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    • 11. 发明专利
    • DETECTOR OF TOTAL-REFLECTION FLUORESCENCE X-RAY ANALYZING APPARATUS
    • JPH03148089A
    • 1991-06-24
    • JP28820889
    • 1989-11-06
    • HORIBA LTD
    • KIRA AKIMICHIOKADA YOSHIAKIWAKIYAMA YOSHIHIRO
    • G01N23/223G01T1/36G01T7/00
    • PURPOSE:To omit a collimator and to improve sensitivity by forming a material constituting a detector within a range wherein scattering X rays are projected and fluorescence X rays are generated with the same element as a target material of an X-ray tube which projects primary X rays into a sample. CONSTITUTION:An X-ray tube 1, a cathode filament 2, a cap 4, an electrode 9 and the like are formed of molybdenum. A detector 11 is also formed of molybdenum like a target material 3 of the X-ray tube 1. Primary X rays 13 which are emitted from the X-ray tube 1 are inputted into a sample 12 at a total reflection angle, and scattering X rays generated from the sample 12 are inputted into the cap 4. Even if the scattering X rays excite the cap 4 and the electrode 9 and fluorescence X rays are generated, the fluorescence X rays become the same kind as the primary X rays. Therefore, the spectrum of the fluorescence X rays which are generated by the excitation of an element to be measured and the spectrum of the fluorescence X rays which are generated by the excitation from the cap 4 and the electrode 9 have the almost different wavelength regions. Thus the effect on the measurement of the element to be measured becomes almost negligible, and the use of a collimator is omitted.
    • 14. 发明专利
    • TOTAL-REFLECTION X-RAY FLUORESCENCE ANALYSIS APPARATUS
    • JPH03148056A
    • 1991-06-24
    • JP28689089
    • 1989-11-03
    • HORIBA LTD
    • OKADA YOSHIAKIWAKIYAMA YOSHIHIRO
    • G01N23/223
    • PURPOSE:To make it possible to perform highly accurate measurement by providing a sample on a stage in order to measure the position of linear X rays beforehand when the sample is not placed on the stage, and obtaining the specified total reflection angle only by measuring the position of the reflected X rays. CONSTITUTION:At first, the X rays directly emitted from an X-ray tube 1 is detected with an X-ray position detecting unit 9 under the state wherein a sample 4 is not provided on a stage 3. Thereafter, the sample 4 is provided on the stage 3. The X rays are projected on the sample 4 from the X-ray tube 1 through a slit 2. The most part of the X rays is reflected from the sample 4. The reflected X rays are detected with the unit 9. Here, the distance from the point at which the X rays from the X-ray tube 1 is projected for the sample 4 to the unit 9 is made to be L, and the distance between the directly projected X rays on the unit 9 and the detecting position of the reflected X rays is made to be (d). Then a total reflection angle theta from the sample 4 is obtained by the expression in the figure. The detected result is processed in a personal computer 8 by using the expression. The data are sent into a sample-position controlling circuit 10. The stage 3 is driven so as to satisfy the specified total reflection angle, and the attitude of the sample 4 is controlled.