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    • 13. 发明申请
    • POWER MOSFET DEVICE STRUCTURE FOR HIGH FREQUENCY APPLICATIONS
    • 功率MOSFET器件结构高频应用
    • US20160247899A1
    • 2016-08-25
    • US14629229
    • 2015-02-23
    • Anup BhallaDaniel NgTiesheng LiSik K. Lui
    • Anup BhallaDaniel NgTiesheng LiSik K. Lui
    • H01L29/66H01L29/06H01L29/10H01L29/423H01L21/3213H01L29/08
    • H01L29/66712H01L29/0878H01L29/1095H01L29/402H01L29/41741H01L29/41775H01L29/42368H01L29/42372H01L29/42376H01L29/66719H01L29/66727H01L29/7802H01L29/7811H01L29/7827
    • This invention discloses a new switching device supported on a semiconductor that includes a drain disposed on a first surface and a source region disposed near a second surface of said semiconductor opposite the first surface. The switching device further includes an insulated gate electrode disposed on top of the second surface for controlling a source to drain current. The switching device further includes a source electrode interposed into the insulated gate electrode for substantially preventing a coupling of an electrical field between the gate electrode and an epitaxial region underneath the insulated gate electrode. The source electrode further covers and extends over the insulated gate for covering an area on the second surface of the semiconductor to contact the source region. The semiconductor substrate further includes an epitaxial layer disposed above and having a different dopant concentration than the drain region. The insulated gate electrode further includes an insulation layer for insulating the gate electrode from the source electrode wherein the insulation layer having a thickness depending on a Vgsmax rating of the vertical power device.
    • 本发明公开了一种支撑在半导体上的新开关装置,其包括设置在第一表面上的漏极和设置在与第一表面相对的所述半导体的第二表面附近的源极区域。 开关装置还包括设置在第二表面顶部的用于控制源极到漏极电流的绝缘栅电极。 开关装置还包括插入到绝缘栅电极中的源电极,用于基本上防止栅电极和绝缘栅电极下方的外延区之间的电场的耦合。 源电极进一步覆盖并延伸在绝缘栅上,以覆盖半导体的第二表面上的区域以接触源区。 半导体衬底还包括设置在漏极区以上且具有与漏极区不同的掺杂浓度的外延层。 绝缘栅电极还包括用于使栅电极与源电极绝缘的绝缘层,其中绝缘层的厚度取决于垂直功率器件的Vgsmax等级。
    • 17. 发明授权
    • Power MOSFET device structure for high frequency applications
    • 功率MOSFET器件结构用于高频应用
    • US08163618B2
    • 2012-04-24
    • US12658450
    • 2010-02-09
    • Anup BhallaDaniel NgTiesheng LiSik K. Lui
    • Anup BhallaDaniel NgTiesheng LiSik K. Lui
    • H01L21/336
    • H01L29/66712H01L29/0878H01L29/1095H01L29/402H01L29/41741H01L29/41775H01L29/42368H01L29/42372H01L29/42376H01L29/66719H01L29/66727H01L29/7802H01L29/7811H01L29/7827
    • This invention discloses a new switching device supported on a semiconductor that includes a drain disposed on a first surface and a source region disposed near a second surface of said semiconductor opposite the first surface. The switching device further includes an insulated gate electrode disposed on top of the second surface for controlling a source to drain current. The switching device further includes a source electrode interposed into the insulated gate electrode for substantially preventing a coupling of an electrical field between the gate electrode and an epitaxial region underneath the insulated gate electrode. The source electrode further covers and extends over the insulated gate for covering an area on the second surface of the semiconductor to contact the source region. The semiconductor substrate further includes an epitaxial layer disposed above and having a different dopant concentration than the drain region. The insulated gate electrode further includes an insulation layer for insulating the gate electrode from the source electrode wherein the insulation layer having a thickness depending on a Vgsmax rating of the vertical power device.
    • 本发明公开了一种支撑在半导体上的新开关装置,其包括设置在第一表面上的漏极和设置在与第一表面相对的所述半导体的第二表面附近的源极区域。 开关装置还包括设置在第二表面顶部的用于控制源极到漏极电流的绝缘栅电极。 开关装置还包括插入到绝缘栅电极中的源电极,用于基本上防止栅电极和绝缘栅电极下方的外延区之间的电场的耦合。 源电极进一步覆盖并延伸在绝缘栅上,以覆盖半导体的第二表面上的区域以接触源区。 半导体衬底还包括设置在漏极区以上且具有与漏极区不同的掺杂浓度的外延层。 绝缘栅电极还包括用于使栅电极与源电极绝缘的绝缘层,其中绝缘层的厚度取决于垂直功率器件的Vgsmax等级。