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12. 发明授权

US5469302A Electrostrictive mirror actuator for use in optical projection system 失效
标题翻译：用于光学投影系统的电致镜驱动器
公开(公告)号：US5469302A
公开(公告)日：1995-11-21
申请号：US247127
申请日：1994-05-20
申请人： Dae-Young Lim
发明人： Dae-Young Lim
IPC分类号： G02B26/02 , G02B21/28 , G02B26/08 , H04N5/74 , G02B7/182 , H01L41/08
CPC分类号： G02B26/0858
摘要： An electrostrictive mirror actuator for use in an optical projection system, comprising: an active matrix substrate including a substrate, a transistor and a connecting terminal thereon; an electrostrictive actuator mounted on said active matrix substrate, including an electrostrictive member having a top and a bottom surfaces, a common signal electrode, a bias electrode and a reference electrode, wherein the top surface of the electrostrictive member is evenly separated by a trench of a fixed depth formed thereon and running across the top surface, thereby creating a first actuatig member having a first top surface and a second actuating member having a second top surface, said common signal electrode being located on the bottom surface thereof, said bias and said reference electrodes being located on the first top surface and the second top surface, respectively; a hinge provided with a flat top surface and a bottom surface having a protrusion fitted to the trench; and a mirror mounted on the flat top surface of said hinge.
摘要翻译：一种用于光学投影系统的电致伸缩镜驱动器，包括：有源矩阵基板，包括基板，晶体管及其上的连接端子; 安装在所述有源矩阵基板上的电致伸缩致动器，包括具有顶表面和底表面的电致伸缩构件，公共信号电极，偏置电极和参考电极，其中电致伸缩构件的顶表面由形成在其上的固定深度并且横过顶表面运行，从而产生具有第一顶表面的第一致动构件和具有第二顶表面的第二致动构件，所述公共信号电极位于其底表面上，所述偏压和所述参考电极分别位于第一顶表面和第二顶表面上; 铰链，其设置有平坦的顶表面和具有安装到沟槽的突起的底表面; 以及安装在所述铰链的平坦顶表面上的反射镜。

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