会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 19. 发明申请
    • MAGNETIC MEMORY CELL JUNCTION AND METHOD FOR FORMING A MAGNETIC MEMORY CELL JUNCTION
    • 用于形成磁记忆细胞结的磁记忆体细胞连接和方法
    • WO2004079744A2
    • 2004-09-16
    • PCT/US2004/006149
    • 2004-03-02
    • SILICON MAGNETIC SYSTEMSCHEN, Eugene, Y.OUNADJELA, KamelKULA, WitoldWOLFMAN, Jerome, S.
    • CHEN, Eugene, Y.OUNADJELA, KamelKULA, WitoldWOLFMAN, Jerome, S.
    • G11C
    • H01L43/12B82Y10/00H01L27/228
    • A method for patterning a magnetic memory cell junction is provided herein, which includes etching exposed portions of a stack of layers to a level spaced above a tunneling barrier layer of the stack of layers. In addition, the method may include implanting dopants into exposed portions of the stack of layers. For example, the method may include oxidizing and/or nitriding the exposed portions of the stack of layers. In some embodiments, the steps of etching and implanting dopants may form an upper portion of the magnetic cell junction. Alternatively, the method may include alternating the steps of etching and implanting dopants throughout the thickness of the exposed portions of the stack of layers. In either case, the stack of layers may include a magnetic layer which includes a material adapted to prevent the introduction of dopants underlying the tunneling barrier layer during the step of implanting.
    • 本文提供了用于图案化磁存储器单元结的方法,其包括将一叠层的暴露部分蚀刻到层叠层的隧道势垒层上方的水平面上。 此外,该方法可以包括将掺杂剂注入到层叠层的暴露部分中。 例如,该方法可以包括氧化和/或氮化层叠层的暴露部分。 在一些实施例中,蚀刻和注入掺杂剂的步骤可以形成磁性细胞结的上部。 或者,该方法可以包括在堆叠层的暴露部分的整个厚度上交替蚀刻和注入掺杂剂的步骤。 在任一情况下,层叠层可以包括磁性层,其包括适于防止在植入步骤期间引入隧道势垒层下方的掺杂剂的材料。