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    • 13. 发明授权
    • Diamond like carbon coating of substrate housings
    • 钻石像碳涂层的基板外壳
    • US08012586B2
    • 2011-09-06
    • US12515606
    • 2007-06-14
    • Charles W. ExtrandSung In Moon
    • Charles W. ExtrandSung In Moon
    • B09B3/00H01L23/58
    • C09D1/00C23C16/26G06Q30/0283G06Q99/00H05K5/069Y10T428/1379Y10T428/30Y10T428/31507
    • Embodiments of the invention include articles comprising a diamond like carbon coating or doped diamond like carbon coating on one or more surfaces of a plastic substrate or a plastic enclosure. Embodiments of the DLC or doped DLC coatings reduce the gas permeation of the coated plastic or thermoplastic to hydrogen or helium compared to the permeability of the plastic alone. The DLC or doped DLC coatings coating provides a surface resistivity of from about 107 to about 1014 ohm/square and have a transmittance that range from about 0% to about 70% less than the transmittance of the underlying plastic substrate in the range of about 300 nm to about 1100 nm. The DLC coated plastic can be used in environmental enclosures for protecting environmentally sensitive substrates such as semiconductor wafers and reticles.
    • 本发明的实施方案包括在塑料基材或塑料外壳的一个或多个表面上包含类金刚石碳涂层或掺杂类金刚石碳涂层的制品。 与单独的塑料的渗透性相比,DLC或掺杂的DLC涂层的实施例减少了涂覆的塑料或热塑性材料对氢或氦的气体渗透。 DLC或掺杂的DLC涂层涂层提供约107至约1014欧姆/平方的表面电阻率,并且具有比下面的塑料基底的透射率在约300范围内的约0%至约70%的透射率 nm至约1100nm。 DLC涂覆的塑料可用于环境外壳中,用于保护环境敏感的基材,如半导体晶片和标线片。
    • 14. 发明申请
    • ARTICLES COMPRISING WETTABLE STRUCTURED SURFACES
    • 包含可湿性结构表面的文章
    • US20100136289A1
    • 2010-06-03
    • US12600670
    • 2008-05-19
    • Charles W. ExtrandSung In Moon
    • Charles W. ExtrandSung In Moon
    • B32B3/10
    • H01M8/0202Y10T428/24355
    • Embodiments of the invention include or comprise super wetting structured surfaces having one or more asperities, sometimes referred to as hemi-wicking. Structured substrates with regular arrays of asperities such as square pillars or frustra were machined from graphite blocks and then treated to render them lyophilic. Liquids spread over these surfaces to produce non-circular wetting areas. As the channels formed between the asperities were made shallower or narrower, liquids wicked more and spread over a larger area. The inherent wettability of the substrate was independent or nearly independent of the substrate. A combination of the appropriate surface structure and moderate inherent wettability can effectively flatten liquids, spreading them over very large areas.
    • 本发明的实施例包括或包括具有一个或多个凹凸的超润湿结构化表面,有时称为半芯吸。 具有规则阵列的诸如方柱或frustra的具有规则阵列的结构化基底由石墨块加工,然后进行处理以使其具有亲液性。 液体散布在这些表面上以产生非圆形润湿区域。 由于凹凸之间形成的沟道变得更浅或更窄,液体会越来越多,越来越大。 衬底的固有润湿性是独立的或几乎不依赖于衬底。 合适的表面结构和适度固有的润湿性的组合可以有效地使液体平坦化,将其铺展在非常大的区域上。
    • 16. 发明授权
    • Tray carrier with ultraphobic surfaces
    • 具有超疏水表面的托盘载体
    • US06938774B2
    • 2005-09-06
    • US10454740
    • 2003-06-03
    • Charles W. Extrand
    • Charles W. Extrand
    • B01L3/00B01L9/00B01L99/00B08B17/06F15D1/06H01L21/673B65D1/36A47F7/00B65D85/48
    • B01L3/502707B01L3/5027B01L9/52B01L9/527B01L2300/166B08B17/06B08B17/065B65G2201/0258F15D1/065
    • A tray carrier with ultraphobic surfaces for promoting more effective cleaning and drying of the tray carrier. In the invention, entire surfaces or portions of surfaces of a tray carrier are made ultraphobic. The ultraphobic surfaces of the tray carrier cause liquids that may come in contact with the surface, such as may be used in cleaning, to quickly and easily “roll off” without leaving a liquid film or substantial quantity of liquid droplets. As a result, less time and energy is expended in drying the surfaces, and redeposited residue is minimized, thereby improving overall process quality and facilitating economical reuse of the tray carrier. In addition, the ultraphobic surfaces may be resistant to initial deposition of contaminants, where the contaminants may be in liquid or vapor form.
    • 具有超疏水表面的托盘托架,用于促进托盘托架的更有效的清洁和干燥。 在本发明中,托盘托架的整个表面或表面的一部分被制成超疏水。 托盘托架的超疏水表面引起可能与表面接触的液体,例如可用于清洁,以快速且容易地“滚脱”而不留下液膜或大量的液滴。 因此,在干燥表面时花费的时间和精力更少,并且重新沉积的残余物被最小化,从而提高整体工艺质量并促进托盘载体的经济再利用。 此外,超疏水表面可以抵抗污染物的初始沉积,其中污染物可以是液体或蒸气形式。