增益介质中获得激光。几个原子和分子增益介质将产生足够高的增益系数，反射器（反射镜）不是必需的。本发明的微型扫描器基于各种几何形状的通道中的微量生成。优选实施例微激光器设计可以通过标准光刻技术在半导体材料（例如Si晶片）中或通过复制成型制成聚合物。

18. 发明授权

US07642720B2 Addressable microplasma devices and arrays with buried electrodes in ceramic 有权
标题翻译：可寻址微型器件和阵列，其中埋置电极在陶瓷中
公开(公告)号：US07642720B2
公开(公告)日：2010-01-05
申请号：US11337969
申请日：2006-01-23
申请人： J. Gary Eden , Sung-Jin Park
发明人： J. Gary Eden , Sung-Jin Park
IPC分类号： H01J17/04 , H01J17/49
CPC分类号： H01J11/18 , H05H1/2406 , H05H2001/2418 , H05H2001/2437
摘要： An array of microcavity plasma devices is formed in a ceramic substrate that provides structure for and isolation of an array of microcavities that are defined in the ceramic substrate. The ceramic substrate isolates the microcavities from electrodes disposed within the ceramic substrate. The electrodes are disposed to ignite a discharge in microcavities in the array of microcavities upon application of a time-varying potential between the electrodes. Embodiments of the invention include electrode and microcavity arrangements that permit addressing of individual microcavities or groups of microcavities. The contour of the microcavity wall allows for the electric field within the microcavity to be shaped.
摘要翻译：在陶瓷衬底中形成微腔等离子体器件的阵列，其提供在陶瓷衬底中限定的微腔阵列的结构和隔离。陶瓷衬底将微腔与设置在陶瓷衬底内的电极隔离。电极被设置成在施加电极之间的时变电位时，以微腔阵列中的微腔中点燃放电。本发明的实施例包括允许寻址单个微腔或微腔组的电极和微腔布置。微腔壁的轮廓允许微腔内的电场成形。

19. 发明申请

US20090295288A1 ADDRESSABLE MICROPLASMA DEVICES AND ARRAYS WITH BURIED ELECTRODES IN CERAMIC 有权
标题翻译：可焊接麦克风设备和阵列与陶瓷电极
公开(公告)号：US20090295288A1
公开(公告)日：2009-12-03
申请号：US11337969
申请日：2006-01-23
申请人： J. Gary Eden , Sung-Jin Park
发明人： J. Gary Eden , Sung-Jin Park
IPC分类号： H01J17/49
CPC分类号： H01J11/18 , H05H1/2406 , H05H2001/2418 , H05H2001/2437
摘要： An array of microcavity plasma devices is formed in a ceramic substrate that provides structure for and isolation of an array of microcavities that are defined in the ceramic substrate. The ceramic substrate isolates the microcavities from electrodes disposed within the ceramic substrate. The electrodes are disposed to ignite a discharge in microcavities in the array of microcavities upon application of a time-varying potential between the electrodes. Embodiments of the invention include electrode and microcavity arrangements that permit addressing of individual microcavities or groups of microcavities. The contour of the microcavity wall allows for the electric field within the microcavity to be shaped.
摘要翻译：在陶瓷衬底中形成微腔等离子体器件的阵列，其提供在陶瓷衬底中限定的微腔阵列的结构和隔离。陶瓷衬底将微腔与设置在陶瓷衬底内的电极隔离。电极被设置成在施加电极之间的时变电位时，以微腔阵列中的微腔中点燃放电。本发明的实施例包括允许寻址单个微腔或微腔组的电极和微腔布置。微腔壁的轮廓允许微腔内的电场成形。

20. 发明授权

US08890409B2 Microcavity and microchannel plasma device arrays in a single, unitary sheet 有权
标题翻译：微腔和微通道等离子体器件阵列在单一的单一片材中
公开(公告)号：US08890409B2
公开(公告)日：2014-11-18
申请号：US12991237
申请日：2009-05-14
申请人： J. Gary Eden , Sung-Jin Park , Taek-Lim Kim , Kwang-Soo Kim
发明人： J. Gary Eden , Sung-Jin Park , Taek-Lim Kim , Kwang-Soo Kim
IPC分类号： H01J17/49 , H01J9/26 , H01J9/32 , H05H1/24 , H01J61/86 , H01J11/36
CPC分类号： H05H1/24 , H01J11/36 , H01J61/86 , H05H1/2406 , H05H2001/2418
摘要： An array of microcavity plasma devices is formed in a unitary sheet of oxide with embedded microcavities or microchannels and encapsulated metal driving electrodes isolated by oxide from the microcavities or microchannels and arranged so as to generate sustain a plasma in the embedded microcavities or microchannels upon application of time-varying voltage when a plasma medium is contained in the microcavities or microchannels.
摘要翻译：微腔等离子体装置的阵列形成在具有嵌入的微腔或微通道的一体的氧化物片材中，并且被封装的金属驱动电极由氧化物从微腔或微通道分离，并被布置成在施加了微腔或微通道时在嵌入的微腔或微通道中产生维持等离子体当等离子体介质包含在微通道或微通道中时，具有时变电压。

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