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11. 发明授权

US07230760B2 Polarizers and isolators and methods of manufacture 有权
标题翻译：偏振器和隔离器及其制造方法
公开(公告)号：US07230760B2
公开(公告)日：2007-06-12
申请号：US11246482
申请日：2005-10-07
申请人： Amy J. Naylor , Jessica L. Neumann , Robert S. Pavlik, Jr. , Katherine R. Rossington , Robert Sabia , Donald M. Trotter, Jr.
发明人： Amy J. Naylor , Jessica L. Neumann , Robert S. Pavlik, Jr. , Katherine R. Rossington , Robert Sabia , Donald M. Trotter, Jr.
IPC分类号： G02B27/28
CPC分类号： G02B5/3008 , C03C4/00 , C03C14/006 , C03C2214/08 , Y10S372/703
摘要： A passively aligned optical isolator includes laminated layers of material including two polarizing glass layers sandwiching a Faraday rotator layer. Each polarizing glass layer comprises a glass matrix containing elongated metal particles exhibiting a change in polarization axis of less than about 0.0375°/m over a distance of at least 8 mm, as measured across a major surface of the layer. The optical isolator has a contrast ratio greater than 40 dB.
摘要翻译：被动对准的光隔离器包括层叠的材料层，包括夹着法拉第转子层的两个偏光玻璃层。每个偏振玻璃层包含玻璃基质，该玻璃基质含有在超过该层的主表面上测量的在至少8mm的距离上显示小于约0.0375°/ m的偏振轴变化的细长金属颗粒。光隔离器的对比度大于40 dB。

12. 发明申请

US20060039071A1 Polarizers and isolators and methods of manufacture 有权
公开(公告)号：US20060039071A1
公开(公告)日：2006-02-23
申请号：US11246482
申请日：2005-10-07
申请人： Amy Naylor , Jessica Neumann , Robert Pavlik , Katherine Rossington , Robert Sabia , Donald Trotter
发明人： Amy Naylor , Jessica Neumann , Robert Pavlik , Katherine Rossington , Robert Sabia , Donald Trotter
IPC分类号： G02B27/28
CPC分类号： G02B5/3008 , C03C4/00 , C03C14/006 , C03C2214/08 , Y10S372/703
摘要： Polarizing glass articles, optical isolators including polarizing glass articles, and methods of manufacturing polarizing glass articles and optical isolators are disclosed. The methods manufacture can be used to manufacture isolators exhibiting improved contrast ratio.

13. 发明授权

US06949164B2 Direct bonding of articles containing silicon 有权
标题翻译：直接粘合含硅的物品
公开(公告)号：US06949164B2
公开(公告)日：2005-09-27
申请号：US10255926
申请日：2002-09-25
申请人： Robert Sabia
发明人： Robert Sabia
IPC分类号： C03C27/06 , H01L21/306 , H01L21/762 , B32B31/12
CPC分类号： H01L21/02052 , C03C27/06 , H01L21/76256
摘要： Methods of bonding glass and silicon-containing articles are disclosed. Bonding is achieved without use of adhesives or high temperature fusion. A wide variety of glass and silicon-containing articles may be bonded by the methods of the invention.
摘要翻译：公开了粘合玻璃和含硅物品的方法。粘合是在不使用粘合剂或高温熔融的情况下实现的。各种玻璃和含硅制品可以通过本发明的方法结合。

14. 发明授权

US06669536B2 Method of making optical fluoride laser crystal components 有权
标题翻译：制造氟化物激光晶体组分的方法
公开(公告)号：US06669536B2
公开(公告)日：2003-12-30
申请号：US09734531
申请日：2000-12-11
申请人： Robert Sabia
发明人： Robert Sabia
IPC分类号： B24B100
CPC分类号： B24B13/00 , C30B29/12 , C30B33/00
摘要： The method of making optical fluoride crystal components provide optical components with beneficial final polished transmission surfaces for transmitting below 200 nm wavelengths of light, such as produced by excimer lasers and utilized in optical lithography. The invention utilizes colloidal silica soot in the polishing of optical fluoride crystal surfaces. This colloidal silica soot is a byproduct of chemical vapor deposition processing of fused silica or ultra low expansion glasses. The colloidal silica byproduct is referred to as “soot”. Retaining the same physical properties as the parent glass and having a spherical morphology, the colloidal silica soot is an ideal for final polishing applications of optical fluoride crystals, and particularly for optical fluoride crystals such as calcium fluoride which have high transmission levels to below 300 nm light such as produced by excimer lasers. The soot has a large particle size and spherical shape when compared to conventional colloidal or fumed silica.
摘要翻译：制造光氟化物晶体组分的方法为光学部件提供有益的最终抛光透射表面，用于传输低于200nm波长的光，例如由准分子激光器产生并用于光学光刻。本发明在光氟化物晶体表面的研磨中利用胶态二氧化硅烟灰。这种胶体二氧化硅烟炱是熔融二氧化硅或超低膨胀玻璃的化学气相沉积处理的副产物。胶体二氧化硅副产物称为“烟灰”。保留与母体玻璃相同的物理性质并具有球形形态，胶体二氧化硅烟炱是光氟化物晶体的最终抛光应用的理想选择，特别是对于具有高透射率至300nm以下的氟化钙等氟化物晶体诸如由准分子激光器产生的光。当与常规的胶体或热解法二氧化硅相比时，烟炱具有大的粒度和球形。

15. 发明授权

US06595834B2 Method of making <200nm light transmitting optical fluoride crystals for transmitting less than 200nm light 有权
标题翻译：制造<200nm透光光氟化物晶体发射小于200nm光的方法
公开(公告)号：US06595834B2
公开(公告)日：2003-07-22
申请号：US09911153
申请日：2001-07-23
申请人： Rebecca S. Retherford , Robert Sabia , Vincent P. Sokira
发明人： Rebecca S. Retherford , Robert Sabia , Vincent P. Sokira
IPC分类号： B24B100
CPC分类号： B24B37/0056 , B24B13/00 , B24B37/044 , C09G1/02
摘要： The invention relates to optical fluoride crystals, and particularly to optical fluoride crystals such as calcium fluoride, which have high transmission levels to below 200 nm light, such as produced by excimer lasers. In particular the invention relates to making optical fluoride crystals with improved transmission surfaces. The invention relates to the elimination of mid-spatial frequency roughness 1-1000 &mgr;m spatial wavelengths and high-spatial frequency
摘要翻译：本发明涉及光氟化物晶体，特别涉及氟化钙晶体，例如氟化钙，其具有高于200nm光的高透射率，例如由准分子激光器产生的。特别地，本发明涉及制备具有改进的透射表面的氟化物晶体。本发明涉及从光氟化物晶体表面消除中空间频率粗糙度1-1000mum的空间波长和高空间频率<1mum的空间波长。从光氟化物晶体表面去除中空间频率1-1000mum空间波长和高空间频率<1mum空间波长提供了在低于200nm光学光学波长例如193nm和157nm处的改进的透射。本发明包括最终完成的氟化物晶体，其最终光洁度高的光学透射表面没有中空间频率粗糙度1-1000μm的空间波长和高空间频率粗糙度<1mum的空间波长，在lambd <200nm具有高透射率。

16. 发明授权

US06375551B1 Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms 失效
标题翻译：氟化钙光学VUV微光学透镜元件和预成型件的埃斯汀抛光
公开(公告)号：US06375551B1
公开(公告)日：2002-04-23
申请号：US09587830
申请日：2000-06-06
申请人： Charles M. Darcangelo , Robert Sabia , Harrie J. Stevens , Paul J. Williamson
发明人： Charles M. Darcangelo , Robert Sabia , Harrie J. Stevens , Paul J. Williamson
IPC分类号： B24B100
CPC分类号： B24B37/0056 , B24B13/06 , B24B37/042 , B24B49/16 , C30B29/12 , C30B33/00
摘要： The invention provides a means for making below 200 nm VUV optical microlithography lens elements and preforms therefor. The inventive methods include polishing a fluoride optical lithography crystal with cerium to a surface roughness less than five angstroms. The invention includes making a 157 nm VUV optical lithography element preform by polishing a calcium fluoride crystal with cerium oxide polish.
摘要翻译：本发明提供了制造低于200nm的VUV光学微光学透镜元件和预制件的方法。本发明的方法包括将具有铈的氟化物光刻晶体抛光至小于5埃的表面粗糙度。本发明包括通过用氧化铈抛光剂抛光氟化钙晶体来制造157nm VUV光刻单元预制件。

17. 发明授权

US08713968B2 Method and apparatus for making a 3D glass article 有权
标题翻译：制作3D玻璃制品的方法和装置
公开(公告)号：US08713968B2
公开(公告)日：2014-05-06
申请号：US13094116
申请日：2011-04-26
申请人： Thomas A Keebler , Robert Sabia , Ljerka Ukrainczyk
发明人： Thomas A Keebler , Robert Sabia , Ljerka Ukrainczyk
IPC分类号： C03B23/023 , C03B23/26
CPC分类号： C03B23/023 , B24B9/10 , C03B23/025 , C03B23/0252 , C03B23/0302 , C03B23/0357 , C03B23/26 , C03B2225/02
摘要： A method of making a 3D glass article includes forming at least one marker on an edge of a 2D glass piece. The 2D glass piece is thermally reformed into a 3D glass article, where the at least one marker formed on the edge of the 2D glass piece is carried over to an edge of the 3D glass article. The 3D glass article is aligned on a support using the at least one marker on the edge of the 3D glass article. Then, the edge of the 3D glass article is finished to a final shape and dimension.
摘要翻译：制造3D玻璃制品的方法包括在2D玻璃片的边缘上形成至少一个标记。 2D玻璃片被热重整成3D玻璃制品，其中形成在2D玻璃片的边缘上的至少一个标记承载在3D玻璃制品的边缘上。使用3D玻璃制品边缘上的至少一个标记将3D玻璃制品对准在支撑件上。然后，3D玻璃制品的边缘完成到最终的形状和尺寸。

18. 发明申请

US20120052252A1 METHODS FOR EXTRACTING STRENGTHENED GLASS SUBSTRATES FROM GLASS SHEETS 有权
标题翻译：从玻璃片中提取加强玻璃基材的方法
公开(公告)号：US20120052252A1
公开(公告)日：2012-03-01
申请号：US12868927
申请日：2010-08-26
申请人： Jeffrey Todd Kohli , Robert Sabia
发明人： Jeffrey Todd Kohli , Robert Sabia
IPC分类号： B32B1/00 , C03C21/00
CPC分类号： C03C17/23 , C03C21/002 , C03C23/00 , C03C2218/31 , Y10T428/24628
摘要： Methods for extracting strengthened glass substrates from glass sheets are described herein. In one embodiment, the method for extracting strengthened glass substrates from glass sheets comprises forming a plurality of channel segments in the glass sheet. The plurality of channel segments may extend through the thickness of the glass sheet and are separated by remnant glass webs connecting the glass substrate to the glass sheet. The plurality of channel segments extend around a perimeter of the glass substrate. Thereafter, the glass sheet is strengthened by ion-exchange. The glass substrate is then separated from the glass sheet by severing the glass substrate from the remnant glass webs.
摘要翻译：本文描述了从玻璃板提取强化玻璃基板的方法。在一个实施例中，从玻璃板提取强化玻璃基板的方法包括在玻璃板中形成多个通道段。多个通道段可以延伸穿过玻璃板的厚度，并且通过将玻璃基板连接到玻璃板的残余玻璃网分开。多个通道段围绕玻璃基板的周边延伸。此后，通过离子交换强化玻璃板。然后通过从残余玻璃纤维网上切断玻璃基板将玻璃基板与玻璃板分离。

19. 发明申请

US20100279067A1 GLASS SHEET HAVING ENHANCED EDGE STRENGTH 审中-公开
标题翻译：具有增强边缘强度的玻璃板
公开(公告)号：US20100279067A1
公开(公告)日：2010-11-04
申请号：US12433342
申请日：2009-04-30
申请人： Robert Sabia , Sergio Tsuda
发明人： Robert Sabia , Sergio Tsuda
IPC分类号： B32B3/02 , B32B3/00 , C03B21/02
CPC分类号： C03B33/093 , C03B17/064 , C03C23/0025 , Y02P40/57 , Y10T428/24355 , Y10T428/24777
摘要： A glass sheet having enhanced edge strength. The glass sheet is down-drawn and has at least one laser-formed edge having a minimum edge strength of at least about 90 MPa. The laser-formed edge is substantially free of a chamfer or a bevel. The glass sheet can be strengthened after formation of the edge and is adaptable for use as a cover plate for display and touch screen applications, or as a display or touch screen for information-related terminal (IT) devices; as well as in other applications.
摘要翻译：具有增强的边缘强度的玻璃板。玻璃板被拉伸并且具有至少一个具有至少约90MPa的最小边缘强度的激光成形边缘。激光成形边缘基本上没有倒角或斜面。玻璃板可以在形成边缘之后被加强，并且适用于用作显示器和触摸屏应用的盖板，或用作信息相关终端（IT）设备的显示器或触摸屏; 以及其他应用程序。

20. 发明申请

US20090035586A1 CLEANING METHOD FOR DUV OPTICAL ELEMENTS TO EXTEND THEIR LIFETIME 审中-公开
标题翻译：用于DUV光学元件的清洁方法来延长寿命
公开(公告)号：US20090035586A1
公开(公告)日：2009-02-05
申请号：US12180849
申请日：2008-07-28
申请人： Micheal J. Cangemi , Jiangwei Feng , Cindy J. Hayden , Robert Sabia , Horst Schreiber , Jue Wang
发明人： Micheal J. Cangemi , Jiangwei Feng , Cindy J. Hayden , Robert Sabia , Horst Schreiber , Jue Wang
IPC分类号： B08B6/00 , B01J19/10 , B32B9/00
CPC分类号： B08B3/12 , B08B7/0035 , B08B7/028 , B08B2203/005 , G02B1/02 , G02B1/105 , G02B1/14
摘要： The invention is directed to a method for cleaning surfaces of optical elements made from metal fluoride single crystals of formula MF2, where M is calcium, barium, magnesium, or strontium, or mixtures of the foregoing, prior to coating the elements with films of protective materials; and to a DUV optic made using the foregoing method. The method has at least the steps of: (a) immersing the optical element in at least one selected liquid and utilizing sonication at megasonic frequencies to remove particulates, polishing slurry residue and the damaged top layer of the optical element; (b) cleaning in a gas phase cleaning process whereby hydrocarbons are removed from the surface of the optical element using UV/ozone cleaning; and (c) exposing, in a gas phase process, of the optical element's surface to a low-energy plasma containing argon and oxygen, xenon and oxygen, or fluorine in a vacuum environment.
摘要翻译：本发明涉及一种用于清洁由MF2金属氟化物单晶制成的光学元件的表面的方法，其中M是钙，钡，镁或锶，或前述物质的混合物，在将元件与保护膜材料; 以及使用上述方法制造的DUV光学器件。该方法至少具有以下步骤：（a）将光学元件浸入至少一个所选择的液体中，并利用超声波以超声波频率去除微粒，抛光浆料残留物和损坏的光学元件的顶层; （b）在气相清洗过程中进行清洗，由此使用UV /臭氧清洁从光学元件的表面除去烃类; 和（c）在气相工艺中将光学元件表面暴露于在真空环境中含有氩和氧，氙和氧或氟的低能量等离子体。

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