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    • 14. 发明授权
    • Modular apparatus for cleaning, coating and curing photoreceptors in an
enclosed planetary array
    • 用于在封闭的行星阵列中清洁,涂覆和固化光感受器的模块化设备
    • US5038707A
    • 1991-08-13
    • US458571
    • 1989-12-27
    • Eugene A. SwainThong Vo
    • Eugene A. SwainThong Vo
    • G03G5/05B05B13/02G03G5/10
    • B05B13/0242
    • An apparatus for processing cylindrical and belt-like substrates includes: a support structure for supporting a planetary array of substrates about a central horizontal axis of the support structure, each substrate defining an offset horizontal axis radially spaced from and parallel to the central horizontal axis of the support structure; an array of processing modules each having a processing chamber for receiving the support structure therein for processing the substrates, each chamber defining a central horizontal axis parallel to the central horizontal axis of the support structure and parallel to the central horizontal axis of an adjacent processing chamber; and a transport vehicle for transporting the support structure in a first direction parallel to the central horizontal axis for insertion into and withdrawal from any one of the processing chambers, in a second direction perpendicular to the central horizontal axis for movement among adjacent processing chambers, and in a third direction perpendicular to the plane of the first and second directions. The array of modules is preferably a multi-level array.
    • 用于处理圆柱形和带状衬底的装置包括:支撑结构,用于支撑围绕支撑结构的中心水平轴线的基板的行星阵列,每个基板限定与中心水平轴线径向间隔开并平行于中心水平轴线的偏移水平轴线 支撑结构; 一组处理模块,每个处理模块具有用于接收其中用于处理基板的支撑结构的处理室,每个室限定平行于支撑结构的中心水平轴线并平行于相邻处理室的中心水平轴线的中心水平轴线 ; 以及运输车辆,用于沿平行于所述中心水平轴线的第一方向运输所述支撑结构,用于在垂直于所述中心水平轴线的第二方向上插入和退出任何一个处理室,以在相邻处理室之间移动;以及 在垂直于第一和第二方向的平面的第三方向上。 模块阵列优选地是多级阵列。