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    • 16. 发明授权
    • Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes
    • 具有远场光学显微镜透明接口的多板尖端或样品扫描可重构扫描探针显微镜
    • US07047796B2
    • 2006-05-23
    • US10487391
    • 2002-08-27
    • Aaron LewisAnatoly KomissarHisham TahaAlexander Ratner
    • Aaron LewisAnatoly KomissarHisham TahaAlexander Ratner
    • G01N13/10G12B21/20G12B21/22
    • G01Q70/02G01Q20/02G01Q30/025G01Q30/10G01Q60/38
    • The invention is directed to a scanned probe microscope including one plate allowing for tip scanning and the other allowing for sample scanning, with the optical axis of the scanned probe microscope being free to permit incorporation into standard optical microscopes. The top plate can be hinged onto the bottom plate, or the top plate can simply be placed on the bottom plate and a rough approach is caused by a dc motor or other mechanism which will enable the two flat plate scanners to have a large z range. In another embodiment, the microscope includes three plates which allow sample scanning, tip scanning and two tips to be operational at the same time.A microscope in accordance with the invention may use a liquid cell, may use a near-field optical element made of silicon cantilever technology, or may use an apertureless probe for apertureless near-field scanning optical microscopy.The microscope may use a tuning fork for feedback in any combination of geometries of tip, sample and tuning fork and with or without gluing of the tip to the tuning fork and with control of tip attachment or near-attachment to the tuning fork. The control of tip attachment to the tuning fork may be based on near zero backlash movement technology, and the tuning fork can be used in non-contact, contact and intermittent contact modes of operation. A fiber based feedback system may use either straight or cantilevered fibers, and the detection of signals may be based on amplitude, phase, wavelength or other optical parameters that can be used to monitor the movement of an SPM sensor.
    • 本发明涉及一种扫描探针显微镜,其包括允许尖端扫描的一个板,另一个允许进行样品扫描,扫描的探针显微镜的光轴可自由地允许并入标准的光学显微镜。 顶板可以铰接到底板上,或者顶板可以简单地放置在底板上,并且通过直流电动机或其他机构引起粗略的接近,这将使两个平板扫描器具有大的z范围 。 在另一个实施例中,显微镜包括三个板,其允许样本扫描,提示扫描和两个尖端同时操作。 根据本发明的显微镜可以使用液体池,可以使用由硅悬臂技术制成的近场光学元件,或者可以使用无孔探针来进行无孔近场扫描光学显微镜。 显微镜可以使用音叉以尖端,样品和音叉的几何形状的任何组合进行反馈,并且具有或不具有尖端到音叉的粘合以及控制尖端连接或附近到音叉的附近。 对音叉的尖端附件的控制可以基于接近零的间隙移动技术,并且音叉可以以非接触式,接触式和间歇式接触操作模式使用。 基于光纤的反馈系统可以使用直的或悬臂的光纤,并且信号的检测可以基于可用于监视SPM传感器的运动的幅度,相位,波长或其他光学参数。