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11. 发明公开

EP2668531A1 METHODS AND SYSTEMS FOR FIBER DELIVERY OF HIGH PEAK POWER OPTICAL PULSES 审中-公开
标题翻译：方法和系统纤维的高性能光学IMPULSE峰分布
公开(公告)号：EP2668531A1
公开(公告)日：2013-12-04
申请号：EP12739586.1
申请日：2012-01-20
申请人： IMRA America, Inc.
发明人： CHO, Gyu Cheon , XU, Jingzhou
IPC分类号： G02B6/02
CPC分类号： H01S3/302 , H01S3/0057 , H01S3/06712 , H01S3/06741 , H01S3/06754 , H01S3/1301 , H01S3/2308 , H01S2301/085
摘要： Methods and systems for delivery of high peak power optical pulses through optical fiber are disclosed. Raman soliton generation is utilized to maintain the properties of the pulses in the delivery fiber. The apparatus can comprise any high peak power pulse source and delivery fiber supporting Raman soliton generation.

12. 发明申请

WO2019023015A1 MULTI-PULSE AMPLIFICATION 审中-公开
公开(公告)号：WO2019023015A1
公开(公告)日：2019-01-31
申请号：PCT/US2018/042654
申请日：2018-07-18
申请人： IMRA AMERICA, INC.
发明人： XU, Jingzhou , HORI, Takashi , SUZUKI, Shigeru , CHO, Gyu, Cheon
IPC分类号： H01S3/00 , H01S3/23
摘要： Chirped pulse amplification (CPA) systems configured to generate and amplify multi-pulses are described. The nonlinear interaction of pulses can generate a multiple pulse pack with a dense time separation between pulses. Reducing or eliminating the nonlinear interaction can be provided by spectrally and/or temporally splitting pulses in the chirped amplification system.

13. 发明申请

WO2013106164A1 METHODS AND SYSTEMS FOR LASER PROCESSING OF COATED SUBSTRATES 审中-公开
标题翻译：涂层基体激光加工方法与系统
公开(公告)号：WO2013106164A1
公开(公告)日：2013-07-18
申请号：PCT/US2012/069825
申请日：2012-12-14
申请人： IMRA AMERICA, INC.
发明人： ARAI, Alan, Y. , CHO, Gyu, Cheon , XU, Jingzhou
IPC分类号： H01S3/30
CPC分类号： H01L21/67092 , B23K26/0006 , B23K26/0057 , B23K26/40 , B23K2203/16 , B23K2203/172 , H01L21/2686 , H01L21/78 , H01L33/0095 , Y10S438/94
摘要： Examples of methods and systems for laser processing of materials are disclosed. Methods and systems for singulation of a wafer comprising a coated substrate can utilize a laser outputting light that has a wavelength that is transparent to the wafer substrate but which may not be transparent to the coating layer(s). Using techniques for managing fluence and focal condition of the laser beam, the coating layer(s) and the substrate material can be processed through ablation and internal modification, respectively. The internal modification can result in die separation.
摘要翻译：公开了激光加工材料的方法和系统的实例。用于单片化包括涂覆的基底的晶片的方法和系统可以利用激光输出具有对于晶片衬底是透明的但对涂层不透明的波长的光。使用技术来管理激光束的注量和聚焦条件，涂层和基材可分别通过烧蚀和内部修饰进行处理。内部修改可导致管芯分离。

14. 发明公开

EP2756342A1 CONTROLLABLE MULTI-WAVELENGTH FIBER LASER SOURCE 有权
标题翻译：具有多波长可控光纤激光器
公开(公告)号：EP2756342A1
公开(公告)日：2014-07-23
申请号：EP12831411.9
申请日：2012-09-06
申请人： IMRA America, Inc.
发明人： XU, Jingzhou , CHO, Gyu Cheon
IPC分类号： G02B6/35 , G02B6/293
CPC分类号： H01S3/06712 , G02B5/3083 , G02F1/353 , G02F1/3544 , G02F2001/3546 , H01S3/0092 , H01S3/067 , H01S3/06754 , H01S3/10053 , H01S3/10061
摘要： In at least one embodiment a laser system includes a fiber laser source, a polarization controller and a wavelength converter. The relative power distribution between a pump wavelength and a signal wavelength is controllable using the polarization controller. An optional phase compensator is used to control polarization state of the output laser beam. In various embodiments the relative power distribution among multiple wavelengths may be controlled over a range of at least about 100:1.

15. 发明授权

EP2756342B1 CONTROLLABLE MULTI-WAVELENGTH FIBER LASER SOURCE 有权
标题翻译：具有多波长可控光纤激光器
公开(公告)号：EP2756342B1
公开(公告)日：2016-11-30
申请号：EP12831411.9
申请日：2012-09-06
申请人： IMRA America, Inc.
发明人： XU, Jingzhou , CHO, Gyu Cheon
IPC分类号： G02F1/35 , H01S3/00 , H01S3/10 , H01S3/067 , B23K26/00
CPC分类号： H01S3/06712 , G02B5/3083 , G02F1/353 , G02F1/3544 , G02F2001/3546 , H01S3/0092 , H01S3/067 , H01S3/06754 , H01S3/10053 , H01S3/10061

16. 发明公开

EP2252426A1 LASER-BASED MATERIAL PROCESSING METHODS AND SYSTEMS 审中-公开
标题翻译： VERFAHREN UND SYSTEME ZUR VERARBEITUNG EINES材料AUF LASERBASIS
公开(公告)号：EP2252426A1
公开(公告)日：2010-11-24
申请号：EP09721791.3
申请日：2009-03-17
申请人： Imra America, Inc.
发明人： SHAH, Lawrence , CHO, Gyu, Cheon , XU, Jingzhou
IPC分类号： B23K26/06 , B23K26/38
CPC分类号： H01L21/268 , B23K26/0624 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/082 , B23K26/083 , B23K26/364 , B23K26/38 , B23K26/40 , B23K2201/40 , B23K2203/50
摘要： Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse repetition rate sufficiently high so that material is efficiently removed from the region and a quantity of unwanted material within the region, proximate to the region, or both is reduced relative to a quantity obtainable at a lower repetition rate In at least one embodiment, an ultrashort pulse laser system may include at least one of a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a semiconductor substrate. Workpiece materials may also include metals, inorganic or organic dielectrics, or any material to be micromachined with femtosecond and/or picosecond pulses, and in some embodiments with pulse widths up to a few nanoseconds.
摘要翻译：各种实施例可以用于对工件的目标材料的基于激光的修改，同时有利地实现处理生产量和/或质量的改善。处理方法的实施例可以包括将激光脉冲聚焦并以足够高的脉冲重复频率将激光脉冲引导到工件的区域，使得材料从该区域有效地移除，并且在区域内靠近该区域的一些不需要的材料，或者两者相对于以较低重复率可获得的量减少。超短脉冲激光系统的实施例可以包括光纤放大器或光纤激光器。各种实施例适合于在半导体衬底上或半导体衬底内的切割，切割，划线和形成特征中的至少一个。工件材料可以包括金属，无机或有机电介质，或者用飞秒，皮秒和/或纳秒脉冲微加工的任何材料。

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