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11. 发明专利

JP2013120175A Method for measuring linear body diameter and slit width dimension 有权
标题翻译：用于测量线性体直径和狭缝宽度尺寸的方法
公开(公告)号：JP2013120175A
公开(公告)日：2013-06-17
申请号：JP2011269621
申请日：2011-12-09
申请人： Kyushu Institute Of Technology , 国立大学法人九州工業大学 , Sumitomo Electric Hardmetal Corp , 住友電工ハードメタル株式会社
发明人： KHAJORNRUNGRUANG PANART , KIMURA KEIICHI , SUZUKI YOSHITOMO , IMAMURA MAKOTO , NAKADA DAISUKE , YONEKURA HIROKI
IPC分类号： G01B11/08 , G01B11/02
CPC分类号： G01B11/08
摘要： PROBLEM TO BE SOLVED: To provide a method for measuring the diameter of a linear body capable of measuring the diameter of a small tool in which a transmission light component is increased when a laser beam is irradiated, with high accuracy.SOLUTION: The method for measuring the diameter of a linear body on the basis of an optical diffraction pattern of a laser beam with which the linear body is irradiated includes: a first process for irradiating a light reception part with a laser beam with the linear body not disposed in a measurement part to acquire a first light intensity distribution in the light reception part; a second process for irradiating the light reception part with a laser beam with the linear body disposed in the measurement part to acquire a second light intensity distribution in the light reception part; a process for acquiring an optical diffraction pattern by subtracting the second light intensity distribution acquired in the second process from the first light intensity distribution acquired in the first process; and a process for calculating the diameter of the linear body on the basis of a primary light peak interval obtained from the acquired optical diffraction pattern.
摘要翻译：要解决的问题：提供一种用于测量当激光束照射时透射光分量增加的小工具的直径的直线体的直径的测量方法，其精度高。解决方案：用于基于照射线状体的激光束的光学衍射图案来测量线状体的直径的方法包括：用激光束照射光接收部分的第一工序，该线状体未设置在测量部分中以获得光接收部分中的第一光强分布; 第二种处理方法，其中所述光接收部分用激光束照射，所述线状体设置在所述测量部分中以获得所述光接收部分中的第二光强度分布; 通过从第一处理中获取的第一光强度分布中减去在第二处理中获取的第二光强度分布来获取光学衍射图案的处理; 以及基于从所获取的光学衍射图形获得的初级光峰值间隔来计算线状体的直径的处理。版权所有（C）2013，JPO＆INPIT

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