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    • 11. 发明授权
    • Display device
    • 显示设备
    • US08124974B2
    • 2012-02-28
    • US12536097
    • 2009-08-05
    • Takeshi NodaToshio MiyazawaTakuo KaitohTakumi Shigaki
    • Takeshi NodaToshio MiyazawaTakuo KaitohTakumi Shigaki
    • H01L33/00
    • G02F1/13624G02F2202/104
    • A display device is provided in which at least first and second thin film transistors are formed on a substrate, including a gate electrode formed on a semiconductor layer with a gate insulating film in between. The semiconductor layer is divided into individual regions for each film transistor, and is provided with a common region and LDD regions between a channel region and a drain region, as well as between the channel region and a source region. The gate electrode is formed as an integrated gate electrode for the first and second thin film transistors that faces the common region, the channel region and the LDD regions of the first thin film transistor and the channel region and the LDD regions of the second thin film transistor.
    • 提供了一种显示装置,其中至少第一和第二薄膜晶体管形成在基板上,包括形成在其间具有栅极绝缘膜的半导体层上的栅电极。 半导体层被分成用于每个薄膜晶体管的单个区域,并且在沟道区域和漏极区域之间以及在沟道区域和源极区域之间设置有公共区域和LDD区域。 栅电极形成为第一和第二薄膜晶体管的集成栅电极,其面对公共区域,第一薄膜晶体管的沟道区域和LDD区域以及第二薄膜的沟道区域和LDD区域 晶体管。
    • 12. 发明申请
    • DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF
    • 显示装置及其制造方法
    • US20110024763A1
    • 2011-02-03
    • US12844887
    • 2010-07-28
    • Takeshi NODAToshio MiyazawaTakuo KaitohDaisuke Sonoda
    • Takeshi NODAToshio MiyazawaTakuo KaitohDaisuke Sonoda
    • H01L33/16H01L21/336
    • H01L29/78621G02F1/1368H01L29/66765H01L29/78627
    • A display device which has thin film transistors, wherein a semiconductor layer includes a first layer, second layers and third layers, the first layer has a channel region, the second layers are an impurity layer, the third layers are a low-concentration impurity layer, the second layers have connection portions connected with an electrodes, the third layers are formed to annularly surround the second layers, a channel-region-side edge portion out of edge portions of the third layer is in contact with the first layer, the edge portions of the third layer but the channel-region-side edge portion are in contact with an interlayer insulation film, the second layers have a first region where the second layer overlaps with a gate electrode and a second region where the second layer does not overlap with the gate electrode, and the connection portion is in the second region.
    • 一种具有薄膜晶体管的显示装置,其中半导体层包括第一层,第二层和第三层,第一层具有沟道区,第二层是杂质层,第三层是低浓度杂质层 所述第二层具有与电极连接的连接部,所述第三层形成为环绕所述第二层,所述第三层的边缘部分之外的沟道区域侧边缘部与所述第一层接触,所述边缘 第三层的第二层与沟道区侧边缘部分接触层间绝缘膜,第二层具有第一区域,其中第二层与栅电极重叠,第二区与第二层不重叠 与栅电极连接,连接部位在第二区域。
    • 13. 发明申请
    • DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF
    • 显示装置及其制造方法
    • US20100032680A1
    • 2010-02-11
    • US12536066
    • 2009-08-05
    • Takuo KAITOHToshio MiyazawaTakeshi Sakai
    • Takuo KAITOHToshio MiyazawaTakeshi Sakai
    • H01L33/00H01L21/336
    • G02F1/1368H01L27/124H01L29/458H01L29/78618
    • Provided is a display device including: a gate electrode (GT); a semiconductor film (S) which controls a current flowing between a source electrode (ST) and a drain electrode (DT), the semiconductor film including a channel region and two impurity regions formed of regions which sandwich the channel region; two Ohmic contact layers (DS) being interposed between the source electrode and the like and the two impurity regions; and an insulating film laminated on a partial region of the semiconductor film, the partial region being around a position corresponding to a substantial center of the semiconductor film, in which: the semiconductor film is formed of one of microcrystalline-silicon and polycrystalline-silicon; the two impurity regions are formed in regions on which the insulating film is absent; the two Ohmic contact layers cover the two impurity regions therewith; and the source electrode and the like cover the Ohmic contact layers therewith.
    • 提供一种显示装置,包括:栅电极(GT); 控制在源电极(ST)和漏电极(DT)之间流动的电流的半导体膜(S),所述半导体膜包括沟道区域和由夹着沟道区域的区域形成的两个杂质区域; 两个欧姆接触层(DS)插在源电极等和两个杂质区之间; 以及层叠在所述半导体膜的部分区域上的绝缘膜,所述部分区域围绕与所述半导体膜的大致中心对应的位置,其中:所述半导体膜由微晶硅和多晶硅中的一个形成; 在绝缘膜不存在的区域中形成两个杂质区域; 两个欧姆接触层覆盖其两个杂质区域; 源电极等覆盖欧姆接触层。
    • 15. 发明申请
    • DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF
    • 显示装置及其制造方法
    • US20100096645A1
    • 2010-04-22
    • US12579428
    • 2009-10-15
    • Daisuke SonodaToshio MiyazawaTakuo KaitohYasukazu KimuraTakeshi KuriyagawaTakeshi Noda
    • Daisuke SonodaToshio MiyazawaTakuo KaitohYasukazu KimuraTakeshi KuriyagawaTakeshi Noda
    • H01L33/00
    • H01L27/1288H01L27/1214H01L27/124H01L27/1248
    • A manufacturing method of a display device and a display device which can reduce the number of times that an insulation substrate is put into a CVD device and is taken out from the CVD device are provided. The manufacturing method of a display device includes the steps of forming a conductive layer including first electrode films and second electrode films, a first insulation layer, semiconductor films, a second insulation layer and a protective layer on an insulation substrate; forming first resist films having a predetermined thickness which are arranged in first regions above the semiconductor films, opening portions which are arranged in second regions above the second electrode films and second resist films having a large thickness which are arranged in regions other than the first regions and the second regions on the protective layer; etching portions below the second regions, removing the first resist films by ashing; forming first holes which reach the semiconductor films below the first regions and second holes which reach the second electrode films below the second regions; removing the second resist films, and forming lines which are connected to the semiconductor films and lines which are connected to the second electrode films.
    • 提供了可以减少将绝缘基板放入CVD装置并从CVD装置中取出的次数的显示装置和显示装置的制造方法。 显示装置的制造方法包括在绝缘基板上形成包括第一电极膜和第二电极膜的导电层,第一绝缘层,半导体膜,第二绝缘层和保护层的步骤; 形成具有预定厚度的第一抗蚀剂膜,其布置在半导体膜上方的第一区域中,布置在第二电极膜上方的第二区域中的开口部分和布置在除了第一区域之外的区域中的具有大厚度的第二抗蚀剂膜 和保护层上的第二区域; 蚀刻第二区域下方的部分,通过灰化去除第一抗蚀剂膜; 形成在第一区域下方到达半导体膜的第一孔和在第二区域下方到达第二电极膜的第二孔; 去除第二抗蚀剂膜,以及形成连接到半导体膜的线和连接到第二电极膜的线。
    • 16. 发明授权
    • Display device and manufacturing method thereof
    • 显示装置及其制造方法
    • US08148726B2
    • 2012-04-03
    • US12844887
    • 2010-07-28
    • Takeshi NodaToshio MiyazawaTakuo KaitohDaisuke Sonoda
    • Takeshi NodaToshio MiyazawaTakuo KaitohDaisuke Sonoda
    • H01L33/013
    • H01L29/78621G02F1/1368H01L29/66765H01L29/78627
    • A display device which has thin film transistors, wherein a semiconductor layer includes a first layer, second layers and third layers, the first layer has a channel region, the second layers are an impurity layer, the third layers are a low-concentration impurity layer, the second layers have connection portions connected with an electrodes, the third layers are formed to annularly surround the second layers, a channel-region-side edge portion out of edge portions of the third layer is in contact with the first layer, the edge portions of the third layer but the channel-region-side edge portion are in contact with an interlayer insulation film, the second layers have a first region where the second layer overlaps with a gate electrode and a second region where the second layer does not overlap with the gate electrode, and the connection portion is in the second region.
    • 一种具有薄膜晶体管的显示装置,其中半导体层包括第一层,第二层和第三层,第一层具有沟道区,第二层是杂质层,第三层是低浓度杂质层 所述第二层具有与电极连接的连接部,所述第三层形成为环绕所述第二层,所述第三层的边缘部分之外的沟道区域侧边缘部与所述第一层接触,所述边缘 第三层的第二层与沟道区侧边缘部分接触层间绝缘膜,第二层具有第一区域,其中第二层与栅电极重叠,第二区与第二层不重叠 与栅电极连接,连接部位在第二区域。
    • 20. 发明申请
    • Display Device
    • 显示设备
    • US20100032674A1
    • 2010-02-11
    • US12536097
    • 2009-08-05
    • Takeshi NodaToshio MiyazawaTakuo KaitohTakumi Shigaki
    • Takeshi NodaToshio MiyazawaTakuo KaitohTakumi Shigaki
    • H01L33/00
    • G02F1/13624G02F2202/104
    • An object of the present invention is to provide a display device where small thin film transistors with a lower off current can be formed. The present invention provides a display device where thin film transistors are formed on a substrate, and in the above described thin film transistors, a gate electrode is formed on a semiconductor layer with a gate insulating film in between, the above described thin film transistors are formed of at least a first thin film transistor and a second thin film transistor, and the above described semiconductor layer is divided into individual regions for each film transistor, the above described semiconductor layer is provided with a common region shared either by the drain region of the above described first thin film transistor and the source region of the above described second thin film transistor or by the source region of the above described first thin film transistor and the drain region of the above described second thin film transistor, in the first thin film transistor and the second thin film transistor, the semiconductor layer is provided with LDD regions where the impurity concentration is lower than in the above described drain region and the above described source region, between the channel region and the drain region, as well as between the channel region and the source region, and the above described gate electrode is formed so as to overlap with the above described common region in the above described semiconductor layer and face at least the above described channel region and the above described LDD regions of the above described first thin film transistor and the above described channel region and the above described LDD regions of the above described second thin film transistor.
    • 本发明的目的是提供一种可以形成具有较低截止电流的小型薄膜晶体管的显示装置。 本发明提供了一种在基板上形成薄膜晶体管的显示装置,在上述薄膜晶体管中,在半导体层之间形成有栅极绝缘膜的栅电极,上述薄膜晶体管 由至少第一薄膜晶体管和第二薄膜晶体管形成,并且上述半导体层被分成用于每个薄膜晶体管的各个区域,上述半导体层设置有共同区域,其共同区域由 上述第一薄膜晶体管和上述第二薄膜晶体管的源极区域或上述第一薄膜晶体管的源极区域和上述第二薄膜晶体管的漏极区域在第一薄膜 晶体管和第二薄膜晶体管,半导体层设置有LDD区,其中杂质c 浓度低于上述漏极区域和上述源极区域,沟道区域和漏极区域之间以及沟道区域和源极区域之间,并且上述栅极电极形成为重叠 在上述半导体层中具有上述公共区域并且至少面向上述第一薄膜晶体管的上述沟道区域和上述LDD区域以及上述沟道区域和上述上述LDD区域 描述的第二薄膜晶体管。