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11. 发明专利

DE69527491D1 未知
公开(公告)号：DE69527491D1
公开(公告)日：2002-08-29
申请号：DE69527491
申请日：1995-11-24
申请人： USHIODENKI KABUSHIKI KAISHA TO
发明人： HIGASHI TADATOSHI , ARIMOTO TOMOYOSHI
IPC分类号： H01J61/073 , H01J61/12 , H01J61/86 , H01J61/82
摘要： Minimization of "color hue" and "flickering" on an irradiated surface such as a screen or the like, is achieved by the fact that, in a metal halide lamp of the short arc type which has a cathode (2) and an anode (1) in which at least rare earth halides and mercury are encapsulated and which is operated with an essentially horizontal discharge direction using direct current power, the cathode (2) has a tungsten electrode shaft (20) about which a tungsten coil (21) is wound, and the relationship 0.029 ) and I the current in steady-state luminous operation (A). In accordance with another aspect of the invention, the lamp is operable with a current I (amperes) in steady-state luminous operation in a range from 1.6 ) 0.045

12. 发明专利

DE69707539D1 未知
公开(公告)号：DE69707539D1
公开(公告)日：2001-11-29
申请号：DE69707539
申请日：1997-03-19
申请人： USHIODENKI KABUSHIKI KAISHA TO
发明人： ARAI TETSUJI , MOROISHI KOUTARO
IPC分类号： G21K5/00 , B01J19/12 , B05C9/14 , B29C35/08 , C08J7/00 , F26B3/28 , B29C59/16
摘要： Treating of a workpiece (W) which frequently undergoes heat-induced changes such as deformation, color changes and the like without using a cooling means for the workpiece (W) is achieved by the fact that, of the light which was incident from a rod-shaped lamp (1) on a trough-shaped cold mirror (2), the ultraviolet light (including some of the visible rays and infrared light) is reflected by the trough-shaped cold mirror (2) and by at least one other cold mirror (4,4',5) which is preferably plate-shaped. Furthermore, of the light which was emitted from the rod-shaped lamp (1) and which was incident on the other cold mirror(s) (2,4,4',5), the ultraviolet light (including some of the visible rays and infrared light) is reflected by the other cold mirror(s) (2,4,4',5). The light reflected by the other cold mirror(s) (2,4,4',5) is incident on the plate-shaped heat refraction filter (3) and some of the visible rays are reflected and are incident on a workpiece (W). The light emitted by the rod-shaped lamp (1) is not directly radiated onto the workpiece (W) via the heat refraction filter (3). Therefore, the IR component and the component of the visible rays which are emitted onto the workpiece (W) can be reduced and overheating of the workpiece (W) can be prevented.

13. 发明申请

US20040185082A1 Process for producing a film for controlling the chemotactic function and an artificial material and process for producing the artificial material 有权
标题翻译：用于生产用于控制趋化功能的膜的方法和人造材料以及用于制备人造材料的方法
公开(公告)号：US20040185082A1
公开(公告)日：2004-09-23
申请号：US10802937
申请日：2004-03-18
申请人： Ushiodenki Kabushiki Kaisha
发明人： Shinji Suzuki
IPC分类号： A61L002/00 , A61F002/00 , B05D003/00
CPC分类号： B29C59/16 , B29C35/0894 , B29C2035/0827 , B29C2035/0838 , B82Y30/00 , B82Y40/00 , C08J3/28 , C09J7/38
摘要： A process for producing a film for controlling the chemotactic function in an extremely small area in which a chemotactic factor substance in the area has a concentration gradient in one direction. The invention further includes an artificial material with an arrangement in which, on a substrate, there is a film having a chemotactic factor substance for controlling the chemotactic function which it has a concentration gradient in one direction. The process of the invention includes controlling the amount of irradiation in one direction of the film such that the chemotactic factor substance is degenerated which results in a corresponding concentration gradient of the film in the one direction.
摘要翻译：一种在该区域中的趋化因子物质在一个方向上具有浓度梯度的极小区域中用于控制趋化功能的膜的制备方法。本发明还包括具有这样的布置的人造材料，其中在基底上存在具有用于控制其在一个方向上具有浓度梯度的趋化功能的趋化因子物质的膜。本发明的方法包括控制膜的一个方向上的照射量，使得趋化因子物质退化，导致膜在一个方向上相应的浓度梯度。

14. 发明申请

US20040100196A1 Discharge lamp of the short arc type 失效
标题翻译：短弧型放电灯
公开(公告)号：US20040100196A1
公开(公告)日：2004-05-27
申请号：US10715507
申请日：2003-11-19
申请人： Ushiodenki Kabushiki Kaisha
发明人： Shigeru Chiba
IPC分类号： H01J017/18 , H01J061/36
CPC分类号： H01J61/86 , H01J61/36
摘要： A discharge lamp of the short arc type with high arc stability in which the arc is prevented from fluctuating during operation is achieved by providing a short arc discharge lamp in which the hermetically sealed tubes which extend from the arc tube, and the lead pins located within the arc tube which support the electrodes, are sealed relative to one another by graded glass, and wherein cylindrical retaining bodies are attached concentrically within the hermetically sealed tubes and are penetrated by the lead pins, a metal foil that has several cambers which extend in the axial direction of the lamp being located between the cylindrical retaining bodies and the lead pins.
摘要翻译：具有高电弧稳定性的短弧型放电灯，其中防止电弧在操作期间波动，通过提供一种短弧放电灯实现，其中从电弧管延伸的气密密封管和位于其内的引脚支撑电极的电弧管通过分级玻璃相对于彼此密封，并且其中圆柱形保持体同心地安装在密封管内并被引脚穿过，金属箔具有多个弯曲部，该金属箔在灯的轴向位于圆柱形保持体和引脚之间。

15. 发明申请

US20040004448A1 Device for operating a high pressure discharge lamp 有权
标题翻译：用于操作高压放电灯的装置
公开(公告)号：US20040004448A1
公开(公告)日：2004-01-08
申请号：US10601555
申请日：2003-06-24
申请人： Ushiodenki Kabushiki Kaisha
发明人： Tomoyoshi Arimoto , Yoshikazu Suzuki
IPC分类号： H05B037/02
CPC分类号： H05B41/288 , H05B41/38 , Y10S315/05 , Y10S315/07
摘要： A device which improves the starting of a high pressure discharge lamp containing a large amount of mercury, in which the amount of mercury adhering to the lamp electrodes is not the same, by shortening the formation time of the glow discharge in order to reduce the sputtering of the electrodes to a minimum. When the discharge lamp starts, an AC voltage with rectangular waves produced by the full bridge circuit is applied to the discharge lamp. Next, a high voltage pulse is superimposed and applied by an igniter device; the pulse is synchronized to the polarity of the above described AC voltage with rectangular waves. As a result, an alternating current discharge is started in the discharge lamp. Then, the ON/OFF state of the switching devices in the full bridge circuit is fixed and a direct current voltage is applied to the lamp. After a pre-selected time has expired after the transition into direct current operation, the full bridge circuit is operated such that rectangular alternating current waves form. The AC voltage with rectangular waves is then applied to the discharge lamp and a transition into steady-state operation is carried out.
摘要翻译：通过缩短辉光放电的形成时间以减少溅射，改善包含大量汞的高压放电灯的启动的装置，其中附着在灯电极上的汞量不相同的电极最小。当放电灯启动时，将由全桥电路产生的具有矩形波的AC电压施加到放电灯。接下来，通过点火装置叠加并施加高电压脉冲; 脉冲与矩形波的上述AC电压的极性同步。结果，在放电灯中开始交流放电。然后，全桥电路中的开关器件的ON / OFF状态是固定的，直流电压被施加到灯。在转换成直流运行之后预先选定的时间已经过去之后，全桥电路被运行，使得形成矩形交流电波。然后将具有矩形波的AC电压施加到放电灯，并且进行到稳态操作的转变。

16. 发明申请

US20030201719A1 Discharge lamp 有权
标题翻译：放电灯
公开(公告)号：US20030201719A1
公开(公告)日：2003-10-30
申请号：US10420747
申请日：2003-04-23
申请人： Ushiodenki Kabushiki Kaisha
发明人： Mitsuru Ikeuchi , Katsumi Shojo , Yoichi Kono
IPC分类号： H01J017/04 , H01J061/04
CPC分类号： H01J61/0735 , H01J61/0732 , H01J61/526 , H01J61/86
摘要： A discharge lamp with a high output power in which an increase of the current to be supplied to the discharge lamp can be enabled without the need to enlarge the discharge lamp and the surrounding system. The discharge lamp includes an arc tube having a pair of opposed electrodes, at least one of the electrodes having an electrode body in which a hermetically sealed interior space is formed, and a heat conductor partially filling the hermetically sealed interior space. This heat conductor consists of metal that has a higher thermal conductivity or a lower melting point than the metal comprising the electrode body.
摘要翻译：具有高输出功率的放电灯，其中可以实现提供给放电灯的电流的增加，而不需要放大放电灯和周围系统。放电灯包括具有一对相对电极的电弧管，至少一个电极具有形成密封的内部空间的电极体和部分地填充密封的内部空间的导热体。该导热体由具有比包含电极体的金属更高的导热性或较低熔点的金属组成。

17. 发明申请

US20030117597A1 Device for exposure of a peripheral area 失效
标题翻译：用于外围区域曝光的装置
公开(公告)号：US20030117597A1
公开(公告)日：2003-06-26
申请号：US10151182
申请日：2002-05-21
申请人： Ushiodenki Kabushiki Kaisha
发明人： Masanori Sato , Yutaka Shindo
IPC分类号： G03B027/42
CPC分类号： G03F7/2028
摘要： A device for exposing a peripheral area of a wafer having a photoresist applied thereon is provided in which an irradiation area is prevented from moving in a V-shape in a notch area of the wafer and unnecessary exposure of the wafer is prevented. The device includes an edge determination device, a device for moving the edge determination device, a irradiation moving device and a controller to control the edge determination moving device such that the amount of light received by the light receiving part becomes constant. The controller stops operation of the irradiation moving device when receiving a signal from the edge determination device showing the start of the notch and restarts operation after a given time has passed, or upon receiving a signal indicating the end of the notch.
摘要翻译：提供一种用于暴露其上施加有光致抗蚀剂的晶片的周边区域的装置，其中防止照射区域在晶片的凹口区域中以V形移动，并且防止了晶片的不必要的曝光。该装置包括边缘确定装置，用于移动边缘确定装置的装置，照射移动装置和控制器，以控制边缘确定移动装置，使得由光接收部分接收的光量变得恒定。当接收到来自边缘判定装置的信号显示出开始陷波并且在给定时间过去之后重新开始操作时，或者当接收到指示切口结束的信号时，控制器停止照射移动装置的操作。

18. 发明申请

US20030107320A1 Short-arc, ultra-high pressure discharge lamp 失效
标题翻译：短弧，超高压放电灯
公开(公告)号：US20030107320A1
公开(公告)日：2003-06-12
申请号：US10315942
申请日：2002-12-11
申请人： USHIODENKI KABUSHIKI KAISHA
发明人： Yoshitaka Kanzaki , Masanobu Komiya , Toyohiko Kumada
IPC分类号： H01J017/18
CPC分类号： H01J61/86 , H01J9/326 , H01J61/368
摘要： To reduce and prevent electrode displacement and at the same time to devise an arrangement of the side tube parts with high adhesion, a short-arc, ultra-high pressure discharge lamp a light emitting part in which there is a pair of opposed electrodes and which is filled with at least 0.15 mg/mm3 of mercury is provided with side tube parts which extend from opposite sides of the light emitting part in which the electrodes are partially hermetically sealed and in which the electrodes are each welded in a central valley of a metal foil that has a cross section with an essentially inverted W-shape. The valley and flanking arches or peaks of the W-shape may be serpentine or sinusoidal, trapezoidal, or rectangular in addition to the traditional W-shape having acutely angled corners between straight legs.
摘要翻译：为了减少和防止电极位移，并且同时设计具有高粘附性的侧管部件的布置，短弧超高压放电灯是其中存在一对相对电极的发光部分，并且其中填充有至少0.15mg / mm 3的汞的侧管部分，其从电极部分气密密封的发光部分的相对侧延伸，并且其中电极各自焊接在金属的中心谷部具有基本上倒置的W形截面的箔。除了在直腿之间具有锐角的传统W形外，W形的山谷和侧翼拱或峰可以是蛇形或正弦，梯形或矩形。

19. 发明申请

US20030076040A1 Super-high pressure discharge lamp of the short arc type 有权
标题翻译：短弧型超高压放电灯
公开(公告)号：US20030076040A1
公开(公告)日：2003-04-24
申请号：US10273292
申请日：2002-10-18
申请人： Ushiodenki Kabushiki Kaisha
发明人： Toyohiko Kumada , Yoshitaka Kanzaki , Masanobu Komiya
IPC分类号： H01J017/04 , H01J061/04
CPC分类号： H01J61/86 , H01J61/0732 , H01J61/368
摘要： An arrangement with relatively high pressure tightness in a super-high pressure mercury lamp of the short arc type which is operated with an extremely high mercury vapor pressure is achieved by the super-high pressure mercury lamp having the following characteristic: an arc tube portion in which there is a pair of opposed electrodes, and which is filled with greater than or equal to 0.15 mg/mm3 of mercury; and side tube portions which extend from opposite sides of the arc tube portion, in which the electrodes are partially hermetically enclosed, and in which the electrodes and metal foils are welded to one another, and the width of the metal foils in the weld areas is so small that it is less than or equal to the diameter of these electrodes.
摘要翻译：通过具有以下特征的超高压汞灯，实现了以极高的汞蒸汽压力操作的短弧型超高压汞灯具有相对较高的压力紧密度的装置：其中存在一对相对的电极，并且填充有大于或等于0.15mg / mm 3的汞; 以及侧管部分，其从电弧管部分的相对侧延伸，其中电极部分地被气密地封闭，并且其中电极和金属箔彼此焊接，并且焊接区域中的金属箔的宽度为如此小，以至于它们小于或等于这些电极的直径。

20. 发明申请

US20030017713A1 Workpiece stage of a resist curing device 失效
标题翻译：抗蚀剂固化装置的工件台
公开(公告)号：US20030017713A1
公开(公告)日：2003-01-23
申请号：US10180295
申请日：2002-06-27
申请人： Ushiodenki Kabushiki Kaisha
发明人： Yoshinori Fujiwara , Yasuhiko Kenjo , Yoshihiko Watanabe
IPC分类号： H01L021/31
CPC分类号： G03F7/38 , G03F7/2024 , G03F7/40 , H01L21/67109
摘要： A workpiece stage of a resist curing device is devised in which a workpiece on which a resist has been applied is held on a workpiece stage by vacuum suction, in which the workpiece is irradiated with UV radiation with a simultaneous temperature increase, in which it is cooled after UV radiation and by which the resist is cured, the workpiece stage having heating and cooling arrangements, major warping of the carrier is avoided and reliable holding of the workpiece on the carrier surface by vacuum suction obtained by the carrier being made of an aluminum alloy or a copper alloy which meets the following condition:null/nully3.1null labeling the thermal stress which is determined using the following formula: where E is Young's modulus (N/mm2) at 200null C., null is the coefficient of linear expansion (1/null C.) at 200null C. and nullT is a temperature difference (null C.) of 120null C., and nully is the fracture point at 200null C.
摘要翻译：设计抗蚀剂固化装置的工件台，其中已经施加有抗蚀剂的工件通过真空吸附被保持在工件台上，其中工件被同时升温的UV辐射照射，其中它是紫外线辐射后冷却，抗蚀剂固化，工件台具有加热和冷却布置，避免了载体的主要翘曲，并且通过由载体由铝制成的真空抽吸可靠地将工件保持在载体表面上合金或铜合金，满足以下条件：<段落lvl =“0”> sigma / sigmay3.1 sigma标记使用以下内容确定的热应力公式：其中E是200℃时的杨氏模量（N / mm2），α是在200℃下的线性膨胀系数（1 /℃），并且DELTAT是温度差（℃）为120 ℃，sigmay是断裂点在200°C

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