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11. 发明授权

US06593581B2 Object carrier for a particle-optical apparatus 有权
标题翻译：粒子光学仪器的物体载体
公开(公告)号：US06593581B2
公开(公告)日：2003-07-15
申请号：US09767570
申请日：2001-01-23
申请人： Albert Visscher
发明人： Albert Visscher
IPC分类号： G21K510
CPC分类号： H01L21/6875 , H01J37/20 , H01J2237/0216
摘要： Objects such as semiconductor wafers to be studied in a scanning electron microscope (SEM) are subject to vibrations which are intensified by vibration resonance of the (thin) wafer, so that the resolution of the SEM is severely degraded. In prior art it is known to support the wafer by means of elastic support members. However, such support members do not counteract the detrimental vibrations. According to the invention there are provided elastic support elements 28 that can accommodate to the inevitable shape errors of the wafer 18 and hence remain in contact with the wafer surface 32. Moreover, the support elements are embodied in such a manner that frictional contact exists between the moving part 38 of the support element and the body 34 of the object carrier 20. The support elements thus provide support which is elastic for macroscopic support but hard for the vibrational movements in the nanometer range, thus inhibiting such vibrational movements.
摘要翻译：在扫描电子显微镜（SEM）中研究的诸如半导体晶片的物体受到由（薄）晶片的振动共振而增强的振动，使得SEM的分辨率严重劣化。在现有技术中，已知通过弹性支撑构件支撑晶片。然而，这种支撑构件不能抵消有害振动。根据本发明，提供了可以适应晶片18的不可避免的形状误差并且因此保持与晶片表面32接触的弹性支撑元件28.此外，支撑元件以这样的方式实现：摩擦接触存在于支撑元件的移动部分38和物体载体20的主体34.因此，支撑元件提供对宏观支撑弹性的支撑，但对于纳米范围内的振动运动是困难的，从而抑制这种振动运动。

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