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    • 17. 发明申请
    • ELLIPSOMETER FOCUSING SYSTEM
    • ELLIPSOMETER聚焦系统
    • WO2012138541A1
    • 2012-10-11
    • PCT/US2012/031222
    • 2012-03-29
    • NANOMETRICS INCORPORATEDBLASENHEIM, Barry J.SHACHAF, Amit
    • BLASENHEIM, Barry J.SHACHAF, Amit
    • G01N21/21G02B7/28
    • G01N21/211G02B7/28
    • An ellipsometer includes an integrated focusing system with a beam splitter between the sample and the ellipsometer detector. The beam splitter provides a portion of the radiation to a lens system that magnifies any deviation from a best focus position by at least 2x. The focusing system includes a 2D sensor, where the spot of light focused on the sensor is 50 percent or smaller than the sensor. The focusing system may further include a compensator to correct optical aberrations caused by the beam splitter. A processor receives an image signal and finds the location of the spot from which focus error can be determined and used to correct the focal position of the ellipsometer. The processor compensates for movement of the spot caused by rotating optics. Additionally, a proportional-integral-derivative controller may be used to control exposure time and/or gain of the camera.
    • 椭偏仪包括在样品和椭偏仪检测器之间具有分束器的集成聚焦系统。 分束器将一部分辐射器提供给透镜系统,该透镜系统将与最佳对焦位置的任何偏差放大至少2倍。 聚焦系统包括一个2D传感器,其中聚焦在传感器上的光斑比传感器小50%或更小。 聚焦系统还可以包括补偿器,以校正由分束器引起的光学像差。 处理器接收图像信号并找到可以确定聚焦误差的点的位置,并用于校正椭偏仪的焦点位置。 处理器补偿由旋转光学元件引起的光斑移动。 此外,可以使用比例积分微分控制器来控制照相机的曝光时间和/或增益。