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    • 11. 发明授权
    • Probe with bi-directional electrostatic actuation
    • 探头采用双向静电驱动
    • US08026732B2
    • 2011-09-27
    • US12272128
    • 2008-11-17
    • Dadi SetiadiWayne Bonin
    • Dadi SetiadiWayne Bonin
    • G01R31/20
    • G01R1/06733G01R1/06716G01R1/06744
    • A probe system that has a probe body comprising at least three arms extending from a central region and a probe tip centrally located on the probe body in the central region. A substrate is proximate the probe body opposite the probe tip. A first electrode is positioned to provide a centrally positioned voltage across the probe body and the substrate and a second electrode set is positioned radially outward from the first electrode, to provide an outer voltage across at least one of the at least three arms and the substrate. The probe structure may have, for example, four arms. Methods of actuating the probe tip are provided.
    • 探针系统,其具有探针体,该探针体包括从中心区域延伸的至少三个臂和在中心区域中心位于探针主体上的探针末端。 衬底靠近与探针尖端相对的探针体。 定位第一电极以提供穿过探针主体和衬底的中心定位的电压,并且第二电极组从第一电极径向向外定位,以提供穿过至少三个臂中的至少一个臂和衬底的外部电压 。 探针结构可以具有例如四个臂。 提供致动探针尖端的方法。
    • 16. 发明申请
    • Gimbal strut shape to increase buckling load
    • 万向支柱形状增加屈曲载荷
    • US20050099732A1
    • 2005-05-12
    • US10702336
    • 2003-11-06
    • Wayne BoninZine-Eddine BoutaghouAdam Himes
    • Wayne BoninZine-Eddine BoutaghouAdam Himes
    • G11B5/48
    • G11B5/4826
    • The present invention includes gimbal having an attachment portion and a head support structure spaced apart from the attachment portion. A first strut connects the attachment portion and the head support structure. The first strut has an increased center portion and two end portions on opposite sides of the center portion. The increased center portion has a greater thickness than the two end portions. The gimbal also includes a second strut spaced apart from the first strut and is connected to the attachment portion and the head support structure. The second strut has an increased center portion and two end portions on opposite sides of the increased center portion. The increased center portion of the second strut has a greater thickness than the two end portions.
    • 本发明包括具有附接部分的万向架和与安装部分间隔开的头部支撑结构。 第一支柱连接附接部分和头部支撑结构。 第一支柱在中心部分的相对侧上具有增加的中心部分和两个端部部分。 增加的中心部分具有比两个端部部分更大的厚度。 万向节还包括与第一支柱间隔开的第二支柱,并连接到附接部分和头部支撑结构。 第二支柱在增加的中心部分的相对侧上具有增加的中心部分和两个端部部分。 第二支柱的增加的中心部分具有比两个端部更大的厚度。