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    • 13. 发明公开
    • 캐필러리 자동 교체시스템
    • 自动切换毛巾的系统
    • KR1020130051866A
    • 2013-05-21
    • KR1020120031093
    • 2012-03-27
    • 주식회사 일원
    • 최영규
    • H01L21/60
    • H01L24/78H01L2224/45144H01L2224/78301H01L2224/78308H01L2924/00014H01L2924/00H01L2224/48
    • PURPOSE: A system for automatically exchanging a capillary is provided to reduce the failure rate of a semiconductor by constantly maintaining the location of the capillary before or after an exchanging process. CONSTITUTION: A capillary supplying and collecting unit(110) supplies or collects a capillary in a clamping loader and selectively grips the capillary. A stopping unit(170) prevents the capillary from excessively rising to the upper side of a clamping unit when a new capillary is supplied to the clamping unit. An unclamping unit(160) mounts or separates the capillary by selectively locking or unlocking the clamping unit. A control unit controls the capillary supply and collection unit and the unclamping unit.
    • 目的:提供一种用于自动更换毛细管的系统,以通过在交换过程之前或之后不断维持毛细管的位置来降低半导体的故障率。 构成:毛细管供应和收集单元(110)在夹紧装载机中提供或收集毛细管并选择性地夹紧毛细管。 当新的毛细管被供给到夹紧单元时,停止单元(170)防止毛细管过度上升到夹紧单元的上​​侧。 松开单元(160)通过选择性地锁定或解锁夹紧单元来安装或分离毛细管。 控制单元控制毛细管供应和收集单元和松开单元。