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    • 20. 发明授权
    • Integration of a SiGe- or SiGeC-based HBT with a SiGe- or SiGeC-strapped semiconductor device
    • 基于SiGe或SiGeC的HBT与SiGe或SiGeC带状半导体器件的集成
    • US07705426B2
    • 2010-04-27
    • US11558480
    • 2006-11-10
    • Steven Voldman
    • Steven Voldman
    • H01L29/10H01L29/737
    • H01L27/0635H01L21/8249H01L27/10894H01L27/11H01L2924/0002H01L2924/00
    • The present invention provides an integrated semiconductor device that includes a semiconductor substrate, a first device containing a heterojunction bipolar transistor (HBT) located in a first region of the semiconductor substrate, wherein the HBT includes a base region containing a first portion of a SiGe or SiGeC layer, and a second device located in a second region of the semiconductor substrate, wherein the second device includes an interconnect containing a second portion of the SiGe or SiGeC layer. In a specific embodiment of the present invention, the second device is a memory device including a trench capacitor and a field effect transistor (FET) that are electrically connected together by the second portion of the SiGe or SiGeC layer. Alternatively, the second device is a trench-biased PNPN silicon controlled rectifier (SCR). The present invention also provides a novel reversibly programmable device or a novel memory device formed by a novel trench-biased SCR device.
    • 本发明提供一种集成半导体器件,其包括半导体衬底,含有位于半导体衬底的第一区域中的异质结双极晶体管(HBT)的第一器件,其中HBT包括含有SiGe的第一部分的基极区域或 SiGeC层和位于半导体衬底的第二区域中的第二器件,其中第二器件包括含有SiGe或SiGeC层的第二部分的互连。 在本发明的具体实施例中,第二器件是包括通过SiGe或SiGeC层的第二部分电连接在一起的沟槽电容器和场效应晶体管(FET)的存储器件。 或者,第二器件是沟槽偏置PNPN可硅可控整流器(SCR)。 本发明还提供了一种新颖的可逆编程装置或由新颖的沟槽偏置SCR装置形成的新型存储装置。