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    • 17. 发明授权
    • Multi-bit data converter using data weight averaging
    • 使用数据权重平均的多位数据转换器
    • US07808409B2
    • 2010-10-05
    • US12328550
    • 2008-12-04
    • Sang-Ho Kim
    • Sang-Ho Kim
    • H03M1/00
    • H03M1/0665H03M1/747H03M3/502
    • A method for converting data includes matching dynamic elements by repeatedly selecting a portion of unit elements among N unit elements according to data and a circulation direction. An existence of a tone generation possibility is determined by comparing a present pointer position with a previous pointer position and by comparing present data with previous data. At least one of the present pointer position and the circulation direction is changed based on the existence of the tone generation possibility. The present pointer position and the present data are stored or the changed pointer position and the present data are stored. Unit elements are sequentially selected by the present data from the stored pointer position in the circulation direction or the changed circulation direction. The present pointer position is moved by the present data in the circulation direction or the changed circulation direction.
    • 用于转换数据的方法包括通过根据数据和循环方向重复地选择N个单元中的单位元素的一部分来匹配动态元素。 通过将当前指针位置与先前的指针位置进行比较并通过将当前数据与先前数据进行比较来确定音调生成可能性的存在。 本指针位置和循环方向中的至少一个基于音调生成可能性的存在而改变。 存储当前指针位置和当前数据,或存储改变的指针位置和当前数据。 通过来自循环方向或改变的循环方向上存储的指示器位置的当前数据顺序地选择单位元素。 当前数据在循环方向或改变的循环方向上移动当前指针位置。
    • 18. 发明申请
    • METHODS AND APPARATUS FOR SEMICONDUCTOR ETCHING INCLUDING AN ELECTRO STATIC CHUCK
    • 用于半导体蚀刻的方法和装置,包括电子静态卡盘
    • US20080194113A1
    • 2008-08-14
    • US12106484
    • 2008-04-21
    • Jin-Man KimYun-Sik YangYoung-Min MinSang-Ho Kim
    • Jin-Man KimYun-Sik YangYoung-Min MinSang-Ho Kim
    • H01L21/3065
    • H01L21/6831H01J37/32642H01L21/68735
    • There is provided a semiconductor etching apparatus which removes particles remaining on the upper surface of an electro static chuck (ESC) during an etching process, thereby preventing a chucking force from decreasing and minimizing a leak of helium. To prevent a failure of the etching process due to a wafer chucking failure, by preventing polymers from falling down on the upper part of the ESC when a wafer is dechucked or transferred, the semiconductor etching apparatus comprises: an ESC selectively holding a wafer to be entered and positioned inside a chamber, and including a lower electrode part to which RF power is applied; parts positioned at a stepped portion of the ESC and respectively surrounding a side of the ESC; and a gas flow blocking part blocking a gas flow in a vacuum path formed between the ESC and the parts.
    • 提供了一种半导体蚀刻装置,其在蚀刻过程中除去静电卡盘(ESC)的上表面上残留的颗粒,从而防止夹紧力降低并使氦泄漏最小化。 为了防止由于晶片夹紧故障引起的蚀刻工艺的故障,通过在晶片脱扣或转印时防止聚合物落下于ESC的上部,半导体蚀刻装置包括:选择性地保持晶片的ESC 进入并定位在室内,并且包括施加RF功率的下电极部分; 位于ESC的阶梯部分并分别围绕ESC的一侧的部件; 以及阻塞在ESC和部件之间形成的真空路径中的气流的气流阻塞部。
    • 19. 发明申请
    • Wafer aligning apparatus and related method
    • 晶圆对准装置及相关方法
    • US20070189596A1
    • 2007-08-16
    • US11641870
    • 2006-12-20
    • Heok-Jae LeeSang-Ho KimHyu-Rim ParkDo-In BaeKee-Weone SeoChang-Woo Woo
    • Heok-Jae LeeSang-Ho KimHyu-Rim ParkDo-In BaeKee-Weone SeoChang-Woo Woo
    • G06K9/00
    • H01L21/681G06T7/33G06T7/74G06T2207/30148Y10S414/136
    • Embodiments of the invention provide a wafer aligning apparatus and a wafer aligning method. In one embodiment, the wafer aligning apparatus comprises an imaging unit adapted to take an image of a wafer being transferred from a load lock chamber to a transfer chamber and adapted to convert the image into digital signals, and a signal processing unit adapted to calculate a center alignment correction value for the wafer by comparing the digital signals to a master image stored in the signal processing unit. The wafer aligning apparatus further comprises a robot controller adapted to receive the center alignment correction value from the signal processing unit and adapted to control a transfer robot in accordance with the center alignment correction value to provide the wafer to a process chamber such that the center of the wafer is substantially aligned.
    • 本发明的实施例提供一种晶片对准装置和一种晶圆对准方法。 在一个实施例中,晶片对准装置包括成像单元,其适于将从负载锁定室传送的晶片的图像转移到传送室,并适于将图像转换成数字信号,以及信号处理单元, 通过将数字信号与存储在信号处理单元中的主图像进行比较来获得晶片的中心对准校正值。 晶片对准装置还包括机器人控制器,其适于从信号处理单元接收中心对准校正值,并且适于根据中心对准校正值来控制传送机器人,以将晶片提供给处理室,使得处理室的中心 晶片基本对齐。
    • 20. 发明申请
    • Remote access unit and radio-over-fiber network using same
    • 远程访问单元和使用相同的光纤网络
    • US20070133995A1
    • 2007-06-14
    • US11607700
    • 2006-12-01
    • Jae-Hoon LeeSeong-Taek HwangByung-Jik KimGyu-Woong LeeHoon KimSang-Ho KimYong-Gyoo KimSung-Kee KimHan-Lim Lee
    • Jae-Hoon LeeSeong-Taek HwangByung-Jik KimGyu-Woong LeeHoon KimSang-Ho KimYong-Gyoo KimSung-Kee KimHan-Lim Lee
    • H04B10/00
    • H04B10/25758
    • A remote access unit (RAU) apparatus, coupled to a central station (CS) of an RoF network through at least one optical fiber, and which RAU apparatus includes at least one antenna, includes: first and second antenna ports coupled to the at least one antenna; first and second optical fiber ports coupled to the at least one optical fiber; a first coupler for decoupling a first downstream signal of a first duplexing method and a second downstream signal of a second duplexing method, which are input through the first optical fiber port; a circulator for outputting the first downstream signal input from the first coupler to the first antenna port and outputting a first upstream signal of the first duplexing method input from the first antenna port to the second optical fiber port; and a second coupler for outputting the second downstream signal input from the first coupler to the second antenna port and outputting a second upstream signal of the second duplexing method input from the second antenna port to the second optical fiber port.
    • 一种远程接入单元(RAU)装置,其通过至少一个光纤耦合到RoF网络的中心站(CS),并且所述RAU设备包括至少一个天线,包括:耦合到所述至少一个天线的第一和第二天线端口 一个天线 耦合到所述至少一个光纤的第一和第二光纤端口; 用于去耦第一双工方法的第一下行信号和通过第一光纤端口输入的第二双工方法的第二下行信号的第一耦合器; 输出从第一耦合器输入的第一下行信号到第一天线端口的循环器,并输出从第一天线端口输入到第二光纤端口的第一双工方式的第一上行信号; 以及第二耦合器,用于将从第一耦合器输入的第二下行信号输出到第二天线端口,并输出从第二天线端口输入到第二光纤端口的第二双工方法的第二上行信号。