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    • 18. 发明专利
    • DE2443259A1
    • 1975-03-13
    • DE2443259
    • 1974-09-10
    • HITACHI LTD
    • NONAKA YASUHIKO
    • H01J9/20H01J9/233H01J29/45H01L21/06H01L21/203H01L31/08H01L31/18H04N5/30
    • In a method of manufacturing the target of a pickup tube of the class wherein an N-type light transmitting conductive film is formed on a substrate, an N-type photoconductive film consisting of a group II-VI compound is formed on the N-type light transmitting conductive film by means of a vacuum deposition device comprising a boat for containing the compound and a hollow shielding member, and then a P-type amorphous photoconductive film consisting essentially of metal selenium is applied onto the N-type photoconductive film. The temperature of the substrate is maintained in a range of from 50 DEG C to 250 DEG C when the N-type photoconductive film is formed on the N-type light transmitting conductive film. The distance between the boat and the substrate is maintained in a range of from 8 to 13 cm. The boat and the substrate are contained in the hollow shielding member thereby maintaining homogeneous atmosphere of the group II-IV compound about the boat and the substrate, and the boat is preheated to a predetermined temperature.
    • 20. 发明专利
    • DE2828651A1
    • 1979-01-18
    • DE2828651
    • 1978-06-29
    • HITACHI LTD
    • NONAKA YASUHIKO
    • C23C14/54G05D5/03C23C13/08C23C15/00
    • A vacuum vapor-deposition apparatus comprising a turntable for holding some substrates subjected to vapor-deposition, on its circumferential portions; a plurality of evaporating boats disposed opposite to the circumferential portions of the turntable; a plurality of SCR boat power sources for respectively heating the plural evaporating boats; and at least one quartz deposition monitor provided on the turntable, wherein the turntable is rotated for vacuum vapor-deposition so that the evaporated materials from the respective boats are periodically deposited on some substrates to form the start of the successively evaporated materials. This apparatus also includes a coupling device having at least a coupling coil system consisting of a primary coil rotated in synchronism with the turntable and a secondary coil so disposed as to be set concentrically with respect to the primary coil, the coupling device serving to extract an electrical signal from the quartz deposition monitor, a digital frequency counter for directly measuring the natural resonance frequency of the quartz oscilator of the deposition monitor on the basis of the noiseless signal induced in the secondary coil of the coupling system and a computor, whereby it is rendered unnecessary to set the offset frequency of the deposition monitor with the quartz oscilator.