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    • 11. 发明专利
    • FLUID CONTROL DEVICE
    • CA2277337C
    • 2005-06-07
    • CA2277337
    • 1999-07-09
    • FUJIKIN KK
    • MOROKOSHI HIROSHINARIAI TOSHIROYAMAJI MICHIO
    • G05D7/00F15B1/00G05D7/06
    • A fluid control device comprises a massflow controller having an inlet channel and an outlet channel, an inlet-side lower block coupling having a channel upwardly opened and communicating with the inlet channel of the massflow controller, an inlet-side connecting member adjacent to the inlet-side lower block coupling and having a channel opened upward, an inlet- side upper block coupling having an inverted V-shaped channel for holding the channel of the inlet-side lower block coupling in communication with the channel of the inlet-side connecting member, an outlet-side lower block coupling having a channel upwardly opened and communicating with the outlet channel of the massflow controller, an outlet-side connecting member adjacent to the outlet-side lower block coupling and having a channel opened upward, and an outlet-side upper block coupling having an inverted V-shaped channel for holding the channel of the outlet-side lower block coupling in communication with the channel of the outlet-side connecting member.