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11. 发明公开

EP3140628A1 SYSTEM UND VERFAHREN ZUR ANALYSE EINES VON EINER STRAHLFÜHRUNGSOPTIK GEFÜHRTEN LICHTSTRAHLS 有权
标题翻译：系统和方法的指导束看出来梁分析
公开(公告)号：EP3140628A1
公开(公告)日：2017-03-15
申请号：EP15724539.0
申请日：2015-05-08
申请人： Carl Zeiss SMT GmbH
发明人： MANGER, Matthias , BAUMER, Florian
IPC分类号： G01J1/42 , H01S3/00 , G01J1/04 , B23K26/30 , H05G2/00
CPC分类号： G01J1/4257 , B23K26/705 , G01J1/0418 , G02B5/205 , H05G2/005 , H05G2/008
摘要： The invention relates to a system and to a method for analyzing a light beam conducted by a beam-conducting optical unit. A system according to the invention comprises a graduated neutral-density filter assembly (120, 520), which is arranged in a far-field plane of the beam-conducting optical unit and has at least one graduated neutral-density filter (121, 521, 522, 523) having spatially varying transmittance, and a light intensity sensor assembly having at least one light intensity sensor (140, 540), which light intensity sensor assembly is arranged in a near-field plane of the beam-conducting optical unit and measures (141, 541, 542, 543), for each graduated neutral-density filter (121, 521, 522, 523) of the graduated neutral-density filter assembly (120, 520), the light intensity transmitted by the graduated neutral-density filter.
摘要翻译：一种系统，以及用于分析由光束引导光学单元引导的光束的方法。该系统具有一个在光束的远场平面布置导光光学单元和具有至少一个刻度中性密度滤光器（121，521，522，523）具有在空间上有刻度的中性密度过滤器装置（120，520），在所有变化的传输，和具有光强度传感器布置，其在束的近场平面布置导光光学单元和被配置成测量至少一个光强度传感器（140，540），全部（141，541，542，543）一个用于每个刻度刻度中性密度过滤器装置（120，520），由每个mitted的光强度反式中性密度滤光器（121，521，522，523）毕业中性密度滤光片。

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