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    • 14. 发明授权
    • Clamping device
    • 夹紧装置
    • US07004459B2
    • 2006-02-28
    • US10680113
    • 2003-10-08
    • Toshio SatoAkira Tadano
    • Toshio SatoAkira Tadano
    • B25B1/06
    • B25B5/08
    • A clamping device includes a first clamping arm and a second clamping arm, an arm driving portion for displacing the first clamping arm to a clamping position and a non-clamping position, and a clamping force applying portion for applying a required clamping force to the clamping arm. The arm driving portion has a first driving source for displacing the first clamping arm and a power transmission mechanism. The clamping force applying portion has a pressing member for applying the clamping force to the first clamping arm by applying a rotating force in a clamping direction to the rotary shaft and a second driving source for displacing the pressing member from a non-operating position to an operating position for applying the clamping force.
    • 夹紧装置包括第一夹紧臂和第二夹紧臂,用于将第一夹持臂移动到夹紧位置和非夹紧位置的臂驱动部分,以及用于将夹紧力施加到夹紧位置的夹紧力施加部分 臂。 臂驱动部具有用于使第一夹持臂和动力传递机构移位的第一驱动源。 夹紧力施加部分具有用于通过向旋转轴施加沿夹紧方向的旋转力将夹紧力施加到第一夹持臂的按压构件和用于将按压构件从非操作位置移位到第二夹持臂的第二驱动源 用于施加夹紧力的操作位置。
    • 15. 发明授权
    • Clamping device
    • 夹紧装置
    • US06969056B2
    • 2005-11-29
    • US10706085
    • 2003-11-13
    • Toshio SatoAkira Tadano
    • Toshio SatoAkira Tadano
    • B23Q3/06B25B5/06B25B1/06
    • B25B5/06
    • A first clamping arm mounted to an arm rotary shaft is rotated by a driving mechanism formed of a worm wheel mounted to the arm rotary shaft, a worm supported on a junction frame, and a first driving source to clamp a workpiece between a second clamping arm and the first clamping arm. A rotating force in a direction opposite to a reaction force in clamping is applied by a clamping force applying mechanism to the junction frame which has been displaced through a certain angle by the reaction force to thereby generate a rotating force in a clamping direction in the arm rotary shaft through the worm and the worm wheel to thereby apply a clamping force to the first clamping arm.
    • 安装到臂旋转轴上的第一夹紧臂通过由安装在臂旋转轴上的蜗轮,支撑在接合框架上的蜗杆形成的驱动机构旋转,以及第一驱动源,用于将工件夹紧在第二夹紧臂 和第一个夹紧臂。 通过夹紧力施加机构将与夹紧中的反作用力相反的方向的旋转力施加到通过反作用力而被偏移了一定角度的接合框架,从而在臂的夹紧方向上产生旋转力 旋转轴通过蜗杆和蜗轮,从而向第一夹紧臂施加夹紧力。
    • 16. 发明申请
    • IONIZER
    • 离子
    • US20090262482A1
    • 2009-10-22
    • US12410577
    • 2009-03-25
    • Masayuki ORIHARATakayuki ToshidaAkira Tadano
    • Masayuki ORIHARATakayuki ToshidaAkira Tadano
    • H01J27/00
    • H01T23/00B03C3/32B03C3/368B03C3/383
    • An ionizer is formed by coupling a fan unit provided with a discharge electrode and a fan and a control unit provided with an indicator and an adjuster to each other, and both units are changeable between a normal coupling condition, where both are directed in the same direction, and an opposite coupling condition, where they are directed in opposite directions to each other, and in addition, a power/signal arrangement of the connection terminals of the separate connector is bilaterally symmetrical such that same power and signals ale transmitted and received between the separate connectors of both units connected to each other in either coupling condition of aforementioned both units.
    • 通过将设置有放电电极和风扇的风扇单元和设置有指示器和调节器的控制单元联接而形成电离器,并且两个单元可在正常耦合条件之间变化,两者均在相同的方向 方向和相反的耦合条件,其中它们彼此相反地指向,并且另外,分离连接器的连接端子的功率/信号布置是双边对称的,使得在相互之间传递和接收相同的功率和信号 两个单元的分离的连接器在上述两个单元的耦合条件下彼此连接。
    • 17. 发明申请
    • OPTIMIZATION METHOD OF DEPOSITION TIME AND AN OPTIMIZATION SYSTEM OF DEPOSITION TIME
    • 沉积时间的优化方法和沉积时间的优化系统
    • US20090192641A1
    • 2009-07-30
    • US11862705
    • 2007-09-27
    • Akira TADANOYusuke INOUEIsao YOKOYAMA
    • Akira TADANOYusuke INOUEIsao YOKOYAMA
    • G05B13/04G06F17/30G06F17/00G06F19/00
    • H01L22/20
    • A semiconductor manufacturing method and apparatus is provided that can improve uniformity of processing time of oxidation thickness. When starting a heat oxidation process, a time for optimum oxidation processing in the process management system is calculated based on atmospheric pressure data, a target thickness of that process, oxidization time, thickness data and atmospheric pressure data in the immediately preceding process under the same oxidization processing job. The optimum system comprises a process management system such as a host computer, a device having a barometer, a heat oxidation-processing device and a thickness-measuring device. The host computer, the barometer, the heat oxidation processing device and the thickness-measuring device are connected via a network so as to transmit data to and from each device.
    • 提供了可以提高氧化厚度的处理时间的均匀性的半导体制造方法和装置。 当开始热氧化过程时,根据大气压力数据,该过程的目标厚度,氧化时间,厚度数据和大气压力数据在相同的前一过程中计算过程管理系统中最佳氧化处理的时间 氧化处理工作。 最佳系统包括诸如主计算机,具有气压计的装置,热氧化处理装置和厚度测量装置之类的过程管理系统。 主计算机,气压计,热氧化处理装置和厚度测量装置经由网络连接,以便从每个装置传送数据。