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    • 12. 发明授权
    • Method for producing semiconductor optical device
    • 半导体光学元件的制造方法
    • US08617969B2
    • 2013-12-31
    • US13530154
    • 2012-06-22
    • Kenji SakuraiHideki YagiHiroyuki Yoshinaga
    • Kenji SakuraiHideki YagiHiroyuki Yoshinaga
    • H01L21/00
    • H01L33/0075H01S5/2275
    • A method for producing a semiconductor optical device includes the steps of growing a semiconductor stacked layer including an etch stop layer and a plurality of semiconductor layers on a major surface of a substrate; forming a mask layer on a top surface of the semiconductor stacked layer so that a tip portion of each of protrusions that protrude from the top surface among protrusions generated in the step of growing the semiconductor stacked layer is exposed; etching the protrusion by wet etching using the mask layer; after etching the protrusion by wet etching, removing the protrusion by dry etching; and removing the mask layer from the top surface, after removing the protrusion by dry etching.
    • 一种制造半导体光学器件的方法包括以下步骤:在衬底的主表面上生长包括蚀刻停止层和多个半导体层的半导体堆叠层; 在所述半导体层叠层的顶面上形成掩模层,使得在所述半导体堆叠层的生长步骤中产生的突起中从所述顶面突出的突起的前端部露出; 通过使用掩模层的湿蚀刻来蚀刻突起; 在通过湿蚀刻蚀刻突起之后,通过干蚀刻去除突起; 并且通过干蚀刻去除突起之后从顶表面去除掩模层。