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11. 发明授权

US6046659A Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications 失效
标题翻译：用于微波和毫米波应用的宽带表面微加工微机电开关的设计和制造
公开(公告)号：US6046659A
公开(公告)日：2000-04-04
申请号：US080326
申请日：1998-05-15
申请人： Robert Y. Loo , Adele Schmitz , Julia Brown , Jonathan Lynch , Debabani Choudhury , James Foschaar , Daniel J. Hyman , Brett Warneke , Juan Lam , Tsung-Yuan Hsu , Jae Lee , Mehran Mehregany
发明人： Robert Y. Loo , Adele Schmitz , Julia Brown , Jonathan Lynch , Debabani Choudhury , James Foschaar , Daniel J. Hyman , Brett Warneke , Juan Lam , Tsung-Yuan Hsu , Jae Lee , Mehran Mehregany
IPC分类号： H01H1/50 , H01H59/00 , H01P1/12 , H01P1/10 , H01H57/00
CPC分类号： B81B3/0072 , H01G5/18 , H01G5/38 , H01G5/40 , H01H59/0009 , H01P1/12 , B81B2201/014 , B81B2203/0118 , H01H1/50
摘要： Methods for the design and fabrication of micro-electro-mechanical switches are disclosed. Two different switch designs with three different switch fabrication techniques are presented for a total of six switch structures. Each switch has a multiple-layer armature with a suspended biasing electrode and a conducting transmission line affixed to the structural layer of the armature. A conducting dimple is connected to the conducting line to provide a reliable region of contact for the switch. The switch is fabricated using silicon nitride as the armature structural layer and silicon dioxide as the sacrificial layer supporting the armature during fabrication. Hydrofluoric acid is used to remove the silicon dioxide layer with post-processing in a critical point dryer to increase yield.
摘要翻译：公开了微机电开关的设计和制造方法。提出了三种不同的开关制造技术的两种不同的开关设计，共有六种开关结构。每个开关具有多层电枢，其具有悬置的偏置电极和固定到电枢的结构层的导电传输线。导电凹坑连接到导线，为开关提供可靠的接触区域。该开关使用氮化硅作为电枢结构层和二氧化硅作为在制造期间支撑电枢的牺牲层制造。氢氟酸用于在临界点干燥器中进行后处理以去除二氧化硅层以提高产率。

12. 发明授权

US4978208A Photoelectronic diode spatial light modulator and eye protection goggles incorporating the same 失效
标题翻译：光电子二极管空间光调制器和眼睛保护护目镜结合在一起
公开(公告)号：US4978208A
公开(公告)日：1990-12-18
申请号：US383698
申请日：1989-07-24
申请人： Tsung-Yuan Hsu , Shin-Tson Wu , Robert Y. Loo
发明人： Tsung-Yuan Hsu , Shin-Tson Wu , Robert Y. Loo
IPC分类号： A61F9/02 , H01L31/14 , H01L31/153
CPC分类号： A61F9/023 , H01L31/143 , H01L31/153
摘要： A spatial light modulator includes a photosensor diode and a photoemitting diode array, each having two semiconductive layers of opposite electrical polarities, and which are sandwiched together with layers of the same polarity (P or N) in electrical contact with each other. Transparent electrode layers are formed on the opposite surfaces of the photosensor diode and photoemitting diode array respectively, in electrical contact with the layers of the opposite polarity. The individual photoemitting diodes are electrically and optically isolated from each other. With a voltage applied across the electrodes which causes the photosensor diode to be reverse biased and the photoemitting diodes to be forward biased, the photoemitting diode array generates a visual display which is a reproduction of a light image incident on the photosensor diode. The photosensor diode may be replaced by a single layer of a photoconductive material. Two of the spatial light modulators may be combined in a frame with suitable optics to provide eye protection goggles.
摘要翻译：空间光调制器包括光电二极管和光电二极管阵列，每个具有两个具有相反电极性的半导体层，并且它们被彼此电接触的具有相同极性（P或N）的层夹在一起。透明电极层分别形成在光电二极管和发光二极管阵列的相对表面上，与相反极性的层电接触。各个发光二极管彼此电隔离和光学隔离。利用施加在电极两端的电压，使得光电传感器二极管被反向偏置并且光发光二极管被正向偏置，光发光二极管阵列产生视觉显示，其是入射在光电二极管上的光图像的再现。光传感器二极管可以由单层感光材料代替。两个空间光调制器可以在框架中与合适的光学器件组合以提供眼睛保护护目镜。

13. 发明授权

US06639205B2 Optically controlled MEM switches 有权
标题翻译：光控MEM开关
公开(公告)号：US06639205B2
公开(公告)日：2003-10-28
申请号：US09978314
申请日：2001-10-15
申请人： Tsung-Yuan Hsu , Robert Y. Loo , Greg Tangonan , Juan F. Lam
发明人： Tsung-Yuan Hsu , Robert Y. Loo , Greg Tangonan , Juan F. Lam
IPC分类号： G01J136
CPC分类号： H01H59/0009 , H01H1/0036 , H01H47/24 , H01H67/22
摘要： An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.
摘要翻译：描述了一种光学控制的微机电（MEM）开关，其理想地利用其上制造有MEM开关的半导体基板的光导特性。在一个实施例中，通过照亮开关的光电部分来改变为开关的启动提供的偏置电压，以使开关失效。在替代实施例中，光伏器件提供电压以完全启动开关而没有任何偏置线。由于作为施加电压的函数的机电开关的滞后，仅需要施加到开关的电压的适度变化，以使开关在光学控制下急剧地打开或闭合。

14. 发明授权

US06331257B1 Fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications 有权
标题翻译：用于微波和毫米波应用的宽带表面微加工微机电开关的制造
公开(公告)号：US06331257B1
公开(公告)日：2001-12-18
申请号：US09452052
申请日：1999-11-30
申请人： Robert Y. Loo , Adele Schmitz , Julia Brown , James Foschaar , Daniel J. Hyman , Tsung-Yuan Hsu
发明人： Robert Y. Loo , Adele Schmitz , Julia Brown , James Foschaar , Daniel J. Hyman , Tsung-Yuan Hsu
IPC分类号： H01B1300
CPC分类号： B81B3/0072 , B81B2201/014 , B81B2203/0118 , H01G5/18 , H01G5/38 , H01G5/40 , H01H1/50 , H01H59/0009 , H01P1/12
摘要： Methods for the design and fabrication of micro-electro-mechanical switches are disclosed. Two different switch designs with three different switch fabrication techniques are presented for a total of six switch structures. Each switch has a multiple-layer armature with a suspended biasing electrode and a conducting transmission line affixed to the structural layer of the armature. A conducting dimple is connected to the conducting line to provide a reliable region of contact for the switch. The switch is fabricated using silicon nitride as the armature structural layer and silicon dioxide as the sacrificial layer supporting the armature during fabrication. Hydrofluoric acid is used to remove the silicon dioxide layer with post-processing in a critical point dryer to increase yield.
摘要翻译：公开了微机电开关的设计和制造方法。提出了三种不同的开关制造技术的两种不同的开关设计，共有六种开关结构。每个开关具有多层电枢，其具有悬置的偏置电极和固定到电枢的结构层的导电传输线。导电凹坑连接到导线，为开关提供可靠的接触区域。该开关使用氮化硅作为电枢结构层和二氧化硅作为在制造期间支撑电枢的牺牲层制造。氢氟酸用于在临界点干燥器中进行后处理以去除二氧化硅层以提高产率。

15. 发明授权

US06483480B1 Tunable impedance surface 有权
标题翻译：可调阻抗表面
公开(公告)号：US06483480B1
公开(公告)日：2002-11-19
申请号：US09589859
申请日：2000-06-08
申请人： Daniel Sievenpiper , Greg Tangonan , Robert Y. Loo , James H. Schaffner
发明人： Daniel Sievenpiper , Greg Tangonan , Robert Y. Loo , James H. Schaffner
IPC分类号： H01Q1502
CPC分类号： H01Q3/44 , H01H59/0009 , H01Q9/0442 , H01Q15/0066 , H01Q15/008
摘要： A tuneable impedance surface for steering and/or focusing a radio frequency beam. The tunable surface comprises a ground plane; a first plurality of elements disposed in an array a first distance from the ground plane, the distance being less than a wavelength of the radio frequency beam; and a second plurality of elements disposed in an array a second distance from the ground plane, the second plurality of elements be moveable relative to the first plurality of elements.
摘要翻译：用于转向和/或聚焦射频波束的可调阻抗表面。可调表面包括接地平面; 第一多个元件，其布置成距离接地平面第一距离的阵列，该距离小于射频波长的波长; 以及第二多个元件，其布置成距离接地平面第二距离的阵列，所述第二多个元件可相对于所述第一多个元件移动。

16. 发明授权

US06388631B1 Reconfigurable interleaved phased array antenna 有权
标题翻译：可重配置交错相控阵天线
公开(公告)号：US06388631B1
公开(公告)日：2002-05-14
申请号：US09811934
申请日：2001-03-19
申请人： Stan W. Livingston , Jar J. Lee , James H. Schaffner , Robert Y. Loo
发明人： Stan W. Livingston , Jar J. Lee , James H. Schaffner , Robert Y. Loo
IPC分类号： H01Q1310
CPC分类号： H01Q13/10 , H01Q3/24 , H01Q21/064 , H01Q21/22
摘要： A reconfigurable wide band phased array antenna for generating multiple antenna beams for multiple transmit and receive functions. The antenna array comprises multiple long non-resonant TEM slot antenna apertures with RF MEMS switches disposed within the slots. The RF MEMS switches are positioned directly within the feed lines across the slots to directly control the coupling of RF energy to the slots. Multiple RF MEMS switches are used within each slot, which allows multiple transmit/receive functions and/or multiple frequencies to be supported by each slot. The frequency coverage provided by the slot antenna has a greater than 10:1 frequency range.
摘要翻译：一种用于产生多个发射和接收功能的多个天线波束的可重构宽带相控阵天线。天线阵列包括多个长非谐振TEM缝隙天线孔径，RF MEMS开关设置在槽内。射频MEMS开关直接位于插槽的馈电线内，以直接控制RF能量与插槽的耦合。在每个时隙内使用多个RF MEMS开关，这允许每个时隙支持多个发射/接收功能和/或多个频率。缝隙天线提供的频率覆盖范围大于10：1。

17. 发明授权

US5404006A High power capacity optical receiver apparatus and method employing distributed photodetectors 失效
标题翻译：高功率容量光接收装置及采用分布式光电探测器的方法
公开(公告)号：US5404006A
公开(公告)日：1995-04-04
申请号：US183206
申请日：1994-01-18
申请人： James H. Schaffner , Joseph L. Pikulski , Robert Y. Loo , Willie W. Ng
发明人： James H. Schaffner , Joseph L. Pikulski , Robert Y. Loo , Willie W. Ng
IPC分类号： H01L31/0232 , G02B6/42 , H01L27/144 , H01L31/10 , H01L31/108 , H01P3/08 , H04B10/04 , H04B10/06 , H04B10/14 , H04B10/158 , H04B10/26 , H04B10/28 , H01J40/14
CPC分类号： H04B10/69 , G02B6/42 , H01L27/144 , H01L27/1446 , H01L31/1085 , H04B10/6932
摘要： An optical receiver with an enhanced power capability and wide bandwidth is implemented by distributing a number of photodetectors along an optical transmission channel to convert respective portions of an optical signal into electrical signals. An electrical transmission line receives and accumulates signal inputs from the photodetectors. A velocity matching is established between the optical and electrical signals, allowing the photodetector outputs to accumulate coherently along the electrical transmission line, by loading the transmission line with distributed capacitance elements. The loading capacitances are preferably inherent in the photodetectors, which are designed and spaced apart from each other to yield the desired velocity matching. Possible photodetectors include p-i-n photodiodes with associated depletion layer capacitances, and metal-semiconductor-metal devices in which the capacitance is provided by interdigitated fingers that extend over an active optically absorbing layer on the waveguide from electrodes on either side.
摘要翻译：具有增强的功率能力和宽带宽的光接收机通过沿光传输信道分布多个光电检测器来实现，以将光信号的各个部分转换为电信号。电传输线接收并累积来自光电检测器的信号输入。在光信号和电信号之间建立速度匹配，允许光电检测器输出通过将传输线与分布式电容元件相加来沿着电传输线累积。负载电容优选在光电检测器中是固有的，其被设计并彼此分开以产生期望的速度匹配。可能的光电检测器包括具有相关的耗尽层电容的p-i-n光电二极管以及金属 - 半导体 - 金属器件，其中电容由交叉指状物提供，其在波导上的任一侧上的电极上延伸超过有源光学吸收层。

18. 发明授权

US06888420B2 RF MEMS switch matrix 失效
标题翻译：射频MEMS开关矩阵
公开(公告)号：US06888420B2
公开(公告)日：2005-05-03
申请号：US10407056
申请日：2003-04-03
申请人： James H. Schaffner , Robert Y. Loo
发明人： James H. Schaffner , Robert Y. Loo
IPC分类号： H01H59/00 , H01H67/22 , H01P1/12 , H01P1/10
CPC分类号： H01P1/127 , H01H59/0009 , H01H67/22
摘要： A broadband multiple input, multiple output switch matrix. The switch matrix comprises multiple crosspoint switch element tiles. Each tile comprises RF MEMS switches disposed on a substrate to provide a crosspoint switching capability. The crosspoint switch element tiles are disposed in a flip-chip manner on the upper side of an RF substrate that provides RF connectivity between the various crosspoint switch element tiles. A bias line substrate disposed on the lower side of the RF substrate receives control signals for the crosspoint switch element tiles and routes the signals through the RF substrate using vias in the RF substrate.
摘要翻译：宽带多输入，多输出开关矩阵。开关矩阵包括多个交叉点开关元件瓦片。每个瓦片包括设置在基板上的RF MEMS开关以提供交叉点切换能力。交叉点开关元件瓦片以倒装芯片的方式设置在提供各种交叉点开关元件瓦片之间的RF连接的RF基板的上侧。设置在RF基板的下侧的偏置线基板接收用于交叉点开关元件瓦片的控制信号，并且使用RF基板中的通孔将信号路由到RF基板。

19. 发明授权

US06965349B2 Phased array antenna 有权
公开(公告)号：US06965349B2
公开(公告)日：2005-11-15
申请号：US10239346
申请日：2002-02-06
申请人： Stan W. Livingston , Jar J. Lee , James H. Schaffner , Robert Y. Loo
发明人： Stan W. Livingston , Jar J. Lee , James H. Schaffner , Robert Y. Loo
IPC分类号： H01Q1/42 , H01Q21/00 , H01Q21/06 , H01O13/10
CPC分类号： H01Q1/422 , H01Q21/0093 , H01Q21/064
摘要： A reconfigurable wide band phased array antenna for generating multiple antenna beams for multiple transmit and receive functions. The antenna array comprises multiple long non-resonant TEM slot antenna apertures with RF MEMS switches disposed within the slots. The RF MEMS switches are positioned directly within the feed lines across the slots to directly control the coupling of RF energy to the slots. Multiple RF MEMS switches are used within each slot, which allows multiple transmit/receive functions and/or multiple frequencies to be supported by each slot. The frequency coverage provided by the slot antenna has a greater than 10:1 frequency range.

20. 发明授权

US06538621B1 Tunable impedance surface 有权
标题翻译：可调阻抗表面
公开(公告)号：US06538621B1
公开(公告)日：2003-03-25
申请号：US09537923
申请日：2000-03-29
申请人： Daniel Sievenpiper , Robin J. Harvey , Greg Tangonan , Robert Y. Loo , James H. Schaffner
发明人： Daniel Sievenpiper , Robin J. Harvey , Greg Tangonan , Robert Y. Loo , James H. Schaffner
IPC分类号： H01Q340
CPC分类号： H01Q15/008 , H01Q3/46 , H01Q9/0442
摘要： A tuneable impedance surface for steering and/or focusing a radio frequency beam. The tunable surface comprises a ground plane; a plurality of elements disposed a distance from the ground plane, the distance being less than a wavelength of the radio frequency beam; and a capacitor arrangement for controllably varying the capacitance of at least selected ones of adjacent elements. A method of tuning the high impedance surface allows the surface to mimic, for example, a parabolic reflector or a diffraction grating.
摘要翻译：用于转向和/或聚焦射频波束的可调阻抗表面。可调表面包括接地平面; 多个元件，其设置成距离所述接地平面一定距离，所述距离小于所述射频波长的波长; 以及用于可控地改变相邻元件中至少选定的元件的电容的电容器装置。调谐高阻抗表面的方法允许表面模拟例如抛物面反射器或衍射光栅。

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