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11. 发明申请

WO2004052506A2 METHOD AND APPARATUS FOR THE ABATEMENT OF TOXIC GAS COMPONENTS FROM A SEMICONDUCTOR MANUFACTURING PROCESS EFFLUENT STREAM 审中-公开
标题翻译：来自半导体制造工艺流程的毒性气体组分的方法和装置
公开(公告)号：WO2004052506A2
公开(公告)日：2004-06-24
申请号：PCT/US0338030
申请日：2003-12-01
申请人： ADVANCED TECH MATERIALS
发明人： SWEENEY JOSEPH D , MARGANSKI PAUL J , OLANDER W KARL , WANG LUPING
IPC分类号： B01D53/04 , B01D53/02
CPC分类号： B01D53/0407 , B01D2253/10 , B01D2253/112 , B01D2253/304 , B01D2257/2022 , B01D2257/2025 , B01D2257/2027 , B01D2257/204 , B01D2257/2042 , B01D2257/2045 , B01D2257/2047 , B01D2257/206 , B01D2257/406 , B01D2257/70 , B01D2258/0216 , B01D2259/4146
摘要： An apparatus and process for abating at least one acid or hydride gas component or by-product thereof, from an effluent stream deriving from a semiconductor manufacturing process, comprising, a first sorbent bed material having a high capacity sorbent affinity for the acid or hydride gas component, a second and discreet sorbent bed material having a high capture rate sorbent affinity for the same gas component, and a flow path joining the process in gas flow communication with the sorbent bed materials such that effluent is flowed through the sorbent beds, to reduce the acid or hydride gas component. The first sorbent bed material preferably comprises basic copper carbonate and the second sorbent bed preferably comprises at least one of, CuO, AgO, CoO, Co3O4, ZnO, MnO2 and mixtures thereof.
摘要翻译：一种用于从源自半导体制造方法的流出物流中减轻至少一种酸或氢气体组分或其副产物的装置和方法，包括：具有对酸或氢化物气体具有高容量吸附剂亲和性的第一吸附剂床材料组分，具有对相同气体组分的高捕获率吸附剂亲和力的第二和离散的吸附剂床材料，以及将流程连接到与吸附剂床材料气流连通的流路，使得流出物流过吸附剂床，以减少酸或氢气组分。第一吸附剂床材料优选包含碱式碳酸铜，第二吸附剂床优选包含CuO，AgO，CoO，Co 3 O 4，ZnO，MnO 2及其混合物中的至少一种。

12. 发明申请

WO9956057B1 FLUID STORAGE AND DISPENSING SYSTEM 审中-公开
标题翻译：流体储存和分配系统
公开(公告)号：WO9956057B1
公开(公告)日：1999-12-29
申请号：PCT/US9909137
申请日：1999-04-28
申请人： ADVANCED TECH MATERIALS
发明人： WANG LUPING , TOM GLENN
IPC分类号： C23C14/24 , C23C16/448 , F17C1/00 , F17C7/00 , F17C7/02 , F17C7/04 , F17C9/02 , F17C11/00 , F17C13/00 , F17C13/02 , F17C13/04 , H01L21/205 , H01L21/265 , H01L21/306
CPC分类号： F17C7/02 , B01D53/0407 , B01D53/0415 , B01D53/053 , B01D2253/10 , B01D2253/102 , B01D2253/104 , B01D2253/106 , B01D2253/1085 , B01D2253/202 , B01D2258/0216 , B01D2259/40003 , B01D2259/4009 , B01D2259/40094 , B01D2259/40098 , B01D2259/4525 , B01D2259/455 , B01J20/20 , F17C1/00 , F17C7/00 , F17C11/00 , F17C11/005 , F17C13/02 , F17C13/025 , F17C13/04 , F17C13/045 , F17C2201/0109 , F17C2201/0114 , F17C2201/058 , F17C2205/0329 , F17C2205/0338 , F17C2205/0341 , F17C2205/035 , F17C2205/0385 , F17C2205/0391 , F17C2223/0123 , F17C2223/033 , F17C2223/035 , F17C2250/043 , F17C2270/0518 , F17D1/04 , Y02E60/321
摘要： A fluid storage and dispensing system (10) comprising a vessel (12) for holding a fluid (17) at a desired pressure. The vessel has a pressure regulator (26) set at a predetermined pressure. The regulator may be interiorly or exteriorly positioned, single-staged or multi-staged, and is associated with a port of the vessel. A dispensing assembly, e.g., including a flow control means such as a valve (20), is arranged in gas/vapor flow communication with the regulator (26), whereby the opening of the valve effects dispensing of gas/vapor from the vessel (12). The fluid in the vessel may be constituted by a liquid that is confined in the vessel at a pressure in excess of its liquefaction pressure at prevailing temperature conditions, e.g., ambient (room) temperature.
摘要翻译：流体存储和分配系统（10）包括用于将流体（17）保持在期望压力的容器（12）。容器具有设定在预定压力的压力调节器（26）。调节器可以在内部或外部定位，单级或多级，并且与容器的端口相关联。例如，包括诸如阀（20）的流量控制装置的分配组件布置成与调节器（26）气体/蒸汽流连通，由此阀的开口实现从容器中分配气体/蒸汽（ 12）。容器中的流体可以由在主要温度条件例如环境（室内）温度下在超过其液化压力的压力下限制在容器中的液体构成。

13. 发明专利

DE69941737D1 未知
公开(公告)号：DE69941737D1
公开(公告)日：2010-01-07
申请号：DE69941737
申请日：1999-04-28
申请人： ADVANCED TECH MATERIALS
发明人： WANG LUPING , TOM GLENN
IPC分类号： F17C7/04 , C23C14/24 , C23C16/448 , F17C1/00 , F17C7/00 , F17C7/02 , F17C9/02 , F17C11/00 , F17C13/00 , F17C13/02 , F17C13/04 , H01L21/205 , H01L21/265 , H01L21/306
摘要： A fluid storage and dispensing system (10) comprising a vessel (12) for holding a fluid (17) at a desired pressure. The vessel has a pressure regulator (26) set at a predetermined pressure. The regulator may be interiorly or exteriorly positioned, single-staged or multi-staged, and is associated with a port of the vessel. A dispensing assembly, e.g. including a flow control means such as a valve (20), is arranged in gas/vapor flow communication with the regulator (26), whereby the opening of the valve effects dispensing of gas/vapor from the vessel (12). The fluid in the vessel may be constituted by a liquid that is confined in the vessel at a pressure in excess of its liquefaction pressure at prevailing temperature conditions, e.g. ambient (room) temperature.

14. 发明专利

SG152060A1 PRESSURE-BASED GAS DELIVERY SYSTEM AND METHOD FOR REDUCING RISKS ASSOCIATED WITH STORAGE AND DELIVERY OF HIGH PRESSURE GASES 未知
公开(公告)号：SG152060A1
公开(公告)日：2009-05-29
申请号：SG2006085476
申请日：2003-05-29
申请人： ADVANCED TECH MATERIALS
发明人： OLANDER KARL W , DONATUCCI MATTHEW B , WANG LUPING , WODJENSKI MICHAEL J
IPC分类号： F17C7/00 , F17C5/00 , B08B5/00 , G05B11/01 , G06F15/00
摘要： Apparatus and method for dispensing a gas using a gas source (102) coupled in selective flow relationship with a gas manifold (126). The gas manifold (126) including flow circuitry (110) for discharging gas to a gas-using zone, and the gas source (126) includes a pressure-regulated gas source vessel (126) containing the gas at superatomospheric pressure.

15. 发明专利

MY126276A FLUID STORAGE AND DELIVERY SYSTEM UTILIZING LOW HEELS CARBON SORBENT MEDIUM 未知
公开(公告)号：MY126276A
公开(公告)日：2006-09-29
申请号：MYPI20023913
申请日：2002-10-21
申请人： ADVANCED TECH MATERIALS
发明人： WANG LUPING , SALSBURY JOSEPH
IPC分类号： B01D53/04 , B01J20/20
摘要： A FLUID STORAGE AND DISPENSING SYSTEM INCLUDING A VESSEL CONTAINING A LOW HEEL CARBON SORBENT HAVING FLUID ADSORBED THEREON, WITH THE SYSTEM ARRANGED TO EFFECT DESORPTION OF THE FLUID FROM THE SORBENT FOR DISPENSING OF FLUID ON DEMAND. THE LOW HEEL CARBON SORBENT PREFERABLY IS CHARACTERISZED BY AT LEAST ONE OF THE FOLLOWING CHARACTERISTICS: (i) HELL, MEASURED FOR GASEOUS ARSINE (AsH3) AT 20°C AT 20 TORR, OF NOT MORE THAN 50 GRAMS AsH3 PER LITER OF BED OF THE SORBENT MATERIAL;(ii0 HEEL, MEASURED FOR GASEOUS BORON TRIFLUORIDE (BF3) AT 20°C AT 20 TORR, OF NOT MORE THAN 20 GRAM BORON TRIFLUORIDE PER LITER OF BED THE SORBENT MATERIAL;(iii) HEEL, MEASURED FOR GASEOUS GERMANIUM TETRAFLURIDE (GeF4) AT 20° AT 20 TORR, OF NOT MORE THAN 250 GRAMS AsH3 PER LITER OF BED OF THE SORBENT MATERIAL; (iv) HEEL, MEASURED FOR GASEOUS ARSENIC PENTAFLUROIDE (AsF5) AT 20°C AT 20 TORR, OF NOT MORE THAN 700 GRAMS AsF5 PER LITER OF BED OF THE SORBENT MATERIAL; (v) HEEL, MEASURED FOR GASEOUS TRIMETHYL SILANE (3MS) AT 20°C AT 20 TORR, OF NOT MORE THAN 160 GRAMS 3MS PER LITER OF BED OF THE SORBENT MATERIAL; AND (vi) HEEL, MEASURED FOR GASEOUS ETHANE (C2H4) AT 21°C AT 25 TORR, OF NOT MORE THAN 10 GRAMS ETHANE PER LITER OF BED OF THE SORBENT MATERIAL. (FIG.6)

16. 发明专利

MY122718A GAS STORAGE AND DISPENSING SYSTEM COMPRISING REGULATOR INTERIORLY DISPOSED IN FLUID CONTAINMENT VESSEL AND ADJUSTABLE IN SITU THEREIN. 未知
公开(公告)号：MY122718A
公开(公告)日：2006-04-29
申请号：MYPI20011823
申请日：2001-04-17
申请人： ADVANCED TECH MATERIALS
发明人： WANG LUPING , TOM GLENN M
IPC分类号： F17C11/00 , F17C13/00 , F17C1/00 , F17C7/00 , F17C9/02 , F17C13/02 , F17C13/04
摘要： A GAS STORAGE AND DISPENSING SYSTEM (100) COMPRISING A VESSEL (102) FOR HOLDING A GAS AT A DESIRED PRESSURE. THE VESSEL (102) HAS A GAS PRESSURE REGULATOR (132) IN ITS INTERIOR VOLUME (128), TO MAINTAIN PRESSURE OF DISPENSED GAS AT A DESIRED PRESSURE DETERMINED BY THE SET POINT OF THE REGULATOR (132). A SECOND GAS PRESSURE REGULATOR MAY BE JOINED IN SERIES GAS FLOW COMMUNICATION WITH THE FIRST GAS PRESSURE REGULATOR (132), WITH THE SECOND GAS PRESSURE REGULATOR BEING IN INITIAL CONTACT WITH GAS THAT IS DISPENSED PRIOR TO ITS FLOW THROUGH THE FIRST GAS PRESSURE REGULATOR (132), AND WITH THE SET POINT PRESSURE OF THE SECOND GAS PRESSURE REGULATOR BEING AT LEAST TWICE THE SET POINT PRESSURE OF THE FIRST GAS PRESSURE REGULATOR (132).

17. 发明专利

AU2003286671A1 APPARATUS AND METHOD FOR INHIBITING DECOMPOSITION OF GERMANE 未知
公开(公告)号：AU2003286671A1
公开(公告)日：2004-05-25
申请号：AU2003286671
申请日：2003-10-27
申请人： ADVANCED TECH MATERIALS
发明人： STURM EDWARD , WANG LUPING , DIETZ JAMES
IPC分类号： B01D53/04 , B01D53/02 , B01D59/26
摘要： A germane storage and dispensing system, in which germane gas is sorptively retained on an activated carbon sorbent medium in a vessel containing adsorbed and free germane gas. The activated carbon sorbent medium is deflagration-resistant in relation to the germane gas adsorbed thereon, i.e., under deflagration conditions of 65° C. and 650 torr, under which free germane gas undergoes deflagration, the activated carbon sorbent medium does not sustain deflagration of the adsorbed germane gas or thermally desorb the germane gas so that it undergoes subsequent deflagration. The deflagration-resistance of the activated carbon sorbent medium is promoted by pre-treatment of the sorbent material to remove extraneous sorbables therefrom and by maintaining the fill level of the sorbent medium in the gas storage and dispensing vessel at a substantial value, e.g., of at least 30%.

18. 发明专利

AU2002352849A1 VAPORISER/DELIVERY VESSEL FOR VOLATILE/THERMALLY SENSITIVE SOLID AND LIQUID COMPOUNDS 未知
公开(公告)号：AU2002352849A1
公开(公告)日：2003-06-30
申请号：AU2002352849
申请日：2002-11-21
申请人： ADVANCED TECH MATERIALS
发明人： DONATUCCI MATTHEW B , WANG LUPING , MAYER JAMES
IPC分类号： C23C16/448 , H01L21/02 , H01L21/265 , C23C14/24 , C23C16/00
摘要： A vaporizer system for vaporizing solid and/or liquid chemical source materials under uniform heating conditions within the vaporizer system, with reduced condensation of vaporized source materials and minimization of "cold spots" within the vaporizer, to provide a substantially continuous flow of vapor to a downstream implantation or deposition (e.g., MOCVD) system. The vaporizer includes a thermally conductive block having a multiplicity of elongated wells formed therein for holding a vapor source material. Within the thermally conductive block is an interior volume communicating with the elongated wells. The thermally conductive block is sealed to form a closed vessel and heat is applied thereto to evenly heat all the elongated wells simultaneously and vaporize the source material therein.

19. 发明专利

ES2335592T3 SISTEMA DE ALMACENAMIENTO Y DISPENSACION DE FLUIDOS. 未知
公开(公告)号：ES2335592T3
公开(公告)日：2010-03-30
申请号：ES05017857
申请日：1999-04-28
申请人： ADVANCED TECH MATERIALS
发明人： WANG LUPING , TOM GLENN
IPC分类号： F17C7/04 , C23C14/24 , C23C16/448 , F17C1/00 , F17C7/00 , F17C7/02 , F17C9/02 , F17C11/00 , F17C13/00 , F17C13/02 , F17C13/04 , H01L21/205 , H01L21/265 , H01L21/306
摘要： Un dispositivo (10, 110, 300) de almacenamiento y dispensación de fluidos que comprende: un recipiente (12, 112, 302) de almacenamiento y dispensación de fluidos para contener fluido a presión y que tiene una boca de salida; y un regulador de presión (26, 232) que incluye una válvula montada en dicho recipiente aguas arriba de, y en comunicación con, dicha boca, caracterizado porque: dicha válvula se mantiene cerrada para impedir que el fluido sea dispensado por dicha boca hasta que dicho regulador de presión reciba gas a presión subatmosférica a través de dicha boca desde aguas abajo del mismo, y se abre en respuesta a la recepción de dicho gas a presión subatmosférica.

20. 发明专利

DK1610053T3 System til opbevaring og afgivelse af fluidum 未知
公开(公告)号：DK1610053T3
公开(公告)日：2010-01-18
申请号：DK05017857
申请日：1999-04-28
申请人： ADVANCED TECH MATERIALS
发明人： WANG LUPING , TOM GLENN
IPC分类号： F17C7/04 , C23C14/24 , C23C16/448 , F17C1/00 , F17C7/00 , F17C7/02 , F17C9/02 , F17C11/00 , F17C13/00 , F17C13/02 , F17C13/04 , H01L21/205 , H01L21/265 , H01L21/306

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